公开(公告)号：US12130243B2

公开(公告)日：2024-10-29

申请号：US17685679

申请日：2022-03-03

申请人： Lumina Instraments Inc.

发明人： Steven W. Meeks ,  Hung Phi Nguyen ,  Alireza Shahdoost Moghaddam

IPC分类号： G01N21/958 ,  G01N21/21 ,  G01N21/84 ,  G01N21/88 ,  G01N21/896 ,  G02B26/10

CPC分类号： G01N21/958 ,  G01N21/21 ,  G01N21/8422 ,  G01N21/8806 ,  G02B26/101 ,  G01N2021/215 ,  G01N2021/8848 ,  G01N2021/8965

摘要： An angle independent optical surface inspector capable of generating a light beam, directing the light beam to a sample, and de-scanning a reflected light beam that is reflected from the sample, thereby generating a first de-scanned light beam. The de-scanning is performed at approximately one focal length of a de-scanning lens from an irradiation location where the light beam irradiates the sample. The optical inspector also capable of focusing the first de-scanned light beam, thereby generating a focused light beam, and measuring the location of the focused light beam. The measuring of the location is performed at approximately one focal length of a focusing lens from the focusing lens. The incident angle of the light beam is within ten degrees of Brewster's angle. The focusing is performed by an achromatic lens.