公开(公告)号：US08288753B2

公开(公告)日：2012-10-16

申请号：US13278245

申请日：2011-10-21

Applicant: Ming Sun ,  Michael Xuefei Tang ,  Insik Jin ,  Venkatram Venkatasamy ,  Philip George Pitcher ,  Nurul Amin

Inventor： Ming Sun ,  Michael Xuefei Tang ,  Insik Jin ,  Venkatram Venkatasamy ,  Philip George Pitcher ,  Nurul Amin

IPC: H01L47/02

CPC classification number: H01L45/085 ,  H01L27/2436 ,  H01L45/1233 ,  H01L45/141 ,  H01L45/146

Abstract: Programmable metallization memory cells include an electrochemically active electrode and an inert electrode and an ion conductor solid electrolyte material between the electrochemically active electrode and the inert electrode. An electrically insulating oxide layer separates the ion conductor solid electrolyte material from the electrochemically active electrode.

Abstract translation: 可编程金属化存储单元包括在电化学活性电极和惰性电极之间的电化学活性电极和惰性电极以及离子导体固体电解质材料。 电绝缘氧化物层将离子导体固体电解质材料与电化学活性电极分离。

公开(公告)号：US20130164454A1

公开(公告)日：2013-06-27

申请号：US13440071

申请日：2012-04-05

Applicant: Philip George Pitcher ,  Richard Thomas Greenlee ,  Huiwen Liu

Inventor： Philip George Pitcher ,  Richard Thomas Greenlee ,  Huiwen Liu

IPC: C23C14/48

CPC classification number: C23C14/48 ,  H01J27/024 ,  H01J49/06

Abstract: A method of forming a layer, the method including providing a substrate having at least one surface adapted for deposition thereon; and directing a particle beam towards the surface of the substrate, the particle beam including small molecule molecular species, wherein the small molecule molecular species break apart upon interaction with atoms at the substrate into atomic components, each of the atomic components having implant energies from about 20 eV to about 100 eV to form a layer.

Abstract translation: 一种形成层的方法，所述方法包括提供具有适于在其上沉积的至少一个表面的基底; 并且将粒子束引导到衬底的表面，所述粒子束包括小分子分子种类，其中所述小分子分子种类在与所述衬底上的原子相互作用时分裂成原子组分，所述原子组分中的每一个具有从约 20eV至约100eV以形成层。

公开(公告)号：US20090092805A1

公开(公告)日：2009-04-09

申请号：US11866443

申请日：2007-10-03

Applicant: Tong Zhao ,  Andreas Karl Roelofs ,  Florin Zavaliche ,  Philip George Pitcher

Inventor： Tong Zhao ,  Andreas Karl Roelofs ,  Florin Zavaliche ,  Philip George Pitcher

IPC: B32B5/14 ,  C23C14/48 ,  C23C14/28

CPC classification number: G11B9/02 ,  B82Y10/00 ,  G11B5/746 ,  G11B9/1481 ,  Y10T428/24942

Abstract: An apparatus includes a ferroelectric layer and a polarization pattern configured in the ferroelectric layer to represent position data. The polarization pattern has a switchable polarization state domain and an unswitchable polarization state domain. A method includes providing a ferroelectric layer and establishing a polarization pattern in the ferroelectric layer to represent position data.

Abstract translation: 一种装置包括强电介质层和配置在铁电层中以表示位置数据的偏振图案。 极化图案具有可切换的偏振状态域和不可切换的偏振态域。 一种方法包括提供铁电层并在铁电层中建立极化图案以表示位置数据。

公开(公告)号：US06585870B1

公开(公告)日：2003-07-01

申请号：US09671681

申请日：2000-09-28

Applicant: Philip George Pitcher ,  Zhihua Yan

Inventor： Philip George Pitcher ,  Zhihua Yan

IPC: C23C1434

CPC classification number: H01J37/3426 ,  C23C14/3414 ,  C23C14/35

Abstract: A process and device for making sputtered films with a linear scanning magnetron, wherein sputtering employs directionally emitting targets and “ballistic” transport to achieve controlled angular dispersion of incident particles with respect to the normal of the substrate. Sputter films made by this process can exhibit a high degree of step coverage over sub-micron, high aspect ratio substrate features and can fill high aspect ratio substrate features, for example, channels or vias.

Abstract translation: 用于制造具有线性扫描磁控管的溅射膜的方法和装置，其中溅射采用定向发射靶和“弹道”传输以实现入射颗粒相对于衬底法线的可控角度分散。 通过该方法制造的溅射膜可以在亚微米，高纵横比衬底特征上表现出高度的阶梯覆盖，并且可以填充高纵横比衬底特征，例如通道或通孔。

公开(公告)号：US20130164453A1

公开(公告)日：2013-06-27

申请号：US13440068

申请日：2012-04-05

Applicant: Philip George Pitcher ,  Edwin Frank Rejda ,  Richard Thomas Greenlee

Inventor： Philip George Pitcher ,  Edwin Frank Rejda ,  Richard Thomas Greenlee

IPC: C23C14/48

CPC classification number: C23C14/48 ,  H01J27/024 ,  H01J49/06

Abstract: A method of forming a layer, the method including providing a substrate having at least one surface adapted for forming a layer thereon; directing a particle beam towards the surface of the substrate, the particle beam including particles, wherein the particle beam has an angle of incidence with respect to the substrate, and is configured so that the particles have implant energies that are not greater than about 100 eV; changing the angle of incidence of the particle beam, the implant energy of the particles, or a combination thereof; and directing the particle beam towards the surface of the substrate a subsequent time, wherein the particles of the particle beam form a layer on the substrate.

Abstract translation: 一种形成层的方法，所述方法包括提供具有适于在其上形成层的至少一个表面的基底; 将粒子束引导到衬底的表面，所述粒子束包括粒子，其中所述粒子束相对于所述衬底具有入射角，并且被配置为使得所述粒子具有不大于约100eV的注入能量 ; 改变粒子束的入射角，颗粒的植入能量或其组合; 以及随后的时间将粒子束引向衬底的表面，其中粒子束的颗粒在衬底上形成一层。

公开(公告)号：US08343801B2

公开(公告)日：2013-01-01

申请号：US13278240

申请日：2011-10-21

Applicant: Ming Sun ,  Michael Xuefei Tang ,  Insik Jin ,  Venkatram Venkatasamy ,  Philip George Pitcher ,  Nurul Amin

Inventor： Ming Sun ,  Michael Xuefei Tang ,  Insik Jin ,  Venkatram Venkatasamy ,  Philip George Pitcher ,  Nurul Amin

IPC: H01L21/00 ,  H01L21/16

CPC classification number: H01L45/085 ,  H01L27/2436 ,  H01L45/1233 ,  H01L45/141 ,  H01L45/146

Abstract: Programmable metallization memory cells include an electrochemically active electrode and an inert electrode and an ion conductor solid electrolyte material between the electrochemically active electrode and the inert electrode. An electrically insulating oxide layer separates the ion conductor solid electrolyte material from the electrochemically active electrode.

Abstract translation: 可编程金属化存储单元包括在电化学活性电极和惰性电极之间的电化学活性电极和惰性电极以及离子导体固体电解质材料。 电绝缘氧化物层将离子导体固体电解质材料与电化学活性电极分离。

公开(公告)号：US20120040496A1

公开(公告)日：2012-02-16

申请号：US13278240

申请日：2011-10-21

Applicant: Ming Sun ,  Michael Xuefei Tang ,  Insik Jin ,  Venkatram Venkatasamy ,  Philip George Pitcher ,  Nurul Amin

Inventor： Ming Sun ,  Michael Xuefei Tang ,  Insik Jin ,  Venkatram Venkatasamy ,  Philip George Pitcher ,  Nurul Amin

IPC: H01L21/8239

CPC classification number: H01L45/085 ,  H01L27/2436 ,  H01L45/1233 ,  H01L45/141 ,  H01L45/146

Abstract: Programmable metallization memory cells include an electrochemically active electrode and an inert electrode and an ion conductor solid electrolyte material between the electrochemically active electrode and the inert electrode. An electrically insulating oxide layer separates the ion conductor solid electrolyte material from the electrochemically active electrode.

Abstract translation: 可编程金属化存储单元包括在电化学活性电极和惰性电极之间的电化学活性电极和惰性电极以及离子导体固体电解质材料。 电绝缘氧化物层将离子导体固体电解质材料与电化学活性电极分离。

公开(公告)号：US08058646B2

公开(公告)日：2011-11-15

申请号：US12390711

申请日：2009-02-23

Applicant: Ming Sun ,  Michael Xuefei Tang ,  Insik Jin ,  Venkatram Venkatasamy ,  Philip George Pitcher ,  Nurul Amin

Inventor： Ming Sun ,  Michael Xuefei Tang ,  Insik Jin ,  Venkatram Venkatasamy ,  Philip George Pitcher ,  Nurul Amin

IPC: H01L29/12

CPC classification number: H01L45/085 ,  H01L27/2436 ,  H01L45/1233 ,  H01L45/141 ,  H01L45/146

Abstract: Programmable metallization memory cells include an electrochemically active electrode and an inert electrode and an ion conductor solid electrolyte material between the electrochemically active electrode and the inert electrode. An electrically insulating oxide layer separates the ion conductor solid electrolyte material from the electrochemically active electrode.

Abstract translation: 可编程金属化存储单元包括在电化学活性电极和惰性电极之间的电化学活性电极和惰性电极以及离子导体固体电解质材料。 电绝缘氧化物层将离子导体固体电解质材料与电化学活性电极分离。

公开(公告)号：US20120032131A1

公开(公告)日：2012-02-09

申请号：US13278245

申请日：2011-10-21

Applicant: Ming Sun ,  Michael Xuefei Tang ,  Insik Jin ,  Venkatram Venkatasamy ,  Philip George Pitcher ,  Nurul Amin

Inventor： Ming Sun ,  Michael Xuefei Tang ,  Insik Jin ,  Venkatram Venkatasamy ,  Philip George Pitcher ,  Nurul Amin

IPC: H01L45/00 ,  H01L27/24

CPC classification number: H01L45/085 ,  H01L27/2436 ,  H01L45/1233 ,  H01L45/141 ,  H01L45/146

Abstract: Programmable metallization memory cells include an electrochemically active electrode and an inert electrode and an ion conductor solid electrolyte material between the electrochemically active electrode and the inert electrode. An electrically insulating oxide layer separates the ion conductor solid electrolyte material from the electrochemically active electrode.

公开(公告)号：US20130161505A1

公开(公告)日：2013-06-27

申请号：US13440073

申请日：2012-04-05

Applicant: Philip George Pitcher

Inventor： Philip George Pitcher

IPC: H01J27/02 ,  H01J49/06

CPC classification number: C23C14/48 ,  H01J27/024 ,  H01J49/06

Abstract: A system that includes an ion source, the ion source configured to produce ions having a first energy; an extractor to extract the ions; an accelerator configured to accelerate the ions; a focusing and steering device configured to focus and/or steer the accelerated ions; and a decelerator configured to decelerate the accelerated ions so that the ions have a second energy when they impact a substrate, wherein the second energy is less than the first energy.

Abstract translation: 一种包括离子源的系统，所述离子源被配置为产生具有第一能量的离子; 萃取器提取离子; 被配置为加速离子的加速器; 被配置为聚焦和/或引导加速离子的聚焦和转向装置; 以及减速器，其构造成使加速的离子减速，使得当离子冲击衬底时，所述离子具有第二能量，其中所述第二能量小于所述第一能量。