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公开(公告)号：US20050022735A1
公开(公告)日：2005-02-03
申请号：US10630139
申请日：2003-07-31
IPC分类号： C23C16/44 , C23C16/455 , C23C16/509 , H01J37/32 , C23C16/00 , C23F1/00
CPC分类号： C23C16/45565 , C23C16/4409 , C23C16/5096 , H01J37/3244
摘要： Gas delivery devices for PECVD systems and methods for using such systems are described. The delivery device goes directly through the powered electrode and thereby bypasses components of the PECVD systems used to support that electrode. The delivery device contains a coupling device between the powered electrode of the PECVD reactor and the gas inlet line. The gas inlet line is electrically and thermally isolated from the powered electrode and is sealed to maintain the vacuum integrity of the PECVD reactor through the use of a coupling device. Thus, gases from the heated gas lines can be routed directly through the powered electrode and fed into the reactor via the showerhead without having a cold area between the showerhead and gas inlet line.
摘要翻译： 描述了用于PECVD系统的气体输送装置以及使用这种系统的方法。 输送装置直接通过动力电极，从而绕过用于支撑该电极的PECVD系统的部件。 输送装置在PECVD反应器的动力电极和气体入口管线之间包含耦合装置。 气体入口管线与被动电极电隔离，并且被密封，以通过使用联接装置来保持PECVD反应器的真空完整性。 因此，来自加热的气体管线的气体可以直接通过动力电极被路由并经由喷头进料到反应器中，而在喷头和气体入口管线之间没有冷的区域。
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公开(公告)号：US11952166B2
公开(公告)日：2024-04-09
申请号：US17807743
申请日：2022-06-20
CPC分类号： B65D21/0204 , B65D1/0246 , B65D41/04
摘要： A container and integrated connector system includes a first container and an integrated connector. The first container includes a first body having a hollow first interior and a laterally projecting first shoulder disposed on an upper portion of the first body. The first container also includes a first neck, which is disposed on the first shoulder of the first body. The integrated connector is integrally connected to the first body. The integrated connector includes a connector member and a ring structure. The connector member projects laterally from the first body. The ring structure is disposed on a distal end portion of the connector member. The ring structure includes a connector opening, which is configured to fit over a second neck of a second container. The ring structure is operable to be removably secured to the second container when the connector opening is fit over the second neck.
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公开(公告)号：US20230064548A1
公开(公告)日：2023-03-02
申请号：US17807743
申请日：2022-06-20
摘要： A container and integrated connector system includes a first container and an integrated connector. The first container includes a first body having a hollow first interior and a laterally projecting first shoulder disposed on an upper portion of the first body. The first container also includes a first neck, which is disposed on the first shoulder of the first body. The integrated connector is integrally connected to the first body. The integrated connector includes a connector member and a ring structure. The connector member projects laterally from the first body. The ring structure is disposed on a distal end portion of the connector member. The ring structure includes a connector opening, which is configured to fit over a second neck of a second container. The ring structure is operable to be removably secured to the second container when the connector opening is fit over the second neck.
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