公开(公告)号：US06605804B1

公开(公告)日：2003-08-12

申请号：US09623717

申请日：2001-01-23

申请人： Roland Muller-Fiedler ,  Helmut Sautter ,  Joachim Schneider ,  Anton Pfefferseder ,  Winfried Bernhard ,  Andre Mueller ,  Andreas Hensel ,  Ulrich Oppelt ,  Lutz Mueller

发明人： Roland Muller-Fiedler ,  Helmut Sautter ,  Joachim Schneider ,  Anton Pfefferseder ,  Winfried Bernhard ,  Andre Mueller ,  Andreas Hensel ,  Ulrich Oppelt ,  Lutz Mueller

IPC分类号： G01J350

CPC分类号： G01N21/783

摘要： An optical sensor is provided for determining a physical and/or chemical parameter of a sample, having at least one optical transmitter and at least one optical receiver, and having a sensitive element which is arranged in a beam path between the transmitter and the receiver and is exposable to the sample, and which changes its absorption and/or its refractive index for electromagnetic radiation of a specific wavelength in response to a change in parameters of the sample, in particular, a gas-sensitive element, and possibly having an evaluation unit arranged downstream of the receiver. The transmitter and the receiver can be coupled to the sensitive element via at least one optical waveguide. Provision is made for the transmitter (12) and for the receiver (14) to be coupled to the sensitive element via at least one optical waveguide (26, 28).

摘要翻译： 提供了一种用于确定样品的物理和/或化学参数的光学传感器，其具有至少一个光学发射器和至少一个光学接收器，并且具有布置在发射器和接收器之间的光束路径中的敏感元件，以及 可以对样品曝光，并且响应于样品，特别是气体敏感元件的参数变化，其改变其对于特定波长的电磁辐射的吸收和/或其折射率，并且可能具有评估单元 布置在接收器的下游。 发射器和接收器可以经由至少一个光波导耦合到敏感元件。针对发射器（12）和接收器（14）进行设计以经由至少一个光波导（26）耦合到敏感元件 ，28）。

公开(公告)号：US20060197634A1

公开(公告)日：2006-09-07

申请号：US10547041

申请日：2004-02-18

申请人： Roland Muller-Fiedler ,  Hans Hecht ,  Joerg Fuertsch ,  Matthhias Fuertsch ,  Andreas Stratmann ,  Heribert Weber ,  Winfred Bernhard ,  Detlef Gruen ,  Andreas Duell ,  Rainer Schink ,  Ulrich Wagner ,  Christop Schelling

发明人： Roland Muller-Fiedler ,  Hans Hecht ,  Joerg Fuertsch ,  Matthhias Fuertsch ,  Andreas Stratmann ,  Heribert Weber ,  Winfred Bernhard ,  Detlef Gruen ,  Andreas Duell ,  Rainer Schink ,  Ulrich Wagner ,  Christop Schelling

IPC分类号： H01H51/22

CPC分类号： G01L9/0042 ,  G01F1/6845 ,  G01N7/10

摘要： A micromechanical sensor and a method for manufacturing a micromechanical sensor which has at least one membrane are provided. The membrane is made of a first material which is accommodated in a surrounding second material, and the membrane is configured for sensing a medium surrounding it. The membrane is reinforced, at least partly, by a third material at break-sensitive points on the membrane rim. Reinforcement of the membrane rim increases the stability and thus also the service life of the membrane and the sensor.

摘要翻译： 提供了具有至少一个膜的微机械传感器和用于制造微机械传感器的方法。 膜由容纳在周围的第二材料中的第一材料制成，并且膜构造成用于感测周围的介质。 至少部分地，膜在膜边缘上的断裂点被第三材料增强。 膜边缘的加强增加了膜和传感器的稳定性，从而增加了膜的使用寿命。