公开(公告)号：USRE41374E1

公开(公告)日：2010-06-15

申请号：US11998813

申请日：2007-11-29

Applicant: David W. Wine ,  Mark P. Heisel ,  Jon D. Barger ,  Clarence T. Tegreene

Inventor： David W. Wine ,  Mark P. Heisel ,  Jon D. Barger ,  Clarence T. Tegreene

IPC: H01J3/14

CPC classification number: G02B27/0172 ,  G02B26/0841 ,  G02B26/101 ,  G06K7/10633

Abstract: A MEMs scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a torsion arm that supports an oscillatory body. In one embodiment, an array of removable masses are placed on an exposed portion of the oscillatory body and selectively removed to establish the resonant frequency. The material can be removed by laser ablation, etching, or other processing approaches. In another approach, a migratory material is placed on the torsion arm and selectively stimulated to migrate into the torsion arm, thereby changing the mechanical properties of the torsion arm. The changed mechanical properties in turn changes the resonant frequency of the torsion arm. In another approach, symmetrically distributed masses are removed or added in response to a measured resonant frequency to tune the resonant frequency to a desired resonant frequency. A display apparatus includes the scanning device and the scanning device scans about two or more axes, typically in a raster pattern. Various approaches to controlling the frequency responses of the scanning device are described, including active control of MEMs scanners and passive frequency tuning.

Abstract translation: MEM扫描装置具有可变谐振频率。 在一个实施例中，MEM装置包括支撑摆动体的扭转臂。 在一个实施例中，将可移除质量的阵列放置在振荡体的暴露部分上并选择性地去除以建立谐振频率。 材料可以通过激光烧蚀，蚀刻或其他处理方法去除。 在另一种方法中，将迁移材料放置在扭转臂上并选择性地被刺激以迁移到扭转臂中，从而改变扭转臂的机械特性。 改变的机械性能又改变了扭转臂的共振频率。 在另一种方法中，响应于测量的谐振频率去除或添加对称分布的质量，以将谐振频率调谐到期望的谐振频率。 显示装置包括扫描装置和扫描装置扫描关于两个或多个轴，通常以光栅图案扫描。 描述了控制扫描装置的频率响应的各种方法，包括MEMs扫描器的主动控制和无源频率调谐。