公开(公告)号：US10942507B2

公开(公告)日：2021-03-09

申请号：US16251939

申请日：2019-01-18

Applicant: Applied Materials, Inc.

Inventor： Mark Robert Denome ,  Vijayakumar Venugopal ,  Ashish Kumar ,  Vijai Thangamany ,  Somil Kapdia ,  Ching-Hong Hsieh

IPC: G05B19/418

Abstract: A method includes determining, by a processing device, a first eco-efficiency characterization associated with a first design of manufacturing equipment based on one or more of water eco-efficiency characterization, emissions eco-efficiency characterization, or electrical energy eco-efficiency characterization. The water eco-efficiency characterization, the emissions eco-efficiency characterization, the electrical energy eco-efficiency characterization, and the first eco-efficiency characterization are associated with an amount of environmental impact generated by the manufacturing equipment per unit product produced by the manufacturing equipment. The method further includes comparing the first eco-efficiency characterization to a second eco-efficiency characterization that is associated with a second design of the manufacturing equipment. The method further includes implementing the second design of the manufacturing equipment responsive to determining, based on the comparing, that the second eco-efficiency characterization is associated with a lower amount of environmental impact per unit product than the first eco-efficiency characterization.

公开(公告)号：US10460960B2

公开(公告)日：2019-10-29

申请号：US15372730

申请日：2016-12-08

Applicant: APPLIED MATERIALS, INC.

Inventor： Ashish Kumar ,  Vijayakumar Venugopal ,  Niladri Roy ,  Ramachandra Murthy Gunturi ,  Andreas Neuber ,  Stephen C. Wolgast

IPC: H01L21/67

Abstract: Embodiments of a system, a gas panel and method thereof having reduced exhaust requirements for the delivery of gases include distributing an inert gas in at least one interior portion of the gas panel in which a gas to be delivered by the gas panel is present. Embodiments can further include monitoring for leaks in the interior portion of the gas panel and, in response to a detected leak, increasing the distribution of the inert gas in at least the portion of the gas panel in which the leak was detected. Embodiments may further include exhausting gases out of the gas panel. In such embodiments, in response to a detected leak, a rate of the exhausting of the gases is increased. The gas panel can also be sealed to reduce an amount of gas that leaks out of or air that enters into the gas panel.

公开(公告)号：US10185313B2

公开(公告)日：2019-01-22

申请号：US15134234

申请日：2016-04-20

Applicant: Applied Materials, Inc.

Inventor： Mark Robert Denome ,  Vijayakumar Venugopal ,  Ashish Kumar ,  Vijai Thangamany ,  Somil Kapadia ,  Ching-Hong Hsieh

IPC: G06F19/00 ,  G05B19/418

Abstract: A method for wafer point by point analysis includes receiving a selection of manufacturing equipment, utility use data, and utilization data. A water eco-efficiency characterization is calculated based on the utilization data and the utility use data. An emissions eco-efficiency characterization is calculated based on the utilization data and the utility use data. An electrical energy eco-efficiency characterization is calculated based on the utilization data and the utility use data. A combined eco-efficiency characterization is calculated based on the utilization data and water eco-efficiency characterization, emissions eco-efficiency characterization, and electrical energy eco-efficiency characterizations. The combined eco-efficiency characterization is provided for display by a graphical user interface.