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    Process for fabricating micromechanical devices
    2.
    发明授权
    Process for fabricating micromechanical devices 有权
    制造微机械装置的工艺

    公开(公告)号：US06300156B1

    公开(公告)日：2001-10-09

    申请号：US09544235

    申请日：2000-04-07

    申请人： Robert LeRoy Decker ,  Valerie Jeanne Kuck ,  Mark Anthony Paczkowski ,  Peter Gerald Simpkins

    发明人： Robert LeRoy Decker ,  Valerie Jeanne Kuck ,  Mark Anthony Paczkowski ,  Peter Gerald Simpkins

    IPC分类号： H01L2100

    CPC分类号： B81C1/00198 ,  Y10S438/924

    摘要： A process for fabricating a MEMS device is disclosed. The device has at least one hinged element. The MEMS device including the hinged element is delineated and defined on a semiconductor substrate. The substrate is placed device side down in a chamber. The MEMS device is then exposed to a release expedient for sufficient amount of time for the release expedient to dissolve a sacrificial material connecting the element to the substrate. Upon the dissolution of the sacrificial material, the element is released from the substrate and pivots away from the surface.

    摘要翻译： 公开了一种用于制造MEMS器件的工艺。 该装置具有至少一个铰链元件。 包括铰链元件的MEMS器件被描绘并限定在半导体衬底上。 基板被放置在一个室内。 然后将MEMS器件暴露于释放方式足够的时间以释放有利于将连接元件的牺牲材料溶解到基底上。 在牺牲材料溶解时，元件从基底释放并远离表面转动。

    Faceplate for network switching apparatus
    3.
    发明授权
    Faceplate for network switching apparatus 失效
    网络交换设备面板

    公开(公告)号：US06281433B1

    公开(公告)日：2001-08-28

    申请号：US09366241

    申请日：1999-08-03

    申请人： Robert LeRoy Decker ,  John David Weld

    发明人： Robert LeRoy Decker ,  John David Weld

    IPC分类号： H05K900

    CPC分类号： H05K9/0015 ,  H05K7/1425

    摘要： A faceplate for network switching apparatus is formed of a multi-layered structure having a first material layer and a second material layer. An outer portion of the faceplate is formed of the first material layer. The first material layer is an anti static material. An inner portion of the faceplate is formed of the second material layer. The second material layer is formed of an electromagnetic interference (EMI) shielding material. The first material layer and the second material layer are formed of polymeric materials which are rigid after extrusion. In an alternative embodiment, a gasket is coextruded with the first material layer and the second material layer. The gasket protrudes laterally from the inner portion of the faceplate along the length thereof. The gasket is formed of a third material layer. The third material layer is an EMI shielding material. The third material layer is formed of a polymeric material which is flexible after extrusion.

    摘要翻译： 用于网络交换设备的面板由具有第一材料层和第二材料层的多层结构形成。 面板的外部由第一材料层形成。 第一材料层是防静电材料。 面板的内部由第二材料层形成。 第二材料层由电磁干扰（EMI）屏蔽材料形成。 第一材料层和第二材料层由挤出后刚性的聚合材料形成。 在替代实施例中，垫圈与第一材料层和第二材料层共挤出。 垫圈沿着其长度从面板的内部横向突出。 垫圈由第三材料层形成。 第三材料层是EMI屏蔽材料。 第三材料层由挤出后是柔性的聚合材料形成。