公开(公告)号：US07859687B2

公开(公告)日：2010-12-28

申请号：US12635993

申请日：2009-12-11

申请人： Ikutarou Mitsutake

发明人： Ikutarou Mitsutake

IPC分类号： G01B11/24 ,  G01B11/14

CPC分类号： G03G15/5041 ,  G01B11/0608 ,  G03G2215/00042

摘要： To provide a height detection apparatus capable of detecting height information of a subject surface even in a narrow area, the height detection apparatus includes: an illumination optical system for illuminating the subject surface with a light flux emitted from a light source unit; an imaging optical system for causing the light flux reflected on the subject surface to form an image as a line image on an imaging surface; and a light detection unit disposed on the imaging surface. A light detection surface of the light detection unit is positioned in a plane rotated about a rotational axis, the rotational axis being an axis which is perpendicular to an optical axis of an optical element positioned optically closest to the light detection unit among optical elements constituting the imaging optical system, and is perpendicular to the line image to be formed by the imaging optical system.

摘要翻译： 为了提供一种即使在狭窄区域也能够检测被摄体表面的高度信息的高度检测装置，高度检测装置包括：照明光学系统，用于利用从光源单元发射的光束照射被摄体表面; 成像光学系统，用于使得在所述被摄体表面上反射的光束在成像表面上形成作为线图像的图像; 以及设置在成像面上的光检测单元。 光检测单元的光检测表面位于围绕旋转轴线旋转的平面中，旋转轴是在构成光学元件的光学元件中与光学元件最靠近光学元件的光轴垂直的光轴。 成像光学系统，并且垂直于由成像光学系统形成的线图像。

公开(公告)号：US20100150584A1

公开(公告)日：2010-06-17

申请号：US12635993

申请日：2009-12-11

申请人： Ikutarou Mitsutake

发明人： Ikutarou Mitsutake

IPC分类号： G03G15/08

CPC分类号： G03G15/5041 ,  G01B11/0608 ,  G03G2215/00042

摘要： To provide a height detection apparatus capable of detecting height information of a subject surface even in a narrow area, the height detection apparatus includes: an illumination optical system for illuminating the subject surface with a light flux emitted from a light source unit; an imaging optical system for causing the light flux reflected on the subject surface to form an image as a line image on an imaging surface; and a light detection unit disposed on the imaging surface. A light detection surface of the light detection unit is positioned in a plane rotated about a rotational axis, the rotational axis being an axis which is perpendicular to an optical axis of an optical element positioned optically closest to the light detection unit among optical elements constituting the imaging optical system, and is perpendicular to the line image to be formed by the imaging optical system.

摘要翻译： 为了提供一种即使在狭窄区域也能够检测被摄体表面的高度信息的高度检测装置，高度检测装置包括：照明光学系统，用于利用从光源单元发射的光束照射被摄体表面; 成像光学系统，用于使得在所述被摄体表面上反射的光束在成像表面上形成作为线图像的图像; 以及设置在成像面上的光检测单元。 光检测单元的光检测表面位于围绕旋转轴线旋转的平面中，旋转轴是在构成光学元件的光学元件中与光学元件最靠近光学元件的光轴垂直的光轴。 成像光学系统，并且垂直于由成像光学系统形成的线图像。