Apparatus and method for probing integrated circuits using laser illumination
    1.
    发明授权
    Apparatus and method for probing integrated circuits using laser illumination 有权
    使用激光照明探测集成电路的装置和方法

    公开(公告)号:US07616312B2

    公开(公告)日:2009-11-10

    申请号:US11169423

    申请日:2005-06-29

    CPC classification number: G01R31/308 G01R31/311

    Abstract: An apparatus and method for laser probing of a DUT at very high temporal resolution is disclosed. The system includes a CW laser source, a beam optics designed to point two orthogonally polarized beams at the same location on the DUT, optical detectors for detecting the reflected beams, collection electronics, and an oscilloscope. The beam optics defines a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the laser beam into two beams of orthogonal polarization. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.

    Abstract translation: 公开了一种以非常高的时间分辨率激光探测DUT的装置和方法。 该系统包括CW激光源,设计用于在DUT上的相同位置处指向两个正交偏振光束的光束光学元件,用于检测反射光束的光学检测器,收集电子器件和示波器。 光束光学器件定义了共路径偏振微分探测(PDP)光学器件。 公共路径PDP光学将激光束分成两束正交极化。 由于CMOS晶体管的固有不对称性,光束与DUT的相互作用在每个光束中产生不同的相位调制。 可以研究这种差异来研究DUT对刺激信号的响应。

    Laser probing system for integrated circuits
    2.
    发明申请
    Laser probing system for integrated circuits 有权
    集成电路激光探测系统

    公开(公告)号:US20070002329A1

    公开(公告)日:2007-01-04

    申请号:US11169423

    申请日:2005-06-29

    CPC classification number: G01R31/308 G01R31/311

    Abstract: An apparatus and method for laser probing of a DUT at very high temporal resolution is disclosed. The system includes a CW laser source, a beam optics designed to point two orthogonally polarized beams at the same location on the DUT, optical detectors for detecting the reflected beams, collection electronics, and an oscilloscope. The beam optics defines a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the laser beam into two beams of orthogonal polarization. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.

    Abstract translation: 公开了一种以非常高的时间分辨率激光探测DUT的装置和方法。 该系统包括CW激光源,设计用于在DUT上的相同位置处指向两个正交偏振光束的光束光学元件,用于检测反射光束的光学检测器,收集电子器件和示波器。 光束光学器件定义了共路径偏振微分探测(PDP)光学器件。 公共路径PDP光学将激光束分成两束正交极化。 由于CMOS晶体管的固有不对称性,光束与DUT的相互作用在每个光束中产生不同的相位调制。 可以研究这种差异来研究DUT对刺激信号的响应。

    Lens mount integrated with a thermoelectrically cooled photodetector module
    3.
    发明授权
    Lens mount integrated with a thermoelectrically cooled photodetector module 有权
    透镜座与热电冷却光电检测器模块集成

    公开(公告)号:US07009173B2

    公开(公告)日:2006-03-07

    申请号:US10872595

    申请日:2004-06-22

    CPC classification number: G02B7/028 F25B21/02 H01L31/0203 H01L31/024

    Abstract: An integrated housing for a lens and a photodetector, which is being cooled to low temperatures to enable the detector to detect faint emission of photons. An enclosure is provided to which a lens is affixed from one side using a retaining ring, and a photodetector is affixed from the opposite side. The enclosure is affixed to a TE cooler. The enclosure and the retaining ring are made from materials having similar thermal expansion coefficients.

    Abstract translation: 用于透镜和光电检测器的集成外壳,其被冷却至低温以使得检测器能够检测光子的微弱发射。 提供了一个外壳,使用保持环从一侧固定透镜,并且从相对侧固定光电检测器。 外壳固定在TE冷却器上。 外壳和保持环由具有相似热膨胀系数的材料制成。

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