公开(公告)号：US20080060974A1

公开(公告)日：2008-03-13

申请号：US11358306

申请日：2006-02-21

Applicant: S. Y. Liang ,  Chih-Wing Chang ,  Hsin-Yuan Chen ,  Chung-Jen Chen ,  J. F. Lee ,  Chih-Chien Wang ,  Chun-Yi Ho

Inventor： S. Y. Liang ,  Chih-Wing Chang ,  Hsin-Yuan Chen ,  Chung-Jen Chen ,  J. F. Lee ,  Chih-Chien Wang ,  Chun-Yi Ho

IPC: B65D85/00

CPC classification number: G03F7/70741 ,  G03F1/66

Abstract: A reticle carrier including a base portion and a cover portion at least partially detachable from the base portion. The base portion and the cover portion are configured to collectively house a reticle in a region collectively defined by the base portion and the cover portion when the base portion and the cover portion are fully attached. At least a portion of an interior surface of at least one of the base portion and the cover portion is treated with a sulfide-absorbing composition, such as silver or a silver-containing alloy.

Abstract translation: 一种标线载体，其包括基部和至少部分地可从基部分离的盖部。 底座部分和盖部分构造成当底座部分和盖部分完全安装时，共同地将掩模版容纳在由基部和盖部共同限定的区域中。 基体部分和盖部分中的至少一个的内表面的至少一部分用硫化物吸收组合物如银或含银合金进行处理。