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公开(公告)号:US07691560B2
公开(公告)日:2010-04-06
申请号:US11727002
申请日:2007-03-23
IPC分类号: G03F7/00
CPC分类号: G03F7/0392 , G03F7/0045 , G03F7/0382
摘要: A resist composition comprising at least one kind of a nitrogen-containing compound selected from the group consisting of an amine compound having a phenoxy group, an ammonium salt compound having a phenoxy group, an amine compound having a sulfonic acid ester group and an ammonium salt compound having a sulfonic acid ester group; and a pattern forming method using the composition.
摘要翻译: 一种抗蚀剂组合物,其包含至少一种选自具有苯氧基的胺化合物,具有苯氧基的铵盐化合物,具有磺酸酯基的胺化合物和铵盐的含氮化合物 具有磺酸酯基的化合物; 以及使用该组合物的图案形成方法。