Formulations for environmentally friendly photoresist film layers
    1.
    发明授权
    Formulations for environmentally friendly photoresist film layers 有权
    环保光致抗蚀剂膜层的配方

    公开(公告)号:US08394575B2

    公开(公告)日:2013-03-12

    申请号:US12894930

    申请日:2010-09-30

    CPC classification number: G03F7/038 G03F7/0045

    Abstract: Environmentally friendly thick film layers for a micro-fluid ejection head and micro-fluid ejection heads are disclosed. The environmentally friendly thick film layer includes a negative photoresist layer derived from a composition comprising a multi-functional epoxy compound, a low molecular weight polymeric difunctional epoxy compound, a monomeric difunctional epoxy compound, a methide-based photoacid generator that does not contain antimony, a chromophore and an aryl ketone solvent. Optionally the photoresist layer contains an adhesion enhancer. The negative photoresist layer is environmentally friendly and provides good resolution, well defined critical dimensions, straight side walls, and a large processing window.

    Abstract translation: 公开了用于微流体喷射头和微流体喷射头的环保厚膜层。 环保厚膜层包括衍生自包含多官能环氧化合物,低分子量聚合双官能环氧化合物,单体双官能环氧化合物,不含锑的甲基化光酸产生剂的组合物的负性光致抗蚀剂层, 发色团和芳基酮溶剂。 任选地,光致抗蚀剂层含有粘合增强剂。 负光致抗蚀剂层是环境友好的并且提供良好的分辨率,良好限定的临界尺寸,直的侧壁和大的加工窗口。

    Thick Film Layers and Methods Relating Thereto
    3.
    发明申请
    Thick Film Layers and Methods Relating Thereto 有权
    厚膜层及其相关方法

    公开(公告)号:US20090269707A1

    公开(公告)日:2009-10-29

    申请号:US12496786

    申请日:2009-07-02

    CPC classification number: B41J2/1603 B41J2/1631 B41J2/1645

    Abstract: Thick film layers for a micro-fluid ejection head, micro-fluid ejection heads, and methods for making micro-fluid ejection head and thick film layers. One such thick film layer is derived from a difunctional epoxy component having a weight average molecular weight ranging from about 2500 to about 4000 Daltons, a photoacid generator, an aryl ketone solvent, and an adhesion enhancing component. One such thick film layer has a cross-link density upon curing that increases the dimensional stability of the thick film layer sufficient to provide flow features therein having substantially vertical walls.

    Abstract translation: 用于微流体喷射头,微流体喷射头和用于制造微流体喷射头和厚膜层的方法的厚膜层。 一种这样的厚膜层衍生自重均分子量为约2500至约4000道尔顿的双官能环氧组分,光酸产生剂,芳基酮溶剂和粘合增强组分。 一个这样的厚膜层在固化时具有交联密度,这增加了厚膜层的尺寸稳定性,足以提供具有基本垂直壁的流动特征。

    PHOTOIMAGEABLE DRY FILM FORMULATION
    4.
    发明申请
    PHOTOIMAGEABLE DRY FILM FORMULATION 有权
    可照射干胶片制剂

    公开(公告)号:US20090201338A1

    公开(公告)日:2009-08-13

    申请号:US12030467

    申请日:2008-02-13

    Abstract: The present disclosure relates to photoresist compositions suitable for thin layer photoimageable nozzle plates for micro-fluid ejection devices and methods of making and using such thin layer nozzle plates. The photoresist compositions may comprise a high-molecular weight phenoxy resin, a di-functional epoxy resin, and a multi-functional epoxy resin.

    Abstract translation: 本公开涉及适用于微流体喷射装置的薄层可光成像喷嘴板的光致抗蚀剂组合物以及制造和使用这种薄层喷嘴板的方法。 光致抗蚀剂组合物可以包含高分子量苯氧树脂,二官能环氧树脂和多官能环氧树脂。

    Thick film layers and methods relating thereto
    5.
    发明授权
    Thick film layers and methods relating thereto 有权
    厚膜层及其相关方法

    公开(公告)号:US07571979B2

    公开(公告)日:2009-08-11

    申请号:US11361731

    申请日:2006-02-24

    CPC classification number: B41J2/1603 B41J2/1631 B41J2/1645

    Abstract: Thick film layers for a micro-fluid ejection head, micro-fluid ejection heads, and methods for making micro-fluid ejection head and thick film layers. One such thick film layer is derived from a difunctional epoxy component having a weight average molecular weight ranging from about 2500 to about 4000 Daltons, a photoacid generator, an aryl ketone solvent, and an adhesion enhancing component. One such thick film layer has a cross-link density upon curing that increases the dimensional stability of the thick film layer sufficient to provide flow features therein having substantially vertical walls.

    Abstract translation: 用于微流体喷射头,微流体喷射头和用于制造微流体喷射头和厚膜层的方法的厚膜层。 一种这样的厚膜层衍生自重均分子量为约2500至约4000道尔顿的双官能环氧组分,光酸产生剂,芳基酮溶剂和粘合增强组分。 一个这样的厚膜层在固化时具有交联密度,这增加了厚膜层的尺寸稳定性,足以提供具有基本垂直壁的流动特征。

    Photoimageable nozzle members and methods relating thereto
    6.
    发明授权
    Photoimageable nozzle members and methods relating thereto 有权
    可光成像喷嘴构件及其相关方法

    公开(公告)号:US08173031B2

    公开(公告)日:2012-05-08

    申请号:US12335914

    申请日:2008-12-16

    CPC classification number: B41J2/162 B41J2/1603 B41J2/1631 B41J2/1645

    Abstract: Nozzle members, such as for a micro-fluid ejection head, micro-fluid ejection heads, and a method for making the same. One such nozzle member includes a negative photoresist composition derived from a first di-functional epoxy compound, a relatively high molecular weight polyhydroxy ether, a photoacid generator devoid of aryl sulfonium salts, an adhesion enhancer, and an aliphatic ketone solvent. The nozzle member has a thickness ranging from about 10 microns to about 30 microns.

    Abstract translation: 喷嘴构件,例如微流体喷射头,微流体喷射头及其制造方法。 一个这样的喷嘴构件包括衍生自第一二官能环氧化合物,相对高分子量的多羟基醚,不含芳基锍盐的光酸产生剂,粘附增强剂和脂族酮溶剂的负性光致抗蚀剂组合物。 喷嘴构件具有约10微米至约30微米的厚度。

    FORMULATIONS FOR ENVIRONMENTALLY FRIENDLY PHOTORESIST FILM LAYERS
    7.
    发明申请
    FORMULATIONS FOR ENVIRONMENTALLY FRIENDLY PHOTORESIST FILM LAYERS 有权
    环境友好的光电薄膜层的配方

    公开(公告)号:US20120082933A1

    公开(公告)日:2012-04-05

    申请号:US12894930

    申请日:2010-09-30

    CPC classification number: G03F7/038 G03F7/0045

    Abstract: Environmentally friendly thick film layers for a micro-fluid ejection head and micro-fluid ejection heads are disclosed. The environmentally friendly thick film layer includes a negative photoresist layer derived from a composition comprising a multi-functional epoxy compound, a low molecular weight polymeric difunctional epoxy compound, a monomeric difunctional epoxy compound, a methide-based photoacid generator that does not contain antimony, a chromophore and an aryl ketone solvent. Optionally the photoresist layer contains an adhesion enhancer. The negative photoresist layer is environmentally friendly and provides good resolution, well defined critical dimensions, straight side walls, and a large processing window.

    Abstract translation: 公开了用于微流体喷射头和微流体喷射头的环保厚膜层。 环保厚膜层包括衍生自包含多官能环氧化合物,低分子量聚合双官能环氧化合物,单体双官能环氧化合物,不含锑的甲基化光酸产生剂的组合物的负性光致抗蚀剂层, 发色团和芳基酮溶剂。 任选地,光致抗蚀剂层含有粘合增强剂。 负光致抗蚀剂层是环境友好的并且提供良好的分辨率,良好限定的临界尺寸,直的侧壁和大的加工窗口。

    Photoimageable Nozzle Members and Methods Relating Thereto
    10.
    发明申请
    Photoimageable Nozzle Members and Methods Relating Thereto 有权
    Photoimageable喷嘴成员及其相关方法

    公开(公告)号:US20090155729A1

    公开(公告)日:2009-06-18

    申请号:US12335914

    申请日:2008-12-16

    CPC classification number: B41J2/162 B41J2/1603 B41J2/1631 B41J2/1645

    Abstract: Nozzle members, such as for a micro-fluid ejection head, micro-fluid ejection heads, and a method for making the same. One such nozzle member includes a negative photoresist composition derived from a first di-functional epoxy compound, a relatively high molecular weight polyhydroxy ether, a photoacid generator devoid of aryl sulfonium salts, an adhesion enhancer, and an aliphatic ketone solvent. The nozzle member has a thickness ranging from about 10 microns to about 30 microns.

    Abstract translation: 喷嘴构件,例如微流体喷射头,微流体喷射头及其制造方法。 一个这样的喷嘴构件包括衍生自第一二官能环氧化合物,相对高分子量的多羟基醚,不含芳基锍盐的光酸产生剂,粘附增强剂和脂族酮溶剂的负性光致抗蚀剂组合物。 喷嘴构件具有约10微米至约30微米的厚度。

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