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公开(公告)号:US08536862B2
公开(公告)日:2013-09-17
申请号:US12594050
申请日:2008-03-28
申请人: Kenjiro Kimura , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige , Takashi Horiuchi , Nobuo Satoh , Akifumi Nakai
发明人: Kenjiro Kimura , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige , Takashi Horiuchi , Nobuo Satoh , Akifumi Nakai
IPC分类号: G01R33/02
CPC分类号: G01R33/10 , G01Q30/04 , G01Q60/50 , G01R33/0206 , G01R33/0385
摘要: Above a sample (9) having magnetic domains, a distribution of magnetic force in a measurement plane (91) is obtained as a magnetic force image using a MFM, an auxiliary magnetic force image is obtained by performing measurement in a measurement plane (92) away from the measurement plane (91) by a distance d, and a difference between them is divided by the distance d to obtain a magnetic force gradient image. The magnetic force image and the auxiliary magnetic force image are Fourier transformed and substituted into a three-dimensional field obtaining equation derived from a general solution of the Laplace equation, and the three-dimensional field indicating the magnetic force is obtained. A state of the magnetic domains at the surface (93) of the sample (9) can be obtained with high accuracy by obtaining the three-dimensional field.
摘要翻译: 在具有磁畴的样品(9)之上,通过使用MFM获得测量平面(91)中的磁力分布作为磁力图像,通过在测量平面(92)中进行测量来获得辅助磁力图像, 离开测量平面(91)距离d,并且将它们之间的差除以距离d以获得磁力梯度图像。 将磁力图像和辅助磁力图像进行傅立叶变换并代入由拉普拉斯方程的一般解导出的三维场获得方程式,得到表示磁力的三维场。 通过获得三维场,可以高精度地获得样品(9)的表面(93)处的磁畴的状态。
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公开(公告)号:US20100219819A1
公开(公告)日:2010-09-02
申请号:US12594050
申请日:2008-03-28
申请人: Kenjiro Kimura , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige , Takashi Horiuchi , Nobuo Satoh , Akifumi Nakai
发明人: Kenjiro Kimura , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige , Takashi Horiuchi , Nobuo Satoh , Akifumi Nakai
CPC分类号: G01R33/10 , G01Q30/04 , G01Q60/50 , G01R33/0206 , G01R33/0385
摘要: Above the sample (9) having magnetic domains, a distribution of magnetic force in a measurement plane (91) is obtained as a magnetic force image with use of a MFM, an auxiliary magnetic force image is obtained by performing measurement in a measurement plane (92) away from the measurement plane (91) by a minute distance d, and a difference between them is divided by the minute distance d to obtain a magnetic force gradient image. The magnetic force image and the auxiliary magnetic force image are Fourier transformed and substituted into a three-dimensional field obtaining equation derived from a general solution of the Laplace equation, and the three-dimensional field indicating the magnetic force is obtained with high accuracy. A state of the magnetic domains at the surface (93) of the sample (9) can be obtained with high accuracy by obtaining the three-dimensional field. The three-dimensional field obtaining method using the three-dimensional field obtaining equation can be used for various fields of magnetic, electric, temperature and gravity potential and so on satisfying the Laplace equation. The obtaining of the three-dimensional field can be extended to obtaining of an n-dimensional field having high-dimension.
摘要翻译: 在具有磁畴的样品(9)上方,通过使用MFM获得在测量平面(91)中的磁力分布作为磁力图像,通过在测量平面中进行测量获得辅助磁力图像( 92)远离测量平面(91)微小的距离d,并且它们之间的差除以微小距离d以获得磁力梯度图像。 将磁力图像和辅助磁力图像进行傅里叶变换并代入由拉普拉斯方程的一般解导出的三维场获得方程,并且以高精度获得表示磁力的三维场。 通过获得三维场,可以高精度地获得样品(9)的表面(93)处的磁畴的状态。 使用三维场获得方程的三维场获取方法可以用于满足拉普拉斯方程的磁,电,温度和重力等各种领域。 可以将三维场的获得扩展到获得具有高维度的n维场。
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