公开(公告)号：US20080050521A1

公开(公告)日：2008-02-28

申请号：US11508843

申请日：2006-08-24

Applicant: Xiaoding Ma ,  Michael J. Stimiman ,  Jing Gui

Inventor： Xiaoding Ma ,  Michael J. Stimiman ,  Jing Gui

IPC: C23C16/00

CPC classification number: C23C14/12 ,  G11B5/8408

Abstract: A vapor source for depositing a thin film of polymeric lubricant on a magnetic or MO recording medium comprises an enclosure comprised of at least one thermally conductive material and including a back wall and a front wall spaced apart by at least one sidewall thereby defining a chamber with an interior space, the front wall comprising a plurality of openings forming a vapor diffusion plate with an array of vapor orifices; at least one liquid reservoir within the interior space for containing a vaporizable liquid material; a heater for heating the interior space and forming a vapor of the liquid material; and a shutter device for controlling flow of vapor through the orifices of the vapor diffusion plate, thereby reducing lubricant consumption.

Abstract translation: 用于在磁性或MO记录介质上沉积聚合物润滑剂的薄膜的蒸汽源包括由至少一种导热材料组成的外壳，并且包括后壁和由至少一个侧壁隔开的前壁，从​​而限定具有 内部空间，前壁包括形成具有蒸气孔阵列的蒸气扩散板的多个开口; 在内部空间内的至少一个液体储存器，用于容纳可蒸发的液体材料; 用于加热内部空间并形成液体材料的蒸气的加热器; 以及用于控制通过蒸气扩散板的孔口的蒸汽流动的快门装置，从而减少润滑剂消耗。