公开(公告)号：US20130071274A1

公开(公告)日：2013-03-21

申请号：US13695916

申请日：2011-03-30

申请人： Michael Andrew Galtry ,  David Alan Turrell

发明人： Michael Andrew Galtry ,  David Alan Turrell

IPC分类号： F04C2/00 ,  F04C14/00

CPC分类号： F04C2/00 ,  F04B37/14 ,  F04C14/00 ,  F04C25/02 ,  F04C29/12 ,  F04C2220/30 ,  F04C2270/18

摘要： The present invention relates to a vacuum pumping system (10) for evacuating a vacuum chamber (12), the system comprising: a vacuum pump (16); and a plurality of forelines (22, 24) for conveying gas to the vacuum pump wherein in a first low vacuum stage of chamber evacuation a first foreline arrangement (22) can be connected for conveying gas to the vacuum pump and in a second higher vacuum stage of chamber evacuation a second foreline arrangement (22, 24) comprising one or more of said forelines can be connected for conveying gas to the vacuum pump, wherein the second foreline arrangement has a total cross-sectional area for conveying fluid which is larger than a total cross-sectional area of the first foreline arrangement.

摘要翻译： 本发明涉及一种用于抽空真空室（12）的真空泵系统（10），该系统包括：真空泵（16）; 以及用于将气体输送到真空泵的多个前沿（22,24），其中在室抽空的第一低真空阶段中，可以连接第一前排布置（22）以将气体输送到真空泵并在第二较高真空中 可以连接包括一个或多个所述前排的第二前排布置（22,24），用于将气体输送到真空泵，其中第二前排布置具有用于输送流体的总横截面面积，其大于 第一前导排列的总横截面面积。

公开(公告)号：US07914265B2

公开(公告)日：2011-03-29

申请号：US11660339

申请日：2005-08-17

申请人： Stuart Charles Coles ,  Michael Andrew Galtry ,  David Alan Turrell ,  Patrick Brian Clayton

发明人： Stuart Charles Coles ,  Michael Andrew Galtry ,  David Alan Turrell ,  Patrick Brian Clayton

IPC分类号： F04B3/00

CPC分类号： F04B41/06 ,  F04B37/14

摘要： A system for evacuating an enclosure is provided. The system includes a first vacuum pump having an inlet selectively connectable to an outlet from the enclosure. A second vacuum pump is also provided together with a conduit for connecting an exhaust of the first vacuum pump to an inlet of the second vacuum pump. An auxiliary chamber is provided, this chamber being selectively connectable to the conduit such that, in a first state, gas can be drawn from the auxiliary chamber by the second vacuum pump in isolation from the enclosure, and, in a second state, gas can be drawn from the enclosure to the auxiliary chamber through the first vacuum pump.

摘要翻译： 提供了一种用于排空外壳的系统。 该系统包括第一真空泵，其具有可选择地连接到外壳的出口的入口。 第二真空泵还与用于将第一真空泵的排气连接到第二真空泵的入口的管道一起提供。 设置辅助室，该室可选择性地连接到导管，使得在第一状态下，气体可以通过第二真空泵与外壳隔离从辅助室抽出，并且在第二状态下，气体罐 通过第一个真空泵从外壳抽吸到辅助室。

公开(公告)号：US07214041B2

公开(公告)日：2007-05-08

申请号：US10555972

申请日：2004-05-06

申请人： Peter Hugh Birch ,  David Alan Turrell ,  Malcolm William Gray ,  Neil Turner

发明人： Peter Hugh Birch ,  David Alan Turrell ,  Malcolm William Gray ,  Neil Turner

IPC分类号： F03C2/00 ,  F04C2/00

CPC分类号： F04C27/02 ,  F04C18/086 ,  F04C18/123 ,  F04C18/126 ,  F04C23/001 ,  F04C2220/12

摘要： A seal assembly for the protection of a static seal device for use in a vacuum pump. The seal assembly comprising at least two components which are sealingly connected together, an o-ring seal, which is engaged between the two components to prevent transfer of fluid to and from the pump between these two components and a fluid channel. The fluid channel being in the plane of the o-ring and located between the o-ring seal and a process gas flow path. The fluid channel provides a path for a barrier gas to be routed when the apparatus is in use. The channel being connectable to an external source of barrier fluid and having an outlet in fluid communication with the pump swept volume.

摘要翻译： 一种用于保护用于真空泵的静态密封装置的密封组件。 密封组件包括密封地连接在一起的至少两个部件，O形圈密封件，其接合在两个部件之间以防止流体在这两个部件之间和/或从泵两者之间传递流体通道。 流体通道位于O形环的平面内并且位于O形环密封件和工艺气体流动路径之间。 当设备使用时，流体通道提供用于阻挡气体被路由的路径。 该通道可连接到外部的阻挡流体源并且具有与泵扫过体积流体连通的出口。