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公开(公告)号：US20120015519A1
公开(公告)日：2012-01-19
申请号：US13242898
申请日：2011-09-23
IPC分类号： H01L21/306 , H01L21/304 , B24D11/00
摘要： A system for preparing a microcellular polyurethane material, includes a froth, prepared, for instance, by inert gas frothing a urethane prepolymer, preferably an aliphatic isocyanate polyether prepolymer, in the presence of a surfactant; a filler soluble in a CMP slurry; and a curative, preferably including an aromatic diamine and a triol. To produce the microcellular material, the froth can be combined with the filler, e.g., PVP, followed by curing the resulting mixture. The microcellular material has a low rebound and can dissipate irregular energy and stabilize polishing to yield improved uniformity and less dishing. CMP pads using the microcellular material have pores created by inert gas frothing throughout the pad polymer body and additional surface pores created by dissolution of fillers during polishing, providing flexibility in surface softness and pad stiffness.
摘要翻译： 用于制备微孔聚氨酯材料的系统包括泡沫，例如通过惰性气体在氨基甲酸酯预聚物，优选脂族异氰酸酯聚醚预聚物的存在下，在表面活性剂存在下制备; 可溶于CMP浆料的填料; 和治疗剂，优选包括芳族二胺和三醇。 为了生产微孔材料，可将泡沫与填料（例如PVP）组合，然后固化所得混合物。 微孔材料具有低回弹性，并且可以消散不规则的能量并稳定抛光以产生改进的均匀性和较少的凹陷。 使用微孔材料的CMP垫具有由整个垫聚合物体内的惰性气体起泡和由抛光期间填料溶解产生的附加表面孔产生的孔，提供表面柔软性和垫刚度的柔性。
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公开(公告)号：US20090137120A1
公开(公告)日：2009-05-28
申请号：US11943213
申请日：2007-11-20
IPC分类号： C08J9/30 , H01L21/302
摘要： A system for preparing a microcellular polyurethane material, includes a froth, prepared, for instance, by inert gas frothing a urethane prepolymer, preferably an aliphatic isocyanate polyether prepolymer, in the presence of a surfactant; a filler soluble in a CMP slurry; and a curative, preferably including an aromatic diamine and a triol. To produce the microcellular material, the froth can be combined with the filler, e.g., PVP, followed by curing the resulting mixture. The microcellular material has a low rebound and can dissipate irregular energy and stabilize polishing to yield improved uniformity and less dishing. CMP pads using the microcellular material have pores created by inert gas frothing throughout the pad polymer body and additional surface pores created by dissolution of fillers during polishing, providing flexibility in surface softness and pad stiffness.
摘要翻译： 用于制备微孔聚氨酯材料的系统包括泡沫，例如通过在表面活性剂存在下使氨基甲酸酯预聚物，优选脂族异氰酸酯聚醚预聚物起泡的惰性气体制备; 可溶于CMP浆料的填料; 和治疗剂，优选包括芳族二胺和三醇。 为了生产微孔材料，可将泡沫与填料（例如PVP）组合，然后固化所得混合物。 微孔材料具有低回弹性，并且可以消散不规则的能量并稳定抛光以产生改进的均匀性和较少的凹陷。 使用微孔材料的CMP垫具有由整个垫聚合物体内的惰性气体起泡和由抛光期间填料溶解产生的附加表面孔产生的孔，提供表面柔软性和垫刚度的柔性。
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公开(公告)号：US20090062414A1
公开(公告)日：2009-03-05
申请号：US11895829
申请日：2007-08-28
IPC分类号： C08G18/06
CPC分类号： B24D18/00 , B24B37/24 , C08G18/10 , C08G18/4829 , C08G18/4854 , C08G18/6685 , C08G2101/0066 , C08J9/122 , C08J2375/08 , C08G18/3868 , C08G18/3808 , C08G18/3206
摘要： A solid product formed by polymerizing a urethane prepolymer in the presence of a curative has a Bashore rebound that is less than about 38%. Preferably, the urethane prepolymer is an aliphatic isocyanate polyether prepolymer and the curative includes an aromatic diamine and a triol. To form a microcellular polyurethane material, the urethane prepolymer is frothed with inert gas, in the presence of a surfactant, then cured. The polyurethane can by employed to form highly damping CMP pads that have low rebound and can dissipate irregular energy and stabilize polishing to yield improved uniformity and less dishing.
摘要翻译： 在固化剂存在下聚氨酯预聚物形成的固体产物具有小于约38％的巴氏反弹。 优选地，氨基甲酸酯预聚物是脂族异氰酸酯聚醚预聚物，固化剂包括芳族二胺和三醇。 为了形成微孔聚氨酯材料，在表面活性剂存在下，将氨基甲酸酯预聚物与惰性气体一起发泡，然后固化。 通过使用聚氨酯可以形成具有低回弹的高阻尼CMP垫，并且可以消散不规则能量并稳定抛光以产生改进的均匀性和较少的凹陷。
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公开(公告)号：US08052507B2
公开(公告)日：2011-11-08
申请号：US11943213
申请日：2007-11-20
IPC分类号： B24D11/00
摘要： A system for preparing a microcellular polyurethane material, includes a froth, prepared, for instance, by inert gas frothing a urethane prepolymer, preferably an aliphatic isocyanate polyether prepolymer, in the presence of a surfactant; a filler soluble in a CMP slurry; and a curative, preferably including an aromatic diamine and a triol. To produce the microcellular material, the froth can be combined with the filler, e.g., PVP, followed by curing the resulting mixture. The microcellular material has a low rebound and can dissipate irregular energy and stabilize polishing to yield improved uniformity and less dishing. CMP pads using the microcellular material have pores created by inert gas frothing throughout the pad polymer body and additional surface pores created by dissolution of fillers during polishing, providing flexibility in surface softness and pad stiffness.
摘要翻译： 用于制备微孔聚氨酯材料的系统包括泡沫，例如通过在表面活性剂存在下使氨基甲酸酯预聚物，优选脂族异氰酸酯聚醚预聚物起泡的惰性气体制备; 可溶于CMP浆料的填料; 和治疗剂，优选包括芳族二胺和三醇。 为了生产微孔材料，可将泡沫与填料（例如PVP）组合，然后固化所得混合物。 微孔材料具有低回弹性，并且可以消散不规则的能量并稳定抛光以产生改进的均匀性和较少的凹陷。 使用微孔材料的CMP垫具有由整个垫聚合物体内的惰性气体起泡和由抛光期间填料溶解产生的附加表面孔产生的孔，提供表面柔软性和垫刚度的柔性。
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