RADIUS-OF-CURVATURE MEASUREMENT BY SPECTRALLY-CONTROLLED INTERFEROMETRY

    公开(公告)号:US20180306575A1

    公开(公告)日:2018-10-25

    申请号:US15959333

    申请日:2018-04-23

    Inventor: ARTUR OLSZAK

    Abstract: The ROC value of a test surface is measured with a single spectrally-controlled interferometric measurement using a reference source of known ROC. The test surface is placed at the confocal position of the reference surface and the light source is modulated so as to produce localized interference fringes at the location of the test surface. The interference fringes are then processed with conventional interferometric analysis tools to establish the exact position of the test surface in relation to the reference surface, thereby determining the distance between the test surface and the reference surface. The radius of curvature of the test surface is obtained simply by subtracting such distance from the known radius of curvature of the reference surface.

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