Axial compressor and control method thereof to stabilize fluid
    1.
    发明授权
    Axial compressor and control method thereof to stabilize fluid 有权
    轴流压缩机及其控制方法,稳定流体

    公开(公告)号:US09334869B2

    公开(公告)日:2016-05-10

    申请号:US13977024

    申请日:2011-02-28

    Abstract: A fluid stabilizing control method of an axial compressor is provided, which includes driving to drive the axial impeller, and stall controlling to suppress or prevent an occurrence of a stall that may transpire during rotation of the axial impeller by supplying highly-pressurized compressed air into the casing through a stall controller according to a predetermined time and volume. Accordingly, a stall may be suppressed or prevented, the occurrence of a stall that may transpire when a threshold point is exceeded by an unexpected event during driving in a low-flow high-pressure section on a performance curve, in which efficiency is high. Additionally, since an air injection method for suppressing the stall is properly applied, an amount of power expended for the stall control may be reduced while supply of the high-pressure compressed air is minimized, thereby achieving economically feasible stall control.

    Abstract translation: 提供了一种轴流式压缩机的流体稳定控制方法,其包括驱动轴流式叶轮的驱动和失速控制以抑制或防止在轴向叶轮旋转期间可能通过向高度压缩的压缩空气供应而发生的失速的发生 根据预定的时间和体积,通过失速控制器的套管。 因此,可以抑制或防止失速,当效率高的性能曲线上的低流量高压部分的驱动期间超过意外事件的阈值点时可能发生的失速的发生。 此外,由于适当地施加用于抑制失速的空气喷射方法,所以在高压压缩空气的供给最小化的同时,可以减少用于失速控制的功率消耗量,从而实现经济上可行的失速控制。

    AXIAL COMPRESSOR AND CONTROL METHOD THEREOF TO STABILIZE FLUID
    3.
    发明申请
    AXIAL COMPRESSOR AND CONTROL METHOD THEREOF TO STABILIZE FLUID 有权
    轴流压缩机及其控制方法稳定流体

    公开(公告)号:US20130272845A1

    公开(公告)日:2013-10-17

    申请号:US13977024

    申请日:2011-02-28

    Abstract: A fluid stabilizing control method of an axial compressor is provided, which includes driving to drive the axial impeller, and stall controlling to suppress or prevent an occurrence of a stall that may transpire during rotation of the axial impeller by supplying highly-pressurized compressed air into the casing through a stall controller according to a predetermined time and volume. Accordingly, a stall may be suppressed or prevented, the occurrence of a stall that may transpire when a threshold point is exceeded by an unexpected event during driving in a low-flow high-pressure section on a performance curve, in which efficiency is high. Additionally, since an air injection method for suppressing the stall is properly applied, an amount of power expended for the stall control may be reduced while supply of the high-pressure compressed air is minimized, thereby achieving economically feasible stall control.

    Abstract translation: 提供了一种轴流式压缩机的流体稳定控制方法,其包括驱动轴流式叶轮的驱动和失速控制以抑制或防止在轴向叶轮旋转期间可能通过向高度压缩的压缩空气供应而发生的失速的发生 根据预定的时间和体积,通过失速控制器的套管。 因此,可以抑制或防止失速,当效率高的性能曲线上的低流量高压部分的驱动期间超过意外事件的阈值点时可能发生的失速的发生。 此外,由于适当地施加用于抑制失速的空气喷射方法,所以在高压压缩空气的供给最小化的同时,可以减少用于失速控制的功率消耗量,从而实现经济上可行的失速控制。

    Method of through-etching substrate
    5.
    发明授权
    Method of through-etching substrate 失效
    通过蚀刻基板的方法

    公开(公告)号:US06821901B2

    公开(公告)日:2004-11-23

    申请号:US10084622

    申请日:2002-02-28

    Abstract: A method of through-etching a substrate that is simplified and by which the flow of ions can be kept to be regular during a plasma dry etching process, is provided. According to this method, a buffer layer is formed on a first plane of the substrate, a metal layer is formed on the buffer layer, an etching mask pattern is formed on a second plane opposite to the first plane, and the substrate is through-etched with the etching mask pattern as an etching mask. Preferably, the substrate is formed of a single-crystal silicon, the buffer layer is formed of silicon dioxide, and the metal layer is formed of aluminum.

    Abstract translation: 提供了一种通过蚀刻简化的衬底的方法,并且通过该方法可以在等离子体干蚀刻工艺期间将离子流保持为规则的方法。 根据该方法,在基板的第一平面上形成缓冲层,在缓冲层上形成金属层,在与第一平面相反的第二平面上形成蚀刻掩模图案, 用蚀刻掩模图案蚀刻作为蚀刻掩模。 优选地,基板由单晶硅形成,缓冲层由二氧化硅形成,金属层由铝形成。

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