公开(公告)号：US20120196049A1

公开(公告)日：2012-08-02

申请号：US13381561

申请日：2010-05-28

Applicant: Shuuhei Azuma ,  Keiichi Kajita ,  Takashi Morikawa

Inventor： Shuuhei Azuma ,  Keiichi Kajita ,  Takashi Morikawa

IPC: G11B5/85 ,  C23C16/56

CPC classification number: G11B5/72 ,  G11B5/8408

Abstract: A manufacturing method of a magnetic recording medium provided with a protective layer excellent in corrosion resistance, mechanical durability, adhesion with a lubrication layer, and floating stability of a head even if the film thickness is reduced is provided. This is a manufacturing method of a magnetic recording medium in which at least a magnetic layer, a carbon protective layer, and a lubrication layer are sequentially provided on a substrate, and said carbon protective layer is provided with a lower layer formed on the magnetic layer side and an upper layer formed on the lubrication layer side. The lower layer is formed by a chemical vapor deposition (CVD) method using hydrocarbon gas and then, the upper layer is formed by using mixed gas of hydrocarbon gas and nitrogen gas and then, treatment which nitridizes the surface of the upper layer is applied.

Abstract translation: 提供了具有耐腐蚀性，机械耐久性，与润滑层的粘附性以及头部浮动稳定性优异的保护层的磁记录介质的制造方法，即使膜厚减小。 这是一种磁性记录介质的制造方法，其中至少在基板上依次设有磁性层，碳保护层和润滑层，并且所述碳保护层设置有形成在磁性层上的下层 侧和在润滑层侧形成的上层。 通过使用烃气体的化学气相沉积（CVD）法形成下层，然后通过使用烃气和氮气的混合气体形成上层，然后施加使上层表面氮化的处理。