公开(公告)号：US08497747B1

公开(公告)日：2013-07-30

申请号：US13039029

申请日：2011-03-02

申请人： Kenneth E. Wojciechowski ,  Roy H. Olsson, III ,  Maryam Ziaei-Moayyed

发明人： Kenneth E. Wojciechowski ,  Roy H. Olsson, III ,  Maryam Ziaei-Moayyed

IPC分类号： H03H9/54

CPC分类号： H03H9/0095 ,  H03H9/02228 ,  H03H9/58 ,  H03H2009/155

摘要： A microelectromechanical (MEM) filter is disclosed which has a plurality of lattice networks formed on a substrate and electrically connected together in parallel. Each lattice network has a series resonant frequency and a shunt resonant frequency provided by one or more contour-mode resonators in the lattice network. Different types of contour-mode resonators including single input, single output resonators, differential resonators, balun resonators, and ring resonators can be used in MEM filter. The MEM filter can have a center frequency in the range of 10 MHz-10 GHz, with a filter bandwidth of up to about 1% when all of the lattice networks have the same series resonant frequency and the same shunt resonant frequency. The filter bandwidth can be increased up to about 5% by using unique series and shunt resonant frequencies for the lattice networks.

摘要翻译： 公开了一种微机电（MEM）滤波器，其具有形成在基板上并且并联电连接在一起的多个网格网络。 每个格子网络具有串联谐振频率和由网格网络中的一个或多个轮廓模式谐振器提供的并联谐振频率。 可以在MEM滤波器中使用不同类型的轮廓模式谐振器，包括单输入，单输出谐振器，差分谐振器，平衡 - 不谐振谐振器和环形谐振器。 当所有晶格网络具有相同的串联谐振频率和相同的并联谐振频率时，MEM滤波器可以具有在10MHz-10GHz范围内的中心频率，滤波器带宽高达约1％。 通过使用格子网络的独特串联和并联谐振频率，滤波器带宽可以提高高达约5％。

公开(公告)号：US08525619B1

公开(公告)日：2013-09-03

申请号：US12790303

申请日：2010-05-28

申请人： Roy H. Olsson ,  Ihab F. El-Kady ,  Maryam Ziaei-Moayyed ,  Darren W. Branch ,  Mehmet F. Su ,  Charles M. Reinke

发明人： Roy H. Olsson ,  Ihab F. El-Kady ,  Maryam Ziaei-Moayyed ,  Darren W. Branch ,  Mehmet F. Su ,  Charles M. Reinke

IPC分类号： H03H9/54

CPC分类号： H03H9/02228

摘要： A very high-Q, low insertion loss resonator can be achieved by storing many overtone cycles of a lateral acoustic wave (i.e., Lamb wave) in a lithographically defined suspended membrane comprising a low damping resonator material, such as silicon carbide. The high-Q resonator can sets up a Fabry-Perot cavity in a low-damping resonator material using high-reflectivity acoustic end mirrors, which can comprise phononic crystals. The lateral overtone acoustic wave resonator can be electrically transduced by piezoelectric couplers. The resonator Q can be increased without increasing the impedance or insertion loss by storing many cycles or wavelengths in the high-Q resonator material, with much lower damping than the piezoelectric transducer material.

摘要翻译： 通过将横向声波（即，兰姆波）的许多泛音循环存储在包括诸如碳化硅的低阻尼谐振器材料的光刻定义的悬浮膜中，可以实现非常高Q的低插入损耗谐振器。 高Q谐振器可以使用高反射率声端镜在低阻尼谐振器材料中建立法布里 - 珀罗腔，该声反射镜可以包括声子晶体。 横向泛音声波谐振器可以由压电耦合器电传导。 可以通过在高Q谐振器材料中存储许多周期或波长来增加谐振器Q而不增加阻抗或插入损耗，其阻尼比压电换能器材料低得多。