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公开(公告)号：US10288810B2
公开(公告)日：2019-05-14
申请号：US15562883
申请日：2016-04-11
Applicant: ASML HOLDING N.V.
Inventor： Louis Zhongliang Lu , Tao Chen , Francisco Javier Berrios , Jiazong Zhang
Abstract: A system including a first component having a lensed facet; and a second component optically coupled to the first component, the second component having a tapered facet, the tapered facet and lensed facet spaced from each other so as to establish evanescent-wave coupling between the first component and the second component.
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