公开(公告)号：US20180027642A1

公开(公告)日：2018-01-25

申请号：US15696508

申请日：2017-09-06

Applicant: ASML Netherlands B.V.

Inventor： Alexander I Ershov ,  David Evans ,  Matthew Graham

IPC: H05G2/00 ,  G03F7/20

CPC classification number: H05G2/006 ,  G03F7/2008 ,  G03F7/70 ,  G03F7/70033 ,  H05G2/005 ,  H05G2/008

Abstract: A device and method are disclosed in which a source material delivery system can be reoriented so that the path of the source material is not directly towards an irradiation region in operating conditions in which the path is expected to be unpredictable. A shroud provided to protect the flow of source material from being disrupted is segmented so with one part of the shroud being movable with respect to another part of the shroud so that the movable part can avoid interfering with the path of the source material when it is not directly towards the irradiation region.