公开(公告)号：US20210156789A1

公开(公告)日：2021-05-27

申请号：US16690576

申请日：2019-11-21

Applicant: APPLIED MATERIALS, INC.

Inventor： Gang Grant PENG ,  Robert Douglas MIKKOLA ,  David BRITZ ,  Lance SCUDDER ,  David W. GROECHEL

IPC: G01N17/02 ,  G01N17/00 ,  G01N27/00 ,  G01N27/02

Abstract: A method for detecting corrosion on a conductive object includes submerging a surface of the conductive object at least partially in an aqueous solution, flowing current through the surface of the conductive object by forming a voltage differential across the surface, varying the voltage differential across the surface while monitoring the current through the surface of the conductive object, determining a total charge corresponding to a corrosion level of the surface of the conductive object based on current versus voltage levels. The corrosion level may further be utilized in selecting a cleaning process to remediate the corrosion of the surface based on the corrosion level and in applying a protective corrosion barrier to on at least part of the surface after the cleaning process.