公开(公告)号：US08456963B1

公开(公告)日：2013-06-04

申请号：US12758319

申请日：2010-04-12

申请人： Yufeng Hu ,  Ruolin Li ,  Ut Tran ,  Jinshan Li

发明人： Yufeng Hu ,  Ruolin Li ,  Ut Tran ,  Jinshan Li

IPC分类号： G11B11/00

CPC分类号： G11B5/314 ,  G11B5/4866 ,  G11B5/6088 ,  G11B2005/0021

摘要： An energy assisted magnetic recording (EAMR) disk drive comprises a suspension and a slider having a back side, a laser-facing surface, and an air-bearing surface (ABS) opposite the back side. The slider is mounted to the suspension on the back side. The disk drive further comprises an EAMR transducer coupled with the slider, a portion of the EAMR transducer residing in proximity to the ABS and on the laser-facing surface of the slider. The disk drive further comprises a laser coupled with the suspension and having a light emitting surface facing the laser-facing surface of the slider. The laser has an optic axis substantially parallel to the suspension. The laser provides energy substantially along the optic axis and is optically coupled with the EAMR transducer via free space. The EAMR transducer receives the energy from the laser and writes to the media using the energy.

摘要翻译： 能量辅助磁记录（EAMR）盘驱动器包括悬架和具有背面，面向激光的表面和与背面相对的空气轴承表面（ABS）的滑块。 滑块安装在背面的悬架上。 磁盘驱动器还包括与滑动器耦合的EAMR换能器，位于ABS附近的EAMR换能器的一部分和滑块的面向激光的表面。 磁盘驱动器还包括与悬架连接并具有面向滑块的面向激光的表面的发光表面的激光器。 激光器具有基本上平行于悬架的光轴。 激光器基本沿光轴提供能量，并通过自由空间与EAMR传感器光学耦合。 EAMR传感器从激光器接收能量，并使用能量写入介质。

公开(公告)号：US08753903B1

公开(公告)日：2014-06-17

申请号：US13478058

申请日：2012-05-22

申请人： Shawn M. Tanner ,  Yufeng Hu ,  Sergei Sochava

发明人： Shawn M. Tanner ,  Yufeng Hu ,  Sergei Sochava

IPC分类号： H01L21/66

CPC分类号： H01L22/12

摘要： Improved pump-probe testing methods and apparatuses for measuring the performance of a plasmon element at wafer level are provided. In one embodiment, the apparatus includes a light source configured to output a first light beam on a grating located at a first end of a waveguide, the waveguide being configured to couple energy of the first light beam to the plasmon element located at a second end of the waveguide, and an optical probe assembly positioned above a top surface of the wafer. The optical probe assembly is configured to direct a second light beam on an area of the wafer including the plasmon element and detect a portion of the second light beam reflected from the area.

摘要翻译： 提供了用于测量晶圆级别的等离子体元件的性能的改进的泵浦探针测试方法和装置。 在一个实施例中，该设备包括配置成在位于波导的第一端的光栅上输出第一光束的光源，该波导被配置为将第一光束的能量耦合到位于第二端的等离子体元件 以及位于晶片顶表面上方的光学探头组件。 光探针组件被配置为将第二光束引导到包括等离子体元件的晶片的区域上，并检测从该区域反射的第二光束的一部分。

公开(公告)号：US08670295B1

公开(公告)日：2014-03-11

申请号：US12973328

申请日：2010-12-20

申请人： Yufeng Hu ,  Ruolin Li ,  Ut Tran

发明人： Yufeng Hu ,  Ruolin Li ,  Ut Tran

IPC分类号： G11B11/00

CPC分类号： G11B5/6088 ,  G11B5/105 ,  G11B5/314 ,  G11B2005/0021

摘要： A method and system for providing an energy assisted magnetic recording (EAMR) transducer coupled with a laser. The EAMR transducer has an air-bearing surface (ABS) configured to reside in proximity to a media during use. The EAMR transducer includes a write pole, at least one coil, a waveguide and an output device. The write pole is configured to write to a region of the media. The at least one coil is for energizing the write pole. The waveguide has an input optically coupled to the laser and configured to direct energy from the laser toward the ABS for heating the region of the media. The output device is optically coupled to the waveguide. The output device coupling out a portion of the energy not coupled to the media.

摘要翻译： 一种用于提供与激光器耦合的能量辅助磁记录（EAMR）传感器的方法和系统。 EAMR传感器具有配置成在使用期间驻留在介质附近的空气轴承表面（ABS）。 EAMR传感器包括写极，至少一个线圈，波导和输出装置。 写入极配置为写入介质的一个区域。 至少一个线圈用于激励写入极。 波导具有光学耦合到激光器并被配置为将能量从激光器引向ABS以加热介质区域的输入。 输出装置光耦合到波导。 输出设备耦合出未耦合到介质的能量的一部分。

公开(公告)号：US08385158B1

公开(公告)日：2013-02-26

申请号：US12574621

申请日：2009-10-06

申请人： Yufeng Hu ,  Ut Tran

发明人： Yufeng Hu ,  Ut Tran

IPC分类号： G11B11/00

CPC分类号： G11B5/3163 ,  G11B5/6088 ,  G11B2005/0021

摘要： A method and system for fabricating an energy assisted magnetic recording (EAMR) transducer is described. The EAMR transducer has an air-bearing surface (ABS) and a waveguide. The method includes providing a planarized near field transducer (NFT) for the waveguide and forming a sloped surface on the planarized NFT. The sloped surface has a front edge separated from the ABS by a distance. The method and system also include providing a write pole on the sloped surface.

摘要翻译： 描述了用于制造能量辅助磁记录（EAMR）换能器的方法和系统。 EAMR传感器具有空气轴承表面（ABS）和波导。 该方法包括为波导提供平面化近场换能器（NFT），并在平坦化NFT上形成倾斜表面。 倾斜表面具有与ABS分离一定距离的前边缘。 该方法和系统还包括在倾斜表面上提供写极。

公开(公告)号：US08077418B1

公开(公告)日：2011-12-13

申请号：US12415465

申请日：2009-03-31

申请人： Yufeng Hu ,  Wentao Yan

发明人： Yufeng Hu ,  Wentao Yan

IPC分类号： G11B5/02

CPC分类号： G11B5/314 ,  G11B5/3136 ,  G11B5/3169 ,  G11B2005/001 ,  G11B2005/0021 ,  Y10T29/49032 ,  Y10T29/49048

摘要： Methods of fabricating an energy-assisted magnetic recording (EAMR) head to compensate for a heat-induced protrusion of a near field transducer formed therein are disclosed. The methods can include applying optical power to the near field transducer to generate heat therein. The near field transducer protrudes beyond an air bearing surface of the EAMR head by the generated heat. The methods can further include removing a protruded portion of the near field transducer.

摘要翻译： 公开了制造能量辅助磁记录（EAMR）头以补偿其中形成的近场换能器的热诱导突起的方法。 这些方法可以包括将光功率施加到近场换能器以在其中产生热量。 近场传感器通过产生的热量突出超过EAMR头的空气轴承表面。 所述方法还可以包括去除近场换能器的突出部分。

公开(公告)号：US08758083B1

公开(公告)日：2014-06-24

申请号：US12880913

申请日：2010-09-13

申请人： Steven C. Rudy ,  Changqing Shi ,  Yufeng Hu ,  Mark D. Moravec ,  Eric R. McKie ,  Nurul Amin

发明人： Steven C. Rudy ,  Changqing Shi ,  Yufeng Hu ,  Mark D. Moravec ,  Eric R. McKie ,  Nurul Amin

IPC分类号： B24B1/00

CPC分类号： G11B5/4866 ,  G11B5/314 ,  G11B5/3163 ,  G11B5/3166 ,  G11B5/3169 ,  G11B5/6005 ,  G11B21/21 ,  Y10T29/49021 ,  Y10T29/49037 ,  Y10T29/49046 ,  Y10T29/49048

摘要： A method and system for providing transducer(s) including a disk structure and having an air-bearing surface (ABS) are described. The disk structure resides a distance from the ABS and has a disk dimension substantially perpendicular to the ABS. Lapping control and disk windage ELGs are provided. The lapping control ELG has first and second edges first and second distances from the ABS. The disk windage ELG has edges different distances from the ABS. A difference between these edges corresponds to the disk dimension. A windage resistance of the disk windage ELG is measured and a disk windage determined. The disk windage corresponds to a difference between designed and actual disk dimensions perpendicular to the ABS. A lapping ELG target resistance is determined based on the disk windage. The transducer is lapped. Lapping is terminated based on a resistance of the lapping control ELG and the lapping ELG target resistance.

摘要翻译： 描述了一种用于提供包括盘结构并具有空气轴承表面（ABS）的换能器的方法和系统。 盘结构离ABS有一段距离，并且具有基本上垂直于ABS的盘尺寸。 提供研磨控制和磁盘风挡ELG。 研磨控制ELG具有第一和第二边缘与ABS之间的第一和第二距离。 磁盘风挡ELG与ABS的距离不同。 这些边缘之间的差异对应于磁盘维度。 测量磁盘风挡ELG的防风阻力并确定磁盘风速。 磁盘风挡对应于垂直于ABS的设计和实际磁盘尺寸之间的差异。 基于磁盘风向确定研磨ELG目标电阻。 。 基于研磨控制ELG的电阻和研磨ELG目标电阻来终止研磨。

公开(公告)号：US08749790B1

公开(公告)日：2014-06-10

申请号：US13314962

申请日：2011-12-08

申请人： Shawn M. Tanner ,  Yufeng Hu ,  Ut Tran ,  Zhongyan Wang ,  Zhong Shi ,  Sergei Sochava

发明人： Shawn M. Tanner ,  Yufeng Hu ,  Ut Tran ,  Zhongyan Wang ,  Zhong Shi ,  Sergei Sochava

IPC分类号： G01N21/55

CPC分类号： G01N21/553 ,  G01N21/7703

摘要： A structure for measuring energy absorption by a surface plasmon receptor or NFT on a waveguide comprises a first waveguide, a first input grating for coupling light comprising a first wavelength into the first waveguide, a first output grating for coupling light out of the first waveguide, a first plurality of surface plasmon receptors in cooperation with the first waveguide to receive light energy and located between the first input grating and the first output grating. The structure may further comprise a second waveguide, a second input grating for coupling light into the second waveguide, a second output grating for coupling light out of the second waveguide, a second plurality of surface plasmon receptors between the second input grating and the second output grating and in cooperation with the second waveguide to receive light energy, wherein the second plurality may be less than or greater than the first plurality.

摘要翻译： 用于测量波导上的表面等离子体激元受体或NFT的能量吸收的结构包括：第一波导，用于将包含第一波长的光引入第一波导的第一输入光栅，用于将光从第一波导耦合的第一输出光栅， 与第一波导协作以接收光能并位于第一输入光栅和第一输出光栅之间的第一多个表面等离子体激元受体。 该结构还可以包括第二波导，用于将光耦合到第二波导中的第二输入光栅，用于将光从第二波导耦合的第二输出光栅，在第二输入光栅和第二输出之间的第二多个表面等离子体激元 光栅并与第二波导配合以接收光能，其中第二多个可以小于或大于第一多个。

公开(公告)号：US08491801B1

公开(公告)日：2013-07-23

申请号：US13291702

申请日：2011-11-08

申请人： Shawn M. Tanner ,  Yufeng Hu ,  Ut Tran ,  Zhongyan Wang

发明人： Shawn M. Tanner ,  Yufeng Hu ,  Ut Tran ,  Zhongyan Wang

IPC分类号： B44C1/22 ,  G11B5/127

CPC分类号： G11B5/3133 ,  G11B5/6088 ,  G11B2005/0021 ,  Y10T29/49032 ,  Y10T29/49048

摘要： A method and system provides a near-field transducer (NFT) for an energy assisted magnetic recording (EAMR) transducer. The method and system include forming a sacrificial NFT structure having a shape a location corresponding to the NFT. A dielectric layer is deposited. A portion of the dielectric layer resides on the sacrificial NFT structure. At least this portion of the dielectric layer on the sacrificial structure is removed. The sacrificial NFT structure is removed, exposing an NFT trench in the dielectric layer. At least one conductive layer for the NFT is deposited. A first portion of the conductive layer(s) reside in the NFT trench. A second portion of the conductive layer(s) external to the NFT trench is removed to form the NFT.

摘要翻译： 一种方法和系统为能量辅助磁记录（EAMR）传感器提供近场换能器（NFT）。 该方法和系统包括形成具有对应于NFT的位置的形状的牺牲NFT结构。 沉积介电层。 电介质层的一部分位于牺牲NFT结构上。 至少该牺牲结构上介电层的这一部分被去除。 去除牺牲NFT结构，暴露电介质层中的NFT沟槽。 沉积至少一个用于NFT的导电层。 导电层的第一部分驻留在NFT沟槽中。 除去NFT沟槽外部的导电层的第二部分以形成NFT。

公开(公告)号：US08307540B1

公开(公告)日：2012-11-13

申请号：US13045433

申请日：2011-03-10

申请人： Ut Tran ,  Kevin K. Lin ,  Yufeng Hu

发明人： Ut Tran ,  Kevin K. Lin ,  Yufeng Hu

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/314 ,  G11B5/6088 ,  G11B2005/0021 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method provides an EAMR transducer. A sacrificial post is provided on an NFT distal from the ABS. This post has an edge proximate and substantially parallel to the ABS. A sacrificial mask is provided on the NFT between the post and the ABS. Optical material(s) are provided. The post is between the optical material(s) and the ABS. The post is removed. A heat sink post corresponding to the post is provided. The heat sink post has a bottom thermally coupled with the NFT and an edge proximate and substantially parallel to the ABS. Part of the heat sink post is removed, forming a heat sink having a top surface at an acute angle from the ABS. Nonmagnetic material(s) are provided on the optical material(s). A pole having a bottom surface thermally coupled with the heat sink and coil(s) are provided.

摘要翻译： 一种方法提供一种EAMR传感器。 在远离ABS的NFT上提供牺牲柱。 该柱具有靠近并且基本上平行于ABS的边缘。 在NFT之间在柱和ABS之间提供牺牲掩模。 提供光学材料。 该柱位于光学材料和ABS之间。 该帖子被删除。 提供对应于该柱的散热片。 散热柱具有与NFT热耦合的底部和靠近并且基本上平行于ABS的边缘。 去除部分散热片，形成散热片，其顶面与ABS呈锐角。 在一些或多个光学材料上提供非磁性材料。 提供具有与散热器和线圈热耦合的底表面的极。

公开(公告)号：US08279719B1

公开(公告)日：2012-10-02

申请号：US12572060

申请日：2009-10-01

申请人： Yufeng Hu ,  Yugang Wang

发明人： Yufeng Hu ,  Yugang Wang

IPC分类号： G11B11/00

CPC分类号： G11B5/314 ,  G11B5/105 ,  G11B5/1278 ,  G11B5/6088 ,  G11B2005/0021

摘要： A method and system for providing an energy assisted magnetic recording (EAMR) transducer coupled with a laser are described. The EAMR transducer has an air-bearing surface (ABS) configured to reside in proximity to a media during use. The method and system include providing at least one waveguide, at least one write pole, and at least one coil. The waveguide(s) are for directing the energy from the laser toward the ABS. The write pole(s) each include a write pole tip, a yoke, a back pedestal and a return pole. The write pole tip is coupled to the back pedestal through the yoke. The back pedestal has at least one aperture therein. The aperture(s) are configured to allow the energy from the laser to pass therethrough. The coil(s) are for energizing the at least one write pole.

摘要翻译： 描述了一种用于提供与激光器耦合的能量辅助磁记录（EAMR）传感器的方法和系统。 EAMR传感器具有配置成在使用期间驻留在介质附近的空气轴承表面（ABS）。 该方法和系统包括提供至少一个波导，至少一个写极点和至少一个线圈。 波导用于将来自激光器的能量引导到ABS。 写极点各自包括写极端，磁轭，后基座和返回极。 写极尖通过轭耦合到后基座。 后座具有至少一个孔。 孔被配置为允许来自激光器的能量通过。 线圈用于激励至少一个写极。