公开(公告)号：US11803119B2

公开(公告)日：2023-10-31

申请号：US17790339

申请日：2020-12-08

Applicant: ASML Holding N.V. ,  ASML Netherlands B.V.

Inventor： Michal Emanuel Pawlowski ,  Aage Bendiksen ,  Ryan Alan Munden ,  Han-Kwang Nienhuys

IPC: G03F1/84 ,  G03F7/00 ,  G01N21/94

CPC classification number: G03F1/84 ,  G03F7/7085 ,  G03F7/70191 ,  G03F7/70916 ,  G01N21/94

Abstract: A system (400) includes an illumination system (402), a detector (404), and a comparator (406). The illumination system includes a radiation source (408) and a spatial light modulator (410). The radiation source generates a beam of radiation (442). The spatial light modulator directs the beam toward a surface (436) of an object (428) and adjusts a spatial intensity distribution of the beam at the surface. The detector receives radiation (444) scattered at the surface and by a structure (434) near the surface. The detector generates a detection signal based on the received radiation. The comparator receives the detection signal, generates a first image based on the detection signal, and distinguishes between a spurious signal and a signal corresponding to a presence of a foreign particle on the surface based on the first image and the adjusted spatial intensity distribution.

公开(公告)号：US12140870B2

公开(公告)日：2024-11-12

申请号：US18018127

申请日：2021-07-20

Applicant: ASML Holding N.V.

Inventor： Michal Emanuel Pawlowski

IPC: G03F7/00

Abstract: Systems, apparatuses, and methods are provided for increasing the throughput of a particle inspection system. During a first portion of an exposure time period of the particle inspection system, an example method can include irradiating a first region of a substrate surface, blocking all reflected radiation outside the first region, and generating a first sub-image of the first region based on radiation reflected from the first region. During a second portion of the exposure time period, the example method can further include irradiating a second region of the substrate surface, blocking all reflected radiation outside the second region, and generating a second sub-image of the second region based on radiation reflected from the second region. Subsequently, the example method can include generating a composite image based on the first sub-image and the second sub-image.