公开(公告)号：US20090112491A1

公开(公告)日：2009-04-30

申请号：US12285771

申请日：2008-10-14

申请人： Akiko Nakada ,  Keisuke Kato ,  Akihito Sugino ,  Hiroki Doi

发明人： Akiko Nakada ,  Keisuke Kato ,  Akihito Sugino ,  Hiroki Doi

IPC分类号： G01F1/34 ,  G21C17/00 ,  G01K13/00

CPC分类号： G01F25/0038 ,  G01F25/0053

摘要： A flow rate verification failure diagnosis apparatus is applied to a gas supply pipe system including flow rate control devices and a flow rate verification unit for detecting flow rate abnormality by measuring flow rate of each of the flow rate control devices on the basis of pressure measured by a pressure measurement device. The flow rate verification failure diagnosis apparatus comprises a failure diagnosis device having a mode to diagnose a failure in the pressure measurement device at a time of the flow rate verification unit detecting the flow rate abnormality, thereby the reliability of flow rate verification can be enhanced.

摘要翻译： 流量验证失败诊断装置应用于包括流量控制装置和流量验证部的气体供给管系统，该流量检测部通过基于由所述流量控制装置测定的压力， 压力测量装置。 流量验证失败诊断装置包括故障诊断装置，其具有在流量验证部检测流量异常时具有诊断压力测量装置的故障的模式的故障诊断装置，能够提高流量验证的可靠性。

公开(公告)号：US20090059717A1

公开(公告)日：2009-03-05

申请号：US12219917

申请日：2008-07-30

申请人： Kazutoshi Itoh ,  Yasunori Nishimura

发明人： Kazutoshi Itoh ,  Yasunori Nishimura

IPC分类号： G05D11/02

CPC分类号： G05D11/132 ,  Y10T137/86461 ,  Y10T137/87885

摘要： A fluid mixing system capable of quickly stabilizing flow rates of a plurality of fluids to be mixed is arranged to mix the fluids and deliver a mixture thereof to a container. The system includes a plurality of on-off valves for the respective fluids and delivering the fluids to the container. The on-off valves are caused to open and close in order according to respective duty ratios each indicating an opening/closing ratio in a cycle.

摘要翻译： 布置能够快速稳定要混合的多种流体的流速的流体混合系统，以混合流体并将其混合物输送到容器中。 该系统包括用于各流体的多个开关阀并将流体输送到容器。 使开关阀按照各自的占空比顺序打开和关闭，每个占空比表示循环中的开/关比。

公开(公告)号：US20090039304A1

公开(公告)日：2009-02-12

申请号：US12085179

申请日：2006-09-21

申请人： Tetsuya Ishihara ,  Shigeru Osugi ,  Yukie Nakamura ,  Hiroto Yasue

发明人： Tetsuya Ishihara ,  Shigeru Osugi ,  Yukie Nakamura ,  Hiroto Yasue

IPC分类号： F16K31/50

CPC分类号： F16K31/50 ,  F16K35/027

摘要： A flow control valve is provided in a manner to be capable of locking a position of a differential screw easily without displacing a position adjusted valve element body. The valve element body is brought into or out of contact with a valve seat provided between a first port and a second port, and is connected to an operation member. The operation member is movably inserted into a cover and urged to a direction toward the valve seat by an urging member. A position of the operation member is adjusted by a differential screw, and accordingly a position of the valve seat is adjusted. A rotation member for exerting a rotation force on the differential screw is slidably mounted in the cover along a moving direction of the operation member without rotating. A locking portion is provided in the rotation member to engage with the cover without rotating when the operation member is slid along its moving direction.

摘要翻译： 流量控制阀以能够容易地锁定差速螺杆的位置而不使位置调节阀体本体移位的方式设置。 阀芯体与设置在第一端口和第二端口之间的阀座接触或不接触，并且连接到操作构件。 操作构件可移动地插入盖中并且通过推动构件被推向朝向阀座的方向。 操作构件的位置通过差速螺旋调节，因此调整阀座的位置。 用于在差速螺钉上施加旋转力的旋转构件沿着操作构件的移动方向可滑动地安装在盖中而不旋转。 当操作构件沿其移动方向滑动时，锁定部分设置在旋转构件中以与盖接合而不旋转。

公开(公告)号：US20090020722A1

公开(公告)日：2009-01-22

申请号：US12216496

申请日：2008-07-07

申请人： Akinori Masamura

发明人： Akinori Masamura

IPC分类号： F16K1/42

CPC分类号： F16K27/0236 ,  F16K31/122 ,  F16K31/1223

摘要： For providing a fluid control valve capable of preventing looseness of a screw part between a valve main body and a valve upper body, the fluid control valve comprises a resin valve main body wherein a valve seat comes into or out of contact with a diaphragm, and a resin valve upper body engaged with the valve main body. The fluid control valve comprises a holding member to keep the valve main body and the valve upper body threadedly screwed together.

摘要翻译： 为了提供能够防止阀主体和阀上体之间的螺纹部分松动的流体控制阀，流体控制阀包括其中阀座与隔膜接触或脱离接触的树脂阀主体，以及 与阀主体接合的树脂阀上部主体。 流体控制阀包括用于保持阀主体和阀上部螺纹拧紧在一起的保持构件。

公开(公告)号：US20080314564A1

公开(公告)日：2008-12-25

申请号：US12110225

申请日：2008-04-25

申请人： Kazuya NAGASEKI ,  Yoshiyuki KOBAYASHI ,  Koichi MURAKAMI ,  Ryo NONAKA ,  Yoshihisa SUDOH ,  Hiroshi ITAFUJI ,  Norio KOKUBO

发明人： Kazuya NAGASEKI ,  Yoshiyuki KOBAYASHI ,  Koichi MURAKAMI ,  Ryo NONAKA ,  Yoshihisa SUDOH ,  Hiroshi ITAFUJI ,  Norio KOKUBO

IPC分类号： F28D15/00

CPC分类号： G05D23/19

摘要： A temperature control device controls the temperature of a controlled object by circulating a fluid in a temperature adjustment unit arranged near the controlled object. The temperature control device comprises a heating pathway that heats and circulates the fluid in the temperature adjustment unit, a cooling pathway that cools and circulates the fluid in the temperature adjustment unit, a bypass pathway that does not pass the fluid through the heating pathway and cooling pathway, but circulates the fluid in the temperature adjustment unit, and adjustment means that adjust a flow ratio of the fluid that is supplied from the heating pathway, cooling pathway, and bypass pathway to the temperature adjustment unit via a confluence unit that combines these flows. The adjustment means are provided on a downstream side of each of the heating pathway, the cooling pathway, and the bypass pathway and on the upstream side of the confluence unit.

摘要翻译： 温度控制装置通过在布置在受控对象附近的温度调节单元中循环流体来控制受控物体的温度。 温度控制装置包括加热和循环温度调节单元中的流体的加热通道，使温度调节单元中的流体冷却和循环的冷却通道，不通过流体通过加热通道和冷却的旁路通路 使温度调节单元中的流体循环，以及调节装置，其通过组合这些流量的汇流单元，将从加热通路，冷却通路和旁路通路供给的流体的流量比调整到温度调节单元 。 调节装置设置在每个加热通道，冷却通道和旁路通路的下游侧以及汇流单元的上游侧。

公开(公告)号：US20080111095A1

公开(公告)日：2008-05-15

申请号：US11907222

申请日：2007-10-10

申请人： Masahiro Naitoh ,  Michinori Ikuji ,  Shin Ito ,  Makoto Iwata

发明人： Masahiro Naitoh ,  Michinori Ikuji ,  Shin Ito ,  Makoto Iwata

IPC分类号： F16K31/126

CPC分类号： F16K51/02 ,  F16K31/1221

摘要： To provide a vacuum valve with an improved endurance of a bellows, a vacuum valve comprises: a valve section including a first port, a second port, a valve seat provided between the first and second ports, and a valve element movable into or out of contact with the valve seat; an actuator section including an orifice through which an operating fluid is supplied to the actuator section, and a piston coupled to the valve element, the piston being allowed to operate according to changes of pressure of the operating fluid to apply a driving force to the valve section; and a bellows which can be contracted and elongated as the valve element vertically moves upward and downward. The orifice is designed to have an effective sectional area determined so that an operating speed of the valve element and the piston is controlled to a predetermined speed for preventing damage of the bellows.

摘要翻译： 为了提供具有改进的波纹管耐久性的真空阀，真空阀包括：阀部分，其包括第一端口，第二端口，设置在第一和第二端口之间的阀座和可移入或移出 与阀座接触; 致动器部分，其包括孔口，工作流体通过该孔口供应到致动器部分;以及活塞，其联接到阀元件，活塞被允许根据工作流体的压力变化来操作以向阀门施加驱动力 部分; 以及当阀元件垂直向上和向下移动时可以收缩和伸长的波纹管。 孔口被设计成具有确定的有效截面面积，使得阀元件和活塞的操作速度被控制到预定速度以防止损坏波纹管。

公开(公告)号：US20070295405A1

公开(公告)日：2007-12-27

申请号：US11812051

申请日：2007-06-14

申请人： Tsuneyuki Okabe ,  Shigeyuki Okura ,  Hiroki Doi ,  Minoru Ito ,  Yoji Mori ,  Yasunori Nishimura

发明人： Tsuneyuki Okabe ,  Shigeyuki Okura ,  Hiroki Doi ,  Minoru Ito ,  Yoji Mori ,  Yasunori Nishimura

IPC分类号： F16K3/36

CPC分类号： F16K27/003 ,  F16K7/14 ,  F16K31/06 ,  H01L21/31691 ,  Y10T137/4259 ,  Y10T137/87885

摘要： A liquid raw material supply unit for a vaporizer is adapted to supply a liquid raw material to the vaporizer that vaporizes the liquid raw material. The unit comprises: a manifold internally formed with a flow passage; and a plurality of fluid control valves mounted on the manifold, wherein the plurality of fluid control valves includes: a liquid raw material control valve for controlling supply of the liquid raw material to the flow passage; a cleaning solution control valve for controlling supply of a cleaning solution to the flow passage; a purge gas control valve for controlling supply of a purge gas to the flow passage; and a first introducing control valve connectable to the vaporizer for controlling supply of a fluid from the flow passage to the vaporizer, the purge gas control valve, the cleaning solution control valve, the liquid raw material control valve, and the first introducing control valve being mounted on the manifold in this order from an upstream side of the manifold, wherein the flow passage is connected to valve ports of the plurality of control valves respectively, the valve ports communicating with valve openings of the respective control valves, and the flow passage is configured to allow the purge gas supplied from the purge gas control valve to directly flow in the valve ports of the cleaning solution control valve and the liquid raw material control valve placed downstream from the purge gas control valve.

摘要翻译： 用于蒸发器的液体原料供应单元适于将液体原料供应到蒸发液体原料的蒸发器。 该单元包括：内部形成有流动通道的歧管; 以及安装在所述歧管上的多个流体控制阀，其中，所述多个流体控制阀包括：液体原料控制阀，用于控制所述液体原料供给所述流路; 清洗液控制阀，用于控制向所述流路供给清洗液; 吹扫气体控制阀，用于控制向所述流动通道供应净化气体; 以及可连接到蒸发器的第一引入控制阀，用于控制从流动通道到蒸发器的流体供应，吹扫气体控制阀，清洗溶液控制阀，液体原料控制阀和第一引入控制阀是 从歧管的上游侧依次安装在歧管上，其中流路分别连接到多个控制阀的阀口，与各个控制阀的阀口连通的阀口，流路是 被配置为允许从净化气体控制阀提供的净化气体直接流入清洗液控制阀的阀口和设置在净化气体控制阀下游的液体原料控制阀。

公开(公告)号：USD549077S1

公开(公告)日：2007-08-21

申请号：US29258281

申请日：2006-04-20

申请人： Takashi Yajima ,  Katsunori Hirose

设计人： Takashi Yajima ,  Katsunori Hirose

公开(公告)号：US20070177998A1

公开(公告)日：2007-08-02

申请号：US11655081

申请日：2007-01-19

申请人： Takashi Kato

发明人： Takashi Kato

IPC分类号： F04B43/06 ,  F04B11/00

CPC分类号： F04B43/113 ,  F04B7/02 ,  F04B43/0081 ,  F04B43/084 ,  F04B49/065 ,  F04B2201/0201

摘要： A liquid chemical supply system includes a liquid chemical pump having a pump chamber for supplying a liquid chemical and a volume variation member that will vary the volume of the pump chamber, and will intake or discharge the liquid chemical based upon a change in the volume of the pump chamber in accordance with the volume variation member. The system also comprises an operation means for causing the volume variation member to operate, an operation amount detection means for detecting the operation amount of the volume variation member, a displacement control means for performing displacement control so that the volume variation member will be displaced by the operation means when liquid chemical ports that lead to the pump chamber are in the closed state, and a determination means for determining the presence or absence of gas inside the pump chamber based upon the operation amount detection results from the operation amount detection means during displacement control.

摘要翻译： 液体化学品供给系统包括液体化学泵，其具有用于供应液体化学品的泵室和将改变泵室的体积的体积变化构件，并且将基于容积变化的体积的变化来吸入或排出液体化学品 泵室根据体积变化构件。 该系统还包括用于使体积变化构件运行的操作装置，用于检测体积变化构件的操作量的操作量检测装置，用于进行位移控制的位移控制装置，使得体积变化构件将被移位 所述操作装置是指通过所述泵室的液体化学品口处于关闭状态，以及确定装置，用于根据来自所述操作量检测装置的位移期间的操作量检测结果来确定所述泵室内的气体的存在或不存在 控制。

公开(公告)号：US20060196577A1

公开(公告)日：2006-09-07

申请号：US11417133

申请日：2006-05-04

申请人： Toshiyuki Nagao ,  Shigeru Osugi ,  Hiroshi Tomita

发明人： Toshiyuki Nagao ,  Shigeru Osugi ,  Hiroshi Tomita

IPC分类号： B65B1/04

CPC分类号： F16K27/02 ,  F16K1/42

摘要： A chemical liquid control valve is provided with a barrier on an outer circumferential end portion of a protruding part (an outer circumferential bottom portion of a valve seat). The barrier is placed so that an angle between the center line of an outlet passage and the line extending between the center of a valve port and each end of the barrier. The barrier is designed to have a height relative to a contact surface of the valve seat with a valve element is substantially half of the travel distance of a diaphragm valve element.

摘要翻译： 化学液体控制阀在突出部（阀座的外周底部）的外周端部设置有阻挡物。 隔离物被放置成使得出口通道的中心线与在阀口的中心与屏障的每个端部之间延伸的线之间的角度。 阻挡件被设计为具有相对于阀座的接触表面的高度，阀元件基本上是隔膜阀元件的移动距离的一半。