公开(公告)号：US09308624B2

公开(公告)日：2016-04-12

申请号：US13514413

申请日：2011-06-06

申请人： Kazumichi Hibino ,  Yukinori Suzuki ,  Kazuyoshi Maeda ,  Norihito Shibuya

发明人： Kazumichi Hibino ,  Yukinori Suzuki ,  Kazuyoshi Maeda ,  Norihito Shibuya

IPC分类号： B24C3/32 ,  B24C1/08 ,  B24C3/08 ,  B24C3/12 ,  B24C9/00 ,  B24C1/00

CPC分类号： B24C3/32 ,  B24C1/00 ,  B24C1/086 ,  B24C3/086 ,  B24C3/12 ,  B24C3/322 ,  B24C9/00 ,  B24C9/003

摘要： The present invention provides an apparatus for removing the unnecessary thin-film layer on the periphery of the substrate of the plate-like member having a square shape, on the surface of which substrate is formed a thin-film layer. The apparatus comprises a chamber to treat the peripheral part where the peripheral part of the plate-like member is inserted and where the unnecessary thin-film layer on the peripheral part of the plate-like member is removed; and a means to move the plate-like member. The chamber to treat the peripheral part comprises a cover to prevent the scattering of the sprayed particles and the dust for treating the peripheral part, the cover having one of its end-sides that forms a ceiling being closed and having the other end-side that is opposed to the ceiling being open and a suctioning cover for treating the peripheral part, having an opening that has the same shape as the opening of the cover to prevent the scattering of the dust. In the chamber to treat the peripheral part, a blasting nozzle for spraying particles for treating the peripheral part is disposed on the cover to prevent the scattering of the dust, so that the mouth of the blasting nozzle is covered by the wall of the cover to prevent the scattering of the sprayed particles and the dust.

摘要翻译： 本发明提供了一种用于去除在具有正方形形状的板状构件的基板的周边上的不需要的薄膜层的装置，其表面上形成有薄膜层。 该装置包括用于处理插入板状构件的周边部分的周边部分的腔室，并且去除板状构件的周边部分上的不需要的薄膜层; 以及移动板状构件的装置。 用于处理周边部分的腔室包括防止喷射的颗粒和用于处理周边部分的灰尘的飞散的盖，所述盖具有形成天花板的其中一端封闭，并且另一端侧具有 与天花板开放相对，并且具有用于处理周边部分的抽吸盖，具有与盖的开口相同形状的开口，以防止灰尘的飞散。 在用于处理周边部分的室中，在盖上设置用于喷射颗粒以用于处理周边部分的喷射喷嘴以防止灰尘的飞散，使得喷射喷嘴的口被盖的壁覆盖 防止喷射的颗粒和灰尘的飞散。

公开(公告)号：US20130143473A1

公开(公告)日：2013-06-06

申请号：US13514413

申请日：2011-06-06

申请人： Kazumichi Hibino ,  Yukinori Suzuki ,  Kazuyoshi Maeda ,  Norihito Shibuya

发明人： Kazumichi Hibino ,  Yukinori Suzuki ,  Kazuyoshi Maeda ,  Norihito Shibuya

IPC分类号： B24C3/32 ,  B24C1/00

CPC分类号： B24C3/32 ,  B24C1/00 ,  B24C1/086 ,  B24C3/086 ,  B24C3/12 ,  B24C3/322 ,  B24C9/00 ,  B24C9/003

摘要： The present invention provides an apparatus for removing the unnecessary thin-film layer on the periphery of the substrate of the plate-like member having a square shape, on the surface of which substrate is formed a thin-film layer. The apparatus comprises a chamber to treat the peripheral part where the peripheral part of the plate-like member is inserted and where the unnecessary thin-film layer on the peripheral part of the plate-like member is removed; and a means to move the plate-like member. The chamber to treat the peripheral part comprises a cover to prevent the scattering of the sprayed particles and the dust for treating the peripheral part, the cover having one of its end-sides that forms a ceiling being closed and having the other end-side that is opposed to the ceiling being open and a suctioning cover for treating the peripheral part, having an opening that has the same shape as the opening of the cover to prevent the scattering of the dust. In the chamber to treat the peripheral part, a blasting nozzle for spraying particles for treating the peripheral part is disposed on the cover to prevent the scattering of the dust, so that the mouth of the blasting nozzle is covered by the wall of the cover to prevent the scattering of the sprayed particles and the dust.

摘要翻译： 本发明提供了一种用于去除在具有正方形形状的板状构件的基板的周边上的不需要的薄膜层的装置，其表面上形成有薄膜层。 该装置包括用于处理插入板状构件的周边部分的周边部分的腔室，并且去除板状构件的周边部分上的不需要的薄膜层; 以及移动板状构件的装置。 用于处理周边部分的腔室包括防止喷射的颗粒和用于处理周边部分的灰尘的飞散的盖，所述盖具有形成天花板的其中一端封闭，并且另一端侧具有 与天花板开放相对，并且具有用于处理周边部分的抽吸盖，具有与盖的开口相同形状的开口，以防止灰尘的飞散。 在用于处理周边部分的室中，在盖上设置用于喷射颗粒以用于处理周边部分的喷射喷嘴以防止灰尘的飞散，使得喷射喷嘴的口被盖的壁覆盖 防止喷射的颗粒和灰尘的飞散。