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1.发明授权Method and device for the plasma treatment of surfaces containing alkali and alkaline-earth metals 有权用于等离子体处理包含碱金属和碱土金属的表面的方法和装置公开(公告)号：US08673406B2
公开(公告)日：2014-03-18
申请号：US11680501
申请日：2007-02-28
Applicant: Matthias Bicker , Uwe Rothhaar , Robert Hormes , Bernd Hanser , Manfred Lohmeyer , Stefan Bauer
Inventor： Matthias Bicker , Uwe Rothhaar , Robert Hormes , Bernd Hanser , Manfred Lohmeyer , Stefan Bauer
CPC classification number: C03C21/007 , C03C23/006
Abstract: The invention relates to a method for the plasma treatment of glass surfaces, the metal component, in particular the alkali and/or alkaline-earth metal component in the superficial region of the substrate being reduced by a plasma treatment of a substrate.
Abstract translation: 本发明涉及一种用于等离子体处理玻璃表面的方法，金属组分，特别是通过衬底的等离子体处理，还原了衬底的表面区域中的碱金属和/或碱土金属组分。
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2.发明申请Method and device for the plasma treatment of surfaces containing alkali and alkaline-earth metals 有权用于等离子体处理包含碱金属和碱土金属的表面的方法和装置公开(公告)号：US20070232066A1
公开(公告)日：2007-10-04
申请号：US11680501
申请日：2007-02-28
Applicant: Matthias Bicker , Uwe Rothaar , Robert Hormes , Bernd Hanser , Manfred Lohmeyer , Stefan Bauer
Inventor： Matthias Bicker , Uwe Rothaar , Robert Hormes , Bernd Hanser , Manfred Lohmeyer , Stefan Bauer
IPC: H01L21/302
CPC classification number: C03C21/007 , C03C23/006
Abstract: The invention relates to a method for the plasma treatment of glass surfaces, the metal component, in particular the alkali and/or alkaline-earth metal component in the superficial region of the substrate being reduced by a plasma treatment of a substrate.
Abstract translation: 本发明涉及一种用于等离子体处理玻璃表面的方法，金属组分，特别是通过衬底的等离子体处理，还原了衬底的表面区域中的碱金属和/或碱土金属组分。
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