公开(公告)号：US20170146427A1

公开(公告)日：2017-05-25

申请号：US15298842

申请日：2016-10-20

申请人： UMA Technology Inc.

发明人： Jen Sheng LIANG

IPC分类号： G01M11/02 ,  G02B27/30

CPC分类号： G01M11/0257 ,  G01J9/00 ,  G01J2009/002 ,  G02B27/46

摘要： In an optical wavefront measuring device, a SLM generates a plurality of different through holes, so that light beams pass through the through holes and form a plurality of light patterns. The distance between an infinite objective lens module and a test lens is adjusted so that the light patterns enter into a wavefront sensor in the form of approximately parallel light after passing through the infinite objective lens module and the test lens. The wavefront sensor captures a plurality of WS images which do not have a fold-over phenomenon according to the light patterns. Computer by using an algorithm to obtain wavefront change information, and then reconstructs a wavefront on the basis of the wavefront change information.