公开(公告)号：US20240339493A1

公开(公告)日：2024-10-10

申请号：US18624808

申请日：2024-04-02

申请人： ASM IP Holding B.V.

发明人： Alessandra Leonhardt ,  Varun Sharma ,  Vivek Koladi Mootheri ,  Leo Lukose ,  Andrea Illiberi ,  Jerome Innocent ,  Aditya Chauhan

IPC分类号： H01L29/06 ,  H01L21/02 ,  H01L29/778

CPC分类号： H01L29/0607 ,  H01L21/02362 ,  H01L28/75 ,  H01L29/7786

摘要： Structures and related methods and systems for forming structures. The structures comprise a proximal contact, a distal contact, a high-k dielectric, and at least one of a proximal barrier and a distal barrier. In some embodiments, at least one of the proximal barrier and the distal barrier is constructed and arranged to inhibit Poole-Frenkel emission from the high-k dielectric when a first electric field is applied between the proximal contact and a distal contact in a first electric field direction.

公开(公告)号：US20240191347A1

公开(公告)日：2024-06-13

申请号：US18535440

申请日：2023-12-11

申请人： ASM IP Holding B.V.

发明人： Monica Thukkaram ,  Aditya Chauhan ,  Andrea Illiberi ,  Vivek Koladi Mootheri ,  Leo Lukose ,  Alessandra Leonhardt ,  Michael Eugene Givens

IPC分类号： C23C16/40 ,  C23C16/455

CPC分类号： C23C16/407 ,  C23C16/403 ,  C23C16/45527 ,  C23C16/45553

摘要： Methods and related solids and systems are described. In some embodiments, methods as described herein can comprise executing a plurality of super cycles. Ones from the plurality of super cycles can comprise a magnesium sub cycle, an aluminum sub cycle, and a zinc sub cycle. At least one super cycle can comprise more than one magnesium sub cycle, aluminum sub cycle, or zinc sub cycle. Thus, layers having a tunable magnesium, aluminum, or zinc composition can be formed.