公开(公告)号：US5692728A

公开(公告)日：1997-12-02

申请号：US634176

申请日：1996-04-18

申请人： Hisashi Shiozawa

发明人： Hisashi Shiozawa

IPC分类号： G01D11/30 ,  B23Q3/18 ,  B23Q11/00 ,  B23Q16/02 ,  F16C11/12 ,  F16F1/02 ,  F16M11/04 ,  F16M11/12 ,  G12B9/08 ,  F16M13/00

CPC分类号： F16F1/027 ,  B23Q11/0032 ,  B23Q16/021 ,  B23Q3/18 ,  F16C11/12 ,  F16M11/125 ,  F16M11/18

摘要： A supporting mechanism is provided in which each of three supporting portions is constituted by an elastic member able to be deformed only in one direction and an oscillation mechanism which can oscillate around the axis parallel to the one direction.

摘要翻译： 提供了一种支撑机构，其中三个支撑部分中的每一个由仅能够在一个方向上变形的弹性构件和能够平行于该一个方向的轴线摆动的摆动机构构成。

公开(公告)号：US06940605B2

公开(公告)日：2005-09-06

申请号：US10276724

申请日：2001-05-18

申请人： Jun Kawakami ,  Hisashi Shiozawa

发明人： Jun Kawakami ,  Hisashi Shiozawa

IPC分类号： G01B9/02 ,  G01B11/00 ,  G01B11/24

CPC分类号： G01B11/2441

摘要： Both the optical distance of the detected-light light path and the optical distance of the reference-light light path are simultaneously varied according to respective specified patterns, so that differences are created between the period of variation in the intensity of the required signal component (in the interference signals) and the periods of variation in the intensities of the coherent noise components. When the modulation scanning procedure is performed, the phase difference between the detected light and reference light in a specified state is determined as shape information for the above-mentioned detected surface on the basis of the interference signals output from the light-receiving element. As a result, it is possible to securely reduce the effects of coherent noise components generated as a result of the interference of specified noise light that has passed through at least portions of the detected-light light path and reference-light light path with the detected light or reference light.

摘要翻译： 检测光路的光学距离和基准光光路的光学距离都根据各自的特定图案同时变化，从而在所需信号分量的强度的变化周期之间产生差异（ 在干扰信号中）和相干噪声分量的强度的变化周期。 当执行调制扫描过程时，基于从光接收元件输出的干扰信号，将检测到的光和指定状态中的参考光之间的相位差确定为用于上述检测表面的形状信息。 结果，可以可靠地降低由于检测到的光线和基准光光路的至少一部分的特定噪声光的干扰而产生的相干噪声分量的影响 光或参考光。

公开(公告)号：US06963408B2

公开(公告)日：2005-11-08

申请号：US10802840

申请日：2004-03-18

申请人： Mikihiko Ishii ,  Hisashi Shiozawa ,  Jun Kawakami ,  Yasushi Fukutomi ,  Yutaka Ichihara

发明人： Mikihiko Ishii ,  Hisashi Shiozawa ,  Jun Kawakami ,  Yasushi Fukutomi ,  Yutaka Ichihara

IPC分类号： G01B9/02 ,  G01J9/02

CPC分类号： G01M11/0271 ,  G01B9/02024 ,  G01B9/02038 ,  G01B9/02065 ,  G01B2290/70 ,  G01J9/02

摘要： A point diffraction interference measuring method comprises forming a substantially ideal spherical wave by using a point light source-generating unit 101, 102, allowing a light flux composed of the spherical wave to pass through a test sample 109, thereafter dividing the light flux into two light fluxes by using an optical path-dividing element 105, allowing one light flux of the divided light fluxes to pass through a pinhole 129 to covert the one light flux into a reference light beam which is a substantially ideal spherical wave, and detecting interference fringes generated by causing interference between the reference light beam and a measuring light beam which is the other light flux of the divided light fluxes. The wavefront aberration of the test sample can be measured by observing the interference fringes without being affected by the disturbance which would be otherwise caused by any system vibration or the like.

摘要翻译： 点衍射干涉测量方法包括通过使用点光源产生单元101,102形成基本上理想的球面波，允许由球面波组成的光通量通过测试样品109，之后将光通量分成两部分 通过使用光路分割元件105的光通量，允许分割的光束的一个光束通过针孔129，以将一个光束转换成基本上理想的球面波的参考光束，并且检测干涉条纹 通过引起参考光束和作为分割光束的另一光束的测量光束之间的干涉而产生。 可以通过观察干涉条纹来测量测试样品的波前像差，而不受由任何系统振动等引起的干扰的影响。