Method for depositing oxide thin films on textured and curved metal surfaces
    2.
    发明授权
    Method for depositing oxide thin films on textured and curved metal surfaces 失效
    在纹理和弯曲金属表面上沉积氧化物薄膜的方法

    公开(公告)号:US08642511B2

    公开(公告)日:2014-02-04

    申请号:US13139961

    申请日:2009-12-18

    IPC分类号: H01L39/24

    摘要: Method of depositing a layer of oxide of at least one metal element on a curved surface of a textured metal substrate, said method comprising the following steps: (1) a layer of a precursor of at least one oxide of a metal is deposited using an organic solution of at least one precursor of said metal, this solution preferably having a viscosity, measured at the temperature of the method, of between 1 mPa s and 20 mPa s, and even more preferentially between 2 mPa s and 10 mPa s. (2) said layer of oxide precursor is left to dry, (3) heat treatment is carried out in order to pyrolyse said oxide precursor and to form the oxide, at least part of said heat treatment being carried out under a flow of reducing gas, said reducing gas preferably having a flow rate greater than 0.005 cm/s, preferentially between 0.012 cm/s and 0.1 cm/s, and even more preferentially between 0.04 cm/s and 0.08 cm/s.

    摘要翻译: 在纹理化金属基底的弯曲表面上沉积至少一种金属元素的氧化物层的方法,所述方法包括以下步骤:(1)至少一种金属氧化物的前体层,使用 所述金属的至少一种前体的有机溶液,该溶液优选具有在该方法温度下测得的粘度为1mPa·s至20mPa·s,甚至更优选在2mPa·s至10mPa·s之间。 (2)使所述氧化物前体层干燥,(3)进行热处理以热解所述氧化物前体并形成氧化物,所述热处理的至少一部分在还原气体流下进行 所述还原气体优选具有大于0.005cm / s的流速,优选在0.012cm / s至0.1cm / s之间,甚至更优选在0.04cm / s至0.08cm / s之间。