公开(公告)号：US11835752B2

公开(公告)日：2023-12-05

申请号：US17066524

申请日：2020-10-09

Applicant: ASML HOLDING N.V.

Inventor： King Pui Leung ,  Tao Chen ,  Ronan James Havelin ,  Igor Matheus Petronella AARTS ,  Adel Joobeur ,  Joseph Carbone

IPC: G02B6/02 ,  G02F1/365 ,  G01B11/02 ,  G02B6/122 ,  G02B6/293 ,  G03F9/00 ,  G02B6/27 ,  G02F1/35

CPC classification number: G02B6/02004 ,  G01B11/02 ,  G02B6/1228 ,  G02B6/2746 ,  G02B6/29377 ,  G02F1/365 ,  G03F9/7065 ,  G01B2210/56 ,  G02F1/3528

Abstract: A measurement apparatus, including: a tapered optical fiber, the tapered optical fiber having an input to receive radiation and having an output to provide spectrally broadened output radiation toward a measurement target, the tapered optical fiber configured to spectrally broaden the radiation received at the input; and a detector system configured to receive a redirected portion of the output radiation from the measurement target.

公开(公告)号：US10802208B2

公开(公告)日：2020-10-13

申请号：US16094244

申请日：2017-03-17

Applicant: ASML HOLDING N.V.

Inventor： King Pui Leung ,  Tao Chen ,  Ronan James Havelin ,  Igor Matheus Petronella Aarts ,  Adel Joobeur ,  Joseph Carbone

IPC: G02B6/02 ,  G02F1/365 ,  G03F9/00 ,  G01B11/02 ,  G02B6/122 ,  G02B6/27 ,  G02B6/293 ,  G02F1/35

Abstract: A measurement apparatus, including: a tapered optical fiber, the tapered optical fiber having an input to receive radiation and having an output to provide spectrally broadened output radiation toward a measurement target, the tapered optical fiber configured to spectrally broaden the radiation received at the input; and a detector system configured to receive a redirected portion of the output radiation from the measurement target.