公开(公告)号：US20070089497A1

公开(公告)日：2007-04-26

申请号：US10556792

申请日：2004-05-07

Applicant: Michael Reinstadtler

Inventor： Michael Reinstadtler

IPC: G01B5/28

CPC classification number: G01Q60/32

Abstract: A method for exciting free torsional vibrations in a spring cantilever, which is clamped in on one side and has a longitudinal extension, of an atomic force microscope (AFM) is disclosed. The invention provides by the one-sidedly clamped-in spring cantilever being placed at a distance over a surface between which and the spring cantilever there is an acoustic coupling medium, by the surface being set into oscillations which are oriented laterally to the surface and are polarized linearly along an oscillation direction, and by the polarization axis given by the oscillation direction being oriented perpendicular to the longitudinal extension of the spring cantilever

Abstract translation: 公开了一种用于激发原子力显微镜（AFM）的夹持在一侧并具有纵向延伸的弹簧悬臂中的自由扭转振动的方法。 本发明通过单面夹入的弹簧悬臂提供放置在一个距离之间的表面上，弹簧悬臂与弹性悬臂之间有一个声耦合介质，该表面被设置成横向于表面的摆动，并且是 沿振荡方向线性偏振，并且由振荡方向给出的偏振轴垂直于弹簧悬臂的纵向延伸方向

公开(公告)号：US07360404B2

公开(公告)日：2008-04-22

申请号：US10524729

申请日：2003-08-14

Applicant: Michael Reinstadtler ,  Ute Rabe ,  Walter Arnold

Inventor： Michael Reinstadtler ,  Ute Rabe ,  Walter Arnold

IPC: G01B5/28 ,  G01N13/16

CPC classification number: G01Q60/28 ,  G01H3/00 ,  G01N29/22 ,  G01N29/346 ,  G01N2291/02827 ,  G01N2291/101 ,  G01Q60/26

Abstract: A method for examining a surface of a sample is described using an atomic force scanning microscope (AFM) comprising a cantilever with a longitudinal extension along which a measuring tip is disposed, which is selectively arranged relative to the sample surface by a means for driving and whose spatial position is detected using a sensor unit. Vibration excitation is conducted at excitation amplitudes which produce inside the cantilever torsional amplitudes with maximum values which form a largely (substantively) constant plateau value despite increasing excitation amplitudes and the resonance spectra, in a range of maximum values of the torsional amplitudes, a widening of the resonance spectrum which is determinable by a plateau width. The resonance spectra, preferably the plateau value, the plateau width and/or the gradient of the respective resonance spectra are used for examining the sample.

Abstract translation: 使用原子力扫描显微镜（AFM）来描述用于检查样品表面的方法，所述原子力扫描显微镜（AFM）包括具有纵向延伸的悬臂，沿着所述纵向延伸部设置测量尖端，所述悬臂通过驱动装置相对于样品表面选择性地布置， 其空间位置使用传感器单元来检测。 振动激励是在激励振幅下进行的，其产生悬臂扭转振幅内部的最大值，尽管振幅和扭振幅度的最大值范围内增加了激励幅度和谐振谱，但是它们形成了很大（实质上）恒定的平稳值， 可通过平台宽度确定的共振谱。 谐振谱，优选平台值，平台宽度和/或各个共振谱的梯度用于检查样品。

公开(公告)号：US20060150719A1

公开(公告)日：2006-07-13

申请号：US10524729

申请日：2003-08-14

Applicant: Michael Reinstadtler ,  Ute Rabe ,  Walter Arnold

Inventor： Michael Reinstadtler ,  Ute Rabe ,  Walter Arnold

IPC: G01B5/28

CPC classification number: G01Q60/28 ,  G01H3/00 ,  G01N29/22 ,  G01N29/346 ,  G01N2291/02827 ,  G01N2291/101 ,  G01Q60/26

Abstract: Described is a method for examining a surface of a sample using an atomic force scanning microscope (AFM) comprising a cantilever with a longitudinal extension along which a measuring tip is disposed, which is selectively arranged relative to said sample surface by a driver means and whose spatial position is detected using a sensor unit, and said microscope is provided with at least one ultrasound generator, which initiates vibration excitation at a given excitation frequency between said sample surface and said cantilever, the measuring tip of which is brought into contact with said sample surface in such a manner that said measuring tip is excited to vibrations which are oriented lateral to said sample surface and perpendicular to said longitudinal extension of said cantilever and that the torsional vibrations induced in said cantilever are detected and analyzed by means of an evaluation unit. The invention is distinguished in that the vibration excitation occurs in such a manner that the oscillations executed by the measuring tip have higher harmonic vibration parts relative to the excitation frequency, that vibration excitation is conducted at excitation amplitudes which lead inside the cantilever to torsional amplitudes, the maximum values of which form a largely constant plateau value despite increasing excitation amplitudes and the resonance spectra of which undergo, in the range of the maximum values of the torsional amplitudes, a widening of the resonance spectrum which is determinable by a plateau width, and that used for examining the sample surface are the resonance spectra, preferably the plateau value, the plateau width and/or the gradient of the respective resonance spectra.

Abstract translation: 描述了一种使用原子力扫描显微镜（AFM）检查样品表面的方法，所述原子力扫描显微镜（AFM）包括具有纵向延伸部的悬臂，沿着所述纵向延伸部布置测量尖端，所述悬臂通过驱动装置相对于所述样品表面选择性地布置， 使用传感器单元检测空间位置，并且所述显微镜设置有至少一个超声波发生器，其在所述样品表面和所述悬臂之间以给定的激发频率启动振动激励，其测量尖端与所述样品接触 表面，使得所述测量尖端被激发为对所述样品表面横向并垂直于所述悬臂的所述纵向延伸的振动，并且通过评估单元检测和分析在所述悬臂中引起的扭转振动。 本发明的区别在于，振动激励以这样的方式发生，使得由测量尖端执行的振荡相对于激励频率具有较高的谐波振动部分，即在悬臂内引导到扭转振幅的激励振幅下进行振动激励， 其最大值虽然增加了激励幅度并且其谐振谱在扭振幅度的最大值的范围内经历了由平台宽度确定的共振谱的加宽，但是其最大值形成了大致恒定的平台值，以及 用于检查样品表面的是共振光谱，优选平台值，平台宽度和/或各个共振谱的梯度。