公开(公告)号：US20100332012A1

公开(公告)日：2010-12-30

申请号：US12555674

申请日：2009-09-08

Applicant: Chung-Ho Huang ,  Vijayakumar C. Venugopal ,  Connie Lam ,  Dragan Podlesnik

Inventor： Chung-Ho Huang ,  Vijayakumar C. Venugopal ,  Connie Lam ,  Dragan Podlesnik

IPC: G05B9/02 ,  G06F9/50 ,  G06F11/20

CPC classification number: G06F9/5027 ,  G05B19/4184 ,  G05B2219/31202 ,  G05B2219/31293 ,  G05B2219/31318 ,  G05B2219/31481 ,  G05B2219/32209 ,  G05B2219/45031 ,  G06F11/2035 ,  G06F11/2043 ,  Y02P90/14 ,  Y02P90/18

Abstract: A process-level troubleshooting architecture (PLTA) configured to facilitate substrate processing in a plasma processing system is provided. The architecture includes a process module controller. The architecture also includes a plurality of sensors, wherein each sensor of the plurality of sensors communicates with the process module controller to collect sensed data about one or more process parameters. The architecture further includes a process-module-level analysis server, wherein the process-module-level analysis server communicates directly with the plurality of sensors and the process module controller. The process-module-level analysis server is configured for receiving data, wherein the data include at least one of the sensed data from the plurality of sensors and process module and chamber data from the process module controller. The process-module-level analysis server is also configured for analyzing the data and sending interdiction data directly to the process module controller when a problem is identified during the substrate processing.

Abstract translation: 提供了一种配置为促进等离子体处理系统中的基板处理的过程级故障排除架构（PLTA）。 该架构包括一个进程模块控制器。 该架构还包括多个传感器，其中多个传感器中的每个传感器与过程模块控制器通信以收集关于一个或多个过程参数的感测数据。 该体系结构还包括一个过程模块级分析服务器，其中过程模块级分析服务器与多个传感器和过程模块控制器直接通信。 过程模块级分析服务器被配置为用于接收数据，其中数据包括来自多个传感器的感测数据中的至少一个以及来自处理模块控制器的处理模块和室数据。 过程模块级分析服务器还被配置为当在衬底处理期间识别出问题时，分析数据并将拦截数据直接发送到过程模块控制器。

公开(公告)号：US07783373B2

公开(公告)日：2010-08-24

申请号：US11934241

申请日：2007-11-02

Applicant: Shin-Mu Tseng ,  Wei-Cheng Lin

Inventor： Shin-Mu Tseng ,  Wei-Cheng Lin

IPC: G06F19/00 ,  G06F11/30 ,  G01N37/00 ,  G05B23/02

CPC classification number: G05B19/4184 ,  G05B2219/31304 ,  G05B2219/45031 ,  Y02P90/10 ,  Y02P90/14

Abstract: A process debug method used to identify at least one excursive machine in a manufacturing process comprising the following steps: First, a series of validity identification data is collected, and the serial validity identification data is associated with its pathway to obtain a plurality of validity identification data sequences in corresponding to the machines. Subsequently, a sorting process is conducted to cluster the validity identification data sequence into several groups, and the clustered groups are ranked into a first order. The validity identification data sequences are subjected a continuity analysis to determine the continuity of the defects occurring in a particular machine. And the continuities of the machines involved in a particular group are ranked into a second order. Accordingly, the excursive machines causing the defective end products in the manufacturing process can be identified by the way of joining the second orders according to the first order.

Abstract translation: 一种用于在制造过程中识别至少一个偏移机器的过程调试方法，包括以下步骤：首先，收集一系列有效性识别数据，并且将串行有效性识别数据与其路径相关联以获得多个有效性标识 对应于机器的数据序列。 随后，执行排序处理以将有效性识别数据序列聚类成多个组，并且将聚类组排列成第一顺序。 对有效性识别数据序列进行连续性分析以确定在特定机器中发生的缺陷的连续性。 并且涉及特定组的机器的连续性被排列成二级。 因此，可以通过按照第一顺序连接第二顺序来识别导致制造过程中的有缺陷的最终产品的偏移机器。

公开(公告)号：US20100189227A1

公开(公告)日：2010-07-29

申请号：US12359408

申请日：2009-01-26

Applicant: Kamal Mannar ,  Yibin Zheng

Inventor： Kamal Mannar ,  Yibin Zheng

IPC: G01D18/00

CPC classification number: H05G1/54 ,  A61B6/03 ,  A61B6/4429 ,  A61B6/4488 ,  A61B6/586 ,  G05B19/4184 ,  G05B2219/32371 ,  G05B2219/45169 ,  G06F19/00 ,  G16H40/40 ,  H01J2235/00 ,  Y02P90/86

Abstract: A system and method to predict a failure of an imaging system that includes a radiation source having an x-ray tube assembly is provided. The system includes a storage medium having a plurality of programmable storage instructions to instruct a processor to perform the steps of acquiring an age of the x-ray tube assembly, calculating a baseline probability of a survivability of the tube assembly for a remaining time period dependent on the age of the tube assembly, acquiring measurement of at least one operating parameter of the x-ray tube assembly, and automatically changing the baseline probability of a survivability of the imaging system for the remaining time period in response to the measurement of the at least one operating parameter of the x-ray tube assembly.

Abstract translation: 提供了一种用于预测包括具有X射线管组件的辐射源的成像系统的故障的系统和方法。 该系统包括具有多个可编程存储指令的存储介质，以指示处理器执行获取X射线管组件的年龄的步骤，计算剩余时间段依赖的管组件的存活性的基线概率 在管组件的年龄上，获取X射线管组件的至少一个操作参数的测量，以及响应于测量的时间自动改变成像系统在剩余时间段内的生存性的基线概率 x射线管组件的至少一个操作参数。

公开(公告)号：US07640007B2

公开(公告)日：2009-12-29

申请号：US11010016

申请日：2004-12-10

Applicant: Deji Chen ,  Mark J. Nixon ,  Kent A. Burr ,  Neil J. Peterson

Inventor： Deji Chen ,  Mark J. Nixon ,  Kent A. Burr ,  Neil J. Peterson

IPC: H04Q1/24

CPC classification number: G05B19/4184 ,  G05B19/0423 ,  G05B2219/23406 ,  G05B2219/24012 ,  G05B2219/25297 ,  G05B2219/25428 ,  G05B2219/31121 ,  G05B2219/32014 ,  G05B2219/36159 ,  G06F1/163 ,  Y02P90/14 ,  Y02P90/18

Abstract: A handheld communicator wirelessly interfaces or communicates with individual devices in a process control system, such as field devices, controllers, etc., to wirelessly perform monitoring, maintenance, configuration and control activities with respect to those devices. The wireless handheld communicator includes a housing adapted for handheld operation, a processing unit disposed within the housing, a computer readable memory disposed within the housing and coupled to the processing unit and a display, a keypad and a radio frequency transceiver. The handheld communicator may be adapted to communicate with a host system to receive information needed to communicate with various field devices in the process plant and may then be used to wirelessly communicate with each of the various field devices directly while in close proximity to the field devices to perform monitoring and configuration activities with respect to the field devices. Thereafter, information obtained from the field devices may be wirelessly communicated to the host system or to a repository, such as a data historian or a configuration database.

Abstract translation: 手持式通信器与诸如现场设备，控制器等的过程控制系统中的各个设备无线地接口或通信，以无线地执行关于这些设备的监视，维护，配置和控制活动。 无线手持通信器包括适于手持操作的外壳，设置在外壳内的处理单元，设置在外壳内并耦合到处理单元的计算机可读存储器，以及显示器，小键盘和射频收发器。 手持式通信器可以适于与主机系统进行通信，以接收与过程工厂中的各种现场设备进行通信所需的信息，然后可以用于与各种现场设备中的每一个直接通信，同时紧邻现场设备 对现场设备执行监控和配置活动。 此后，从现场设备获得的信息可以无线地传送到主机系统或存储库，诸如数据历史记录器或配置数据库。

公开(公告)号：US20090157594A1

公开(公告)日：2009-06-18

申请号：US11958808

申请日：2007-12-18

Applicant: Steven George Barbee

Inventor： Steven George Barbee

IPC: G06F17/30

CPC classification number: G05B19/4184 ,  G05B2219/32074 ,  G05B2219/32193 ,  G05B2219/32222 ,  G05B2219/45031 ,  G07C3/146 ,  Y02P90/14 ,  Y02P90/22

Abstract: Embodiments of the invention may be used to produce a data mining signal by generating hybrid dataset representing data related to tools used during a semiconductor fabrication process. By selectively combining similar processes, the data mining signal strength of each tool used to perform the steps of the fabrication process may be increased. A combined process variable may be used to represent the group of tools and processes, collectively. A set of rules may be composed to determine which processes used in the semiconductor fabrication process should be combined in the hybrid dataset.

Abstract translation: 本发明的实施例可以用于通过生成表示与半导体制造过程中使用的工具有关的数据的混合数据集来产生数据挖掘信号。 通过选择性地组合类似的过程，可以增加用于执行制造过程的步骤的每个工具的数据挖掘信号强度。 组合的过程变量可以用于统一地表示工具和过程组。 可以组合一组规则来确定在半导体制造过程中使用的哪些处理应该在混合数据集中组合。

公开(公告)号：US20080077269A1

公开(公告)日：2008-03-27

申请号：US11851008

申请日：2007-09-06

Applicant: Nam-young Lee ,  Pil-woong Bang ,  Yeong-lyeol Park

Inventor： Nam-young Lee ,  Pil-woong Bang ,  Yeong-lyeol Park

IPC: G06F19/00

CPC classification number: G05B19/4184 ,  G05B2219/32225 ,  G05B2219/34048 ,  G05B2219/45031 ,  Y02P90/14 ,  Y02P90/22

Abstract: Disclosed are a method of managing a process and a process managing system in which a failure-generating process step can be quickly detected. The method of managing a process includes sequentially performing first to n-th (n is a natural number) process steps with respect to a plurality of wafers, the order that the plurality of wafers are processed in each of the n process steps are different from one another. Calculating characteristic parameter values for the plurality of wafers, calculating first to n-th relations that indicate relationships between the first to n-th process orders and the characteristic parameter values, performing a Fourier transform on the first to n-th relations so as to calculate first to n-th conversion relations, and determining the existence of patterns among the first to n-th relations using the first to n-th conversion relations.

Abstract translation: 公开了一种管理过程和方法管理系统的方法，其中可以快速检测故障生成处理步骤。 管理处理的方法包括相对于多个晶片顺序地执行第一至第n（n是自然数）处理步骤，在n个处理步骤中的每一个处理多个晶片的顺序不同于 另一个。 计算多个晶片的特性参数值，计算表示第一至第n处理阶数之间的关系的特征参数值的第一至第n关系，对第一至第n关系进行傅里叶变换，以便 计算第一至第n转换关系，并且使用第一至第n转换关系确定第一至第n关系中的模式的存在。

公开(公告)号：US07292896B2

公开(公告)日：2007-11-06

申请号：US10220468

申请日：2001-02-26

Applicant: Kazuhiko Miura ,  Shoei Takahashi ,  Kazuyasu Asakura ,  Yoshio Maruyama ,  Katsuhito Shimizu ,  Yukiko Mori ,  Tohru Akatsu

Inventor： Kazuhiko Miura ,  Shoei Takahashi ,  Kazuyasu Asakura ,  Yoshio Maruyama ,  Katsuhito Shimizu ,  Yukiko Mori ,  Tohru Akatsu

IPC: G05B19/18 ,  G05B19/04

CPC classification number: G05B9/03 ,  G05B19/4184 ,  G05B2219/2231 ,  G05B2219/24189 ,  G05B2219/25432 ,  G05B2219/31229 ,  Y02P90/14

Abstract: A multiplexing control system has a common process input/output unit for distributing process signals from sensors for measuring the same state variable of a process to digital controllers. One process input/output unit for inputting/outputting a process signal between the multiplexing control system and plant is provided for each process signal. The process input/output unit for the process signal of high importance is triplexed. A process controller having an operating function is provided to each of the triplexed process input/output units. A process input/output unit for the process signal of intermediate importance is diplexed. A process input/output unit for the process signal of low importance is monoplexed. The process signals of the diplexed process input/output units and the monoplexed process input/output unit are controlled by a controller having a master right among the process controllers.

Abstract translation: 复用控制系统具有用于从用于将过程的相同状态变量测量到数字控制器的传感器分配过程信号的公共过程输入/输出单元。 为每个处理信号提供一个用于在多路复用控制系统和工厂之间输入/输出处理信号的过程输入/输出单元。 高重要性的过程信号的过程输入/输出单元是三重的。 具有操作功能的过程控制器被提供给每个三重过程输入/输出单元。 用于中间重要过程信号的过程输入/输出单元是双工的。 用于低重要性的处理信号的处理输入/输出单元是单相的。 双工过程输入/输出单元和单工序输入/输出单元的过程信号由处理控制器中具有主权的控制器控制。

公开(公告)号：US07194325B2

公开(公告)日：2007-03-20

申请号：US11050752

申请日：2005-02-07

Applicant: Seung Jun Lee ,  Seung Yong Doh ,  Chung Hun Park ,  Yoo Seok Jang

Inventor： Seung Jun Lee ,  Seung Yong Doh ,  Chung Hun Park ,  Yoo Seok Jang

IPC: G06F19/00

CPC classification number: G05B19/4184 ,  G05B2219/31357 ,  G05B2219/45031 ,  Y02P90/14

Abstract: A system to and method of monitoring a condition of a process tool. The system monitors a condition of a process tool to correctly detect a faulty operation or malfunction of the process tool. The system to monitor the condition of the process tool includes a first model storage unit to store one or more good models generated by data associated with the process tool, a second model storage unit to store one or more faulty models generated by the data associated with the process tool, a model selector to receive tool data from the process tool, and to select one of the good models and one of the faulty models in association with the received tool data, and an error detector to receive process data from the process tool, to compare the received process data with the good and faulty models selected by the model selector, and to estimate a condition of the process tool.

Abstract translation: 监控过程工具状态的系统和方法。 系统监控过程工具的状态，以正确检测过程工具的故障操作或故障。 用于监视过程工具的状态的系统包括：第一模型存储单元，用于存储由与处理工具相关联的数据生成的一个或多个良好模型;第二模型存储单元，用于存储由与该处理工具相关联的数据生成的一个或多个故障模型; 过程工具，从过程工具接收工具数据的模型选择器，以及与接收到的工具数据相关联地选择一个良好模型和一个故障模型;以及错误检测器，用于从过程工具接收过程数据 ，以将所接收到的过程数据与由模型选择器选择的良好和有缺陷的模型进行比较，并估计过程工具的状况。

公开(公告)号：US07152011B2

公开(公告)日：2006-12-19

申请号：US10927161

申请日：2004-08-25

Applicant: Neil Benjamin ,  Richard Alan Gottscho ,  Nicolas Bright ,  Robert Steger

Inventor： Neil Benjamin ,  Richard Alan Gottscho ,  Nicolas Bright ,  Robert Steger

IPC: G06F19/00

CPC classification number: G01R31/3187 ,  G05B19/4184 ,  G05B2219/31362 ,  G05B2219/31463 ,  Y02P90/14 ,  Y02P90/86

Abstract: A method of component management in a substrate processing system is disclosed. The substrate processing system has a set of components, at least a plurality of components of the set of components being designated to be smart components, each component of the plurality of components having an intelligent component enhancement (ICE). The method includes querying the plurality of components to request their respective unique identification data from their respective ICEs. The method further includes receiving unique identification data from the plurality of components if any of the plurality of components responds to the querying. The method additionally includes flagging the first component for corrective action if a first component of the plurality of components fails to provide first component unique identification data when the first component identification data is expected.

Abstract translation: 公开了一种基板处理系统中的部件管理方法。 衬底处理系统具有一组组件，该组组件中的至少多个组件被指定为智能组件，多个组件的每个组件具有智能组件增强（ICE）。 该方法包括查询多个组件以从它们各自的ICE请求它们各自的唯一标识数据。 该方法还包括如果多个组件中的任何组件响应于查询，则从多个组件接收唯一的标识数据。 该方法另外包括：如果在预期第一组件识别数据时多个组件的第一组件不能提供第一组件唯一标识数据，则标记第一组件以用于校正动作。

公开(公告)号：US20060259177A1

公开(公告)日：2006-11-16

申请号：US11458636

申请日：2006-07-19

Applicant: Naoki Toyoshima ,  Yuko Maeda

Inventor： Naoki Toyoshima ,  Yuko Maeda

IPC: G06F19/00

CPC classification number: G05B19/4184 ,  G05B2219/31355 ,  G05B2219/31365 ,  G05B2219/45031 ,  Y02P90/14

Abstract: A method and system for aggregating and combining manufacturing data for analysis for the purposes of increasing manufacturing efficiency and reducing manufacturing downtime due to abnormal conditions. An embodiment provides for a method of dividing an entire manufacturing process into parts and further into subparts for the purposes of tracking the path that a workpiece takes during the entire manufacturing process. Data is measured specific to the path and assigned to a data set stored on a data processing device for analysis of the conditions for the workpiece being examined. An embodiment provides for quicker data analysis which may result in less manufacturing product being discarded due to lengthy delays between abnormal conditions and the response to those conditions. An embodiment provides for users to be alerted when abnormal conditions are present. In one example, a data processing device non-manually halts production when abnormal conditions are present.

Abstract translation: 用于聚合和组合用于分析的制造数据的方法和系统，用于提高制造效率并减少由于异常情况导致的制造停机时间。 一个实施例提供了一种将整个制造过程分成多个部分并进一步分成子部件的方法，用于跟踪工件在整个制造过程中所采取的路径。 数据被特定于路径被测量并被分配给存储在数据处理设备上的数据集，用于分析待检测工件的条件。 一个实施例提供了更快的数据分析，这可能导致由于异常条件之间的长时间延迟和对这些条件的响应而导致较少的制造产品被丢弃。 一个实施例提供了当异常条件存在时向用户提供警报。 在一个示例中，当存在异常条件时，非手动地停止生产的数据处理设备。