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公开(公告)号：US11815346B2
公开(公告)日：2023-11-14
申请号：US17281780
申请日：2019-10-02
Inventor： Jérôme Gaillard-Groleas , Sébastien Gerand , Gabrielle Moussu
CPC classification number: G01B11/0608 , G01B11/303 , G01B2210/50
Abstract: The invention concerns a device (1) for the chromatic confocal measurement of a local height and/or orientation of a surface (S) of a sample comprising—a light source (2) configured to generate a polychromatic light beam (9)—a projection lens (4) comprising a lens (4) with axial chromatism configured to apply the light beam (9) to the surface (S) of the sample, —an optical sensor, configured to receive a light beam (9) reflected by the surface (S) of the sample and measure a total energy of the reflected light beam (9) received during an integration interval, —a scanning system (10), coupled to the projection lens (4) and configured to move the propagation axis of the light beam (9) relative to the projection lens (4), such that the total energy measured by the optical sensor corresponds to a dynamic spatial average of the total energy of the light beam (9) reflected by the surface (S) of the sample.
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公开(公告)号：US20210381821A1
公开(公告)日：2021-12-09
申请号：US17281780
申请日：2019-10-02
Inventor： Jérôme Gaillard-Groleas , Sébastien Gerand , Gabrielle Moussu
Abstract: The invention concerns a device (1) for the chromatic confocal measurement of a local height and/or orientation of a surface (S) of a sample comprising—a light source (2) configured to generate a polychromatic light beam (9)—a projection lens (4) comprising a lens (4) with axial chromatism configured to apply the light beam (9) to the surface (S) of the sample, —an optical sensor, configured to receive a light beam (9) reflected by the surface (S) of the sample and measure a total energy of the reflected light beam (9) received during an integration interval, —a scanning system (10), coupled to the projection lens (4) and configured to move the propagation axis of the light beam (9) relative to the projection lens (4), such that the total energy measured by the optical sensor corresponds to a dynamic spatial average of the total energy of the light beam (9) reflected by the surface (S) of the sample.
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