摘要:
Embodiments of the present invention are directed to establishing a desired position control over a workpiece by compensating for thermal cycling affecting a member supporting the workpiece during processing.
摘要:
Embodiments of the present invention are directed to establishing a desired position control over a workpiece by compensating for thermal cycling affecting a member supporting the workpiece during processing.
摘要:
An actuator assembly including one or more actuator arms, wherein each of the actuator arms defines a clasp hole and a clamp-opening hole and a slot running between the clasp hole and clamp-opening hole, and optionally, a second slot running from the clasp hole to a distal end of the actuator arm, thereby creating two clasp fingers. A flex suspension assembly is included with a protrusion, such as a boss and a head on a distal end. The flex suspension assembly is coupled to the actuator arm by resiliently increasing the diameter of the clasp hole so as to allow the boss on the flex suspension assembly to be inserted into the clasp hole. With the boss is inserted, the clasp hole is allowed to revert to its original diameter, thereby clamping the boss in the clasp hole. A method for assembly is also provided.