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    Topography prediction using system state information
    3.
    发明授权
    Topography prediction using system state information 有权

    公开(公告)号：US10303812B2

    公开(公告)日：2019-05-28

    申请号：US15231487

    申请日：2016-08-08

    Applicant: Applied Materials, Inc.

    Inventor： Jimmy Iskandar ,  Chong Jiang ,  Michael D. Armacost ,  Bradley D. Schulze

    IPC: G06F17/50 ,  H01L21/66 ,  G01R31/28

    Abstract: Embodiments presented herein provide techniques for predicting the topography of a product produced from a manufacturing process. One embodiment includes generating a plurality of prediction models. Each of the plurality of prediction models corresponds to a respective one of a plurality of positional coordinates of a product produced from a manufacturing process. The method also includes receiving a set of user-specified input parameters to apply to the manufacturing control process. The method further includes generating a graphical representation of a topography map for the product for the user-specified of input parameters based on the plurality of prediction models.

    System and method for monitoring sensor linearity as part of a production process
    4.
    发明授权
    System and method for monitoring sensor linearity as part of a production process 有权

    公开(公告)号：US11378426B2

    公开(公告)日：2022-07-05

    申请号：US14735469

    申请日：2015-06-10

    Applicant: APPLIED MATERIALS, INC.

    Inventor： Bradley D. Schulze ,  Michael D. Armacost

    IPC: G01D18/00 ,  H01L21/67

    Abstract: Methods and systems for automated monitoring of sensors associated with a tool used in a manufacturing process are described. Sensor health may be evaluated based on the sensor's actual responses to set point changes. Rather than interrupt operation of the tool to determine whether one or more sensors are behaving in a predictable manner over an applicable range of operating conditions, pairs of set point values and sensor responses may be collected during the manufacturing process and stored in a time-indexed manner. A virtual model may be created for each sensor using selected ones of the indexed pairs and represented as points in an orthogonal coordinate system to identify a predictable operating region corresponding to the operating range. If a sensor response to a set point change, reflected in a stored, time indexed pair, is non-linear or offset relative to the predictable operating region, an alarm may be generated.

    Apparatus for cost-effective conversion of unsupervised fault detection (FD) system to supervised FD system
    5.
    发明授权
    Apparatus for cost-effective conversion of unsupervised fault detection (FD) system to supervised FD system 有权

    公开(公告)号：US11054815B2

    公开(公告)日：2021-07-06

    申请号：US15457016

    申请日：2017-03-13

    Applicant: Applied Materials, Inc.

    Inventor： Bradley D. Schulze ,  Suketu Arun Parikh ,  Jimmy Iskandar ,  Jigar Bhadriklal Patel

    IPC: G05B23/02

    Abstract: Techniques are provided for classifying runs of a recipe within a manufacturing environment. Embodiments monitor a plurality of runs of a recipe to collect runtime data from a plurality of sensors within a manufacturing environment. Qualitative data describing each semiconductor devices produced by the plurality of runs is determined. Embodiments characterize each run into a respective group, based on an analysis of the qualitative data, and generate a data model based on the collected runtime data. A multivariate analysis of additional runtime data collected during at least one subsequent run of the recipe is performed to classify the at least one subsequent run into a first group. Upon classifying the at least one subsequent run, embodiments output for display an interface depicting a ranking sensor types based on the additional runtime data and the description of relative importance of each sensor type for the first group within the data model.

    PORTABLE, ADAPTABLE EQUIPMENT HEALTH USER INTERFACE
    6.
    发明申请
    PORTABLE, ADAPTABLE EQUIPMENT HEALTH USER INTERFACE 审中-公开
    便携式，适应性设备健康用户界面

    公开(公告)号：US20140114611A1

    公开(公告)日：2014-04-24

    申请号：US14061725

    申请日：2013-10-23

    Applicant: Applied Materials, Inc.

    Inventor： James R. Moyne ,  Jimmy Iskandar ,  Bradley D. Schulze

    IPC: G01M99/00

    CPC classification number: G05B23/0272 ,  G05B19/4184 ,  G05B23/024 ,  Y02P90/14

    Abstract: Described herein are methods and systems for providing a user interface to indicate health of a tool in a manufacturing facility. A method may include receiving, via a user interface, user selection of fault detection data pertaining to a tool in a manufacturing facility, obtaining health abnormality indicators of the tool using the fault detection data, and presenting the health abnormality indicators of the tool in the user interface.

    Abstract translation: 这里描述了用于提供用户界面以指示制造设施中的工具的健康的方法和系统。 一种方法可以包括：经由用户界面接收用户选择与制造设备中的工具相关的故障检测数据，使用故障检测数据获取所述工具的健康异常指示，以及将所述工具的健康异常指示符呈现在 用户界面。

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