Abstract:
A metal diaphragm valve used for a semiconductor manufacturing device allowing a large amount of flow to pass therein in spite of a compact size by reducing a fluid resistance of a flow passage ranging from a valve chamber to an outflow passage through an inflow passage in a valve body, comprising the body (2) having the inflow passage (6), the valve chamber (8), and the outflow passage (7), a metal diaphragm (3), a drive means (4), and an annular groove (5), characterized in that the diameter (D) of the outflow passage (6) is made larger than the groove width (W) of the annular groove (5), and the effective sectional area of the crossing portion of the annular groove (5) with the outflow passage (6) is made larger than the cross-sectional area of the outflow passage (6).
Abstract:
A gate valve assembly includes a valve seat and a valve. The valve seat includes a passage opening and a contacting region surrounding the passage opening. The valve includes a groove located on a marginal region of the valve, and a sealing body positioned in the groove. The passage opening is closed by covering the valve over the valve seat, and an upper surface of the sealing body is tightly contacted with the contacting region. Therefore, the valve is prevented from rubbing against the valve seat and producing particles.
Abstract:
An ortho-planar spring has a platform (14) movably coupled to a base (10) and being movable linearly with respect to the base along at least a portion of an axial direction (22) perpendicular to both a base surface and a platform surface. A resilient and flexible connecting structure (18) is connected to and between the base and platform. The connecting structure is bendable to develop (i) an axial force along the axial direction to bias the platform in a stable position with respect to the base, and (ii) non-axial forces which substantially sum to zero to preserve the orientation of the platform with respect to the base. Thus, the spring is very compact and does not have rotation between the deflecting ends. The spring may be associated with a valve opening (213), and a button (214) for restricting flow through the valve opening, to bias the button at a position with respect to the valve opening.
Abstract:
The valve device (1) includes a valve body (2) defining a fluid flow duct (30) having a plug (20) disposed therein, the plug having a main flow opening (21) and being movable between a first position in which the main flow opening co-operates with the flow duct, and a second position in which the plug closes the duct. The plug further includes secondary flow means (22) offset relative to the main flow means and enabling the hydraulic characteristic of the valve device to be controlled.
Abstract:
Disclosed herewith is a microchip having a micromixer therein. The mixromixer employs a mixing or extracting structure having (1) a first flow pass provided at a first level of the microchip; (2) a second flow pass provided at a second level of the microchip, which is different from the first level; (3) a third flow pass having a plurality of sub flow passes separately layered at the first level and each having a first end and second end thereof, each sub flow pass being connected to one of the first and second flow passes at the first end thereof; and (4) a fourth flow pass, provided at the first level, connected to the second ends of the sub flow passes so that, at least connecting portions between the fourth flow pass and the sub flow passes of the third flow pass, an extending direction of the fourth flow pass is substantially identical to those of the sub flow passes. By allowing the first liquid to flow from the first flow pass to the fourth flow pass through the third flow pass while the second liquid to flow from the second flow pass to the fourth flow pass through the third flow pass, the first and second liquids are mixed at the fourth flow pass.
Abstract:
A valve assembly has a valve body with a bore formed therein. A valve spool is slidably disposed in the valve body. The valve spool has a plurality of valve lands that closely engage the valve bore to form substantially leak-free interfaces. The leading land has a diameter less than the land immediately adjacent thereto in a range of 0.34 mm to 0.17 mm, and a recess formed between the leading land and the first adjacent land. The recess has an inner diameter at least 0.75 mm less than said diameter of said leading land.
Abstract:
A method and apparatus for attaching a valve to another device such as a device, such as a device for separating a solid from a liquid. A valve seat according to the present invention is friction fitted into an orifice defined by the device and a conduit is attached to the valve seat via a removable spline.
Abstract:
An integrated pneumatic manifold for installations that require electrical and other components to be separated from a harmful or dangerous environment, in which pneumatic (and/or hydraulic) devices operate, the manifold comprising a block that has drilled into it a large number of passages that are directed in various directions and located at various levels, some passages crossing partially and some wholly with others and cavities machined in various positions. The block has mounting points for components on its surfaces and passive and active pneumatic components are integrated into the cavities and passages of the block. The block serves as a separation between the safe and harmful environments and as a substitution for many passive and active pneumatic components that would normally be individually connected.
Abstract:
A flow quantity control valve includes second spring holder that is fixed within housing and holds one end of valve spring which is located on a side of valve disk. The second spring holder is a roughly cylindrical member made of a material with a lower thermal conductivity than that of the housing 1 made of cast iron; and is composed of roughly circular internal bottom, stay portion that is a body portion extending from the outer periphery of the internal bottom and surrounding the valve spring, a through hole formed in a center of the internal bottom and having a larger internal diameter than the external diameter of surrounding wall constituting another through hole of the housing and flange portion radially and outwardly extending from a upper part of the stay portion and having a roughly rectangular periphery portion.
Abstract:
The invention relates to an apparatus for conveying at least one fluid, comprising at least a first fluidic element (10) and a second fluidic element (30) connected to each other for conveying said fluid, and a base plate (24) to which said first fluidic element (10) and said second fluidic element (30) are mounted. In accordance with the invention said base plate (24) comprises at least a first outlet (46) for feeding a leak test agent to the connection area of said first fluidic element (10) and said second fluidic element (30). The invention further relates to a base plate (24) for mounting at least a first fluidic element (10) and a second fluidic element (30) connectable to each other for conveying a fluid. In accordance with the invention said base plate (24) comprises at least a first outlet (46) for feeding a leak test agent to an connection area of said first fluidic element (10) and said second fluidic element (30).