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公开(公告)号：US07935187B2
公开(公告)日：2011-05-03
申请号：US12031474
申请日：2008-02-14
Applicant: Shinji Furukawa , Masahiro Shibamoto
Inventor： Shinji Furukawa , Masahiro Shibamoto
CPC classification number: C23C14/564 , C23C14/568 , C23C16/54
Abstract: The invention provides a multi-film forming apparatus including a substrate holder stock chamber for storing a plurality of substrate holders separately from a path in the multi-film forming apparatus, so that production can be performed without being affected by the process of removing a film accumulated on the surface of the substrate holder and the process of replacing the substrate holder, or by the process of removing a film accumulated on the surface of the substrate holder or the process of replacing the substrate holder, and hence high-throughput production is possible. A branch path is provided on the path of the multi-film forming apparatus, and a substrate holder stock chamber for storing a plurality of substrate holders which enables retrieval of the substrate holder from the path and feeding of the substrate holder to the path is provided.
Abstract translation: 本发明提供了一种多层膜形成装置，其包括：基板保持架储存室，用于与多膜成形装置中的路径分开地存储多个基板保持器，从而可以进行生产而不受去除膜的处理 积聚在基板保持器的表面上，更换基板保持器的过程，或者通过去除积聚在基板保持器的表面上的膜或者更换基板保持器的过程，因此可以进行高通量生产 。 在多层膜形成装置的路径上设置分支路径，并且设置用于存储多个基板保持件的基板保持架存放室，该基板保持器能够使基板保持器从路径中回收并且将基板保持器馈送到路径 。
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公开(公告)号：US07927466B2
公开(公告)日：2011-04-19
申请号：US11525368
申请日：2006-09-22
Applicant: Mihai Ganciu-Petcu , Michel Hecq , Jean-Pierre Dauchot , Stephanos Konstantinidis , Jean Bretagne , Ludovic De Poucques , Michel Touzeau
Inventor： Mihai Ganciu-Petcu , Michel Hecq , Jean-Pierre Dauchot , Stephanos Konstantinidis , Jean Bretagne , Ludovic De Poucques , Michel Touzeau
CPC classification number: C23C14/35 , C23C14/358 , H01J37/3405 , H01J37/3444
Abstract: The present invention relates to the deposition in a magnetron reactor (1) equipped with a magnetron cathode (MC) of at least one material on a substrate (11a), according to which process said material is vaporized by magnetron sputtering, using a gas that is ionized in pulsed mode. To this effect and in order to favour the formation of high current pulses of short duration while avoiding the formation of electric arcs and while enabling an effective ionisation of the sputtered vapour, a preionization of the said gas prior to the application of the main voltage pulse on the magnetron cathode (MC) is carried out in order to generate current pulses (CP) whose decay time (Td), after cut-off of the main voltage pulse (VP) is shorter than 5 μs.
Abstract translation: 本发明涉及在基板（11a）上配备有至少一种材料的磁控管阴极（MC）的磁控管反应器（1）中的沉积，根据该方法，所述材料通过磁控溅射蒸发，使用气体 以脉冲模式电离。 为此，为了有利于形成短持续时间的高电流脉冲，同时避免电弧的形成，并且同时能够有效地电离溅射的蒸汽，在施加主电压脉冲之前对所述气体进行预电离 执行磁控管阴极（MC），以产生在主电压脉冲（VP）截止后的衰减时间（Td）小于5μs的电流脉冲（CP）。
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公开(公告)号：US07871505B2
公开(公告)日：2011-01-18
申请号：US10507235
申请日：2002-12-19
Applicant: Fumiya Nemoto , Atsushi Inoue
Inventor： Fumiya Nemoto , Atsushi Inoue
CPC classification number: H01L21/67386 , H01L21/67724
Abstract: The present invention pertains to a sputtering target transport box having a void the size of a sputtering target, wherein supports for mechanical transport are provided to the bottom plate of the transport box, and a wheel for man-powered transport is provided to the edge portion of the bottom plate. Provided thereby is a sputtering target transport box in which the removal and transport of a sputtering target is easy, and which enables the transport of a sputtering target without causing any damage thereto.
Abstract translation: 本发明涉及具有溅射靶的尺寸的空隙的溅射靶输送箱，其中用于机械输送的支撑件设置在运输箱的底板上，并且用于人力运输的车轮设置在边缘部分 的底板。 由此，能够容易地进行溅射靶的除去和输送的溅射靶输送箱，能够不会对溅射靶进行损伤而进行输送。
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公开(公告)号：US07824528B2
公开(公告)日：2010-11-02
申请号：US11665563
申请日：2005-10-11
Applicant: Krist Dellaert , Wilmert De Bosscher , Joannes De Boever , Stijn Porteman
Inventor： Krist Dellaert , Wilmert De Bosscher , Joannes De Boever , Stijn Porteman
CPC classification number: H01J37/3435 , H01J37/3405
Abstract: An end-block for electrically energising a rotatable tubular target in a vacuum coating installation is disclosed. The end-block has a rotary electrical contact that reduces the joule heating effects when operating in alternating current mode. When compared to known end-blocks, this is achieved by increasing the number of contact areas between a contacting ring and a series of circumferentially mounted contacting shoes. Also the contact shoes are being pressed radially outwardly by means of resilient elements against the contacting ring.
Abstract translation: 公开了一种用于对真空涂覆装置中的可旋转管状靶进行电激励的端块。 端块具有旋转电接触，可在交流模式下工作时减少焦耳加热效应。 当与已知的端块相比时，这通过增加接触环和一系列周向安装的接触鞋之间的接触面积的数量来实现。 此外，接触鞋被抵靠接触环的弹性元件径向向外挤压。
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55.发明授权Polymer electrolyte, half-cell for electrochemical measurements, as well as the use thereof 有权聚合物电解质，用于电化学测量的半电池，以及其用途公开(公告)号：US07790323B2
公开(公告)日：2010-09-07
申请号：US11494452
申请日：2006-07-28
Applicant: Philippe Ehrismann , Wolfgang Haller
Inventor： Philippe Ehrismann , Wolfgang Haller
CPC classification number: G01N27/301
Abstract: A polymer electrolyte for an electrochemical half-cell, such as a reference half-cell, contains a polymer which can be produced by polymerization of N-acryloyl-amino-ethoxy-ethanol or by co-polymerization of N-acryloyl-amino-ethoxy-ethanol with at least one further monomer component.
Abstract translation: 用于电化学半电池的聚合物电解质，例如参考半电池，包含可以通过N-丙烯酰基 - 氨基 - 乙氧基 - 乙醇的聚合或通过N-丙烯酰基 - 氨基 - 乙氧基 乙醇与至少一种其它单体组分。
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Patent Agency Ranking
公开(公告)号：US07790004B2
公开(公告)日：2010-09-07
申请号：US11205513
申请日：2005-08-17
Applicant: Richard I. Seddon
Inventor： Richard I. Seddon
CPC classification number: C30B31/14 , C23C14/505 , C23C16/4584 , C30B25/12 , H01F7/0252 , H01F7/04 , H01J37/32715 , H01J37/34 , H01J37/3417 , H01L21/68764 , H01L21/68771 , H01L21/68785
Abstract: The invention relates to a partially disposable substrate holder used in magnetic latches for securing substrates on a planetary rotating platform suspended above a coating source in a vacuum chamber of a vapor deposition system, e.g. a chemical vapor deposition (CVD) system or a physical vapor deposition (PVD) system. The substrate holder includes a reusable base formed, at least partially, from a ferro-magnetic material, which is attracted to the magnetic latch, and a disposable cover formed from a relatively inexpensive, ferromagnetic, easily formable material, which encourages adherence of coating material and has a low vapor pressure at coating temperatures.
Abstract translation: 本发明涉及一种用于磁性闩锁的部分一次性基板支架，用于将基板固定在悬浮在气相沉积系统的真空室中的涂覆源上方的行星旋转平台上， 化学气相沉积（CVD）系统或物理气相沉积（PVD）系统。 衬底保持器包括至少部分地由吸引到磁性闩锁的铁磁性材料形成的可重复使用的底座以及由相对廉价的铁磁性易形成材料形成的一次性盖，其鼓励涂层材料的粘附 并且在涂覆温度下具有低蒸气压。
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公开(公告)号：US07674360B2
公开(公告)日：2010-03-09
申请号：US10942273
申请日：2004-09-16
Applicant: Ilyoung Richard Hong , Donny Young , Michael Rosenstein , Robert B. Lowrance , Daniel C. Lubben , Michael Andrew Miller , Peijun Ding , Sreekrishnan Sankaranarayan , Goichi Yoshidome
Inventor： Ilyoung Richard Hong , Donny Young , Michael Rosenstein , Robert B. Lowrance , Daniel C. Lubben , Michael Andrew Miller , Peijun Ding , Sreekrishnan Sankaranarayan , Goichi Yoshidome
CPC classification number: C23C14/3407 , C23C14/35 , C23C14/54 , H01J37/3408 , H01J37/3455
Abstract: A lift mechanism for and a corresponding use of a magnetron in a plasma sputter reactor. A magnetron rotating about the target axis is controllably lifted away from the back of the target to compensate for sputter erosion, thereby maintaining a constant magnetic field and resultant plasma density at the sputtered surface, which is particularly important for stable operation with a small magnetron, for example, one executing circular or planetary motion about the target axis. The lift mechanism can include a lead screw axially fixed to the magnetron support shaft and a lead nut engaged therewith to raise the magnetron as the lead nut is turned. Alternatively, the support shaft is axially fixed to a vertically moving slider. The amount of lift may be controlled according a recipe based on accumulated power applied to the target or by monitoring electrical characteristics of the target.
Abstract translation: 用于等离子体溅射反应器中的磁控管的升降机构和相应的使用。 围绕目标轴旋转的磁控管被可控地从目标的背面提升，以补偿溅射侵蚀，从而在溅射表面保持恒定的磁场和合成的等离子体密度，这对于使用小的磁控管的稳定操作特别重要， 例如，一个执行关于目标轴的圆形或行星运动。 升降机构可以包括轴向固定到磁控管支撑轴的导螺杆和与其接合的导螺母，以在导螺母转动时升高磁控管。 或者，支撑轴轴向固定到垂直移动的滑块。 可以根据基于施加到目标的累积功率的配方或通过监视目标的电气特性来控制升力量。
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58.发明授权公开(公告)号：US07638930B1
公开(公告)日：2009-12-29
申请号：US12362946
申请日：2009-01-30
Applicant: Yuji Kudoh
Inventor： Yuji Kudoh
CPC classification number: B81B3/0021 , F03G7/005 , Y10S310/80 , Y10T156/10
Abstract: To improve adhesive properties between an electrically conductive polymer membrane and a solid electrolyte membrane to each other, and thus to ensure the operation of an electrically conductive polymer actuator which effects a bending motion is aimed.The bendable electrically conductive polymer actuator of the present invention is an electrically conductive polymer actuator having a laminating structure of: a first organic polymer including at least one or more of a vinylidene fluoride/hexafluoropropylene copolymer, polyvinylidene fluoride, a perfluorosulfonic acid/polytetrafluoroethylene copolymer, polymethyl methacrylate, polyethylene oxide, and polyacrylonitrile; a solid electrolyte membrane including a mixture with an ionic liquid; and an electrically conductive polymer membrane including a mixture of polyethylenedioxythiophene and polystyrene sulfonic acid on at least one face of the solid electrolyte membrane, in which a second organic polymer including polyvinylphenol is embedded in the electrically conductive polymer membrane surface in the state being dispersed.
Abstract translation: 为了改善导电聚合物膜和固体电解质膜之间的粘合性，并且因此确保了实现弯曲运动的导电聚合物致动器的操作。 本发明的可弯曲导电聚合物致动器是具有以下层压结构的导电聚合物致动器：第一有机聚合物，其包含偏二氟乙烯/六氟丙烯共聚物，聚偏二氟乙烯，全氟磺酸/聚四氟乙烯共聚物中的至少一种或多种， 聚甲基丙烯酸甲酯，聚环氧乙烷和聚丙烯腈; 包括与离子液体的混合物的固体电解质膜; 以及在固体电解质膜的至少一个面上包含聚亚乙基二氧噻吩和聚苯乙烯磺酸的混合物的导电性聚合物膜，其中在分散状态下将包含聚乙烯基苯酚的第二有机聚合物嵌入导电聚合物膜表面。
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59.发明授权Method and device for manufacturing semiconductor or insulator-metallic laminar composite cluster 失效制造半导体或绝缘体金属层状复合簇的方法和装置公开(公告)号：US07638019B2
公开(公告)日：2009-12-29
申请号：US10505813
申请日：2003-01-27
Applicant: Takehiko Hihara , Kenji Sumiyama , Ryoji Katoh
Inventor： Takehiko Hihara , Kenji Sumiyama , Ryoji Katoh
CPC classification number: C23C14/3464 , C23C14/228 , C23C14/34 , C23C14/3428 , H01J37/34 , H01L51/0002 , H01L51/001
Abstract: A semiconductor or nonconductor vapor is generated by sputtering targets 11U, 11D in a first sputtering chamber 10, while a metal vapor is generated by sputtering targets 21U, 21D in a second sputtering chamber 20. The semiconductor or nonconductor vapor and the metal vapor are aggregated to clusters during travelling through a cluster-growing tube 32 and injected as a cluster beam to a high-vacuum deposition chamber 30, so as to deposit composite clusters on a substrate 35. The produced composite clusters are useful in various fields due to high performance, e.g. high-sensitivity sensors, high-density magnetic recording media, nano-magnetic media for transportation of medicine, catalysts, permselective membranes, optical-magnet sensors and low-loss soft magnetic materials.
Abstract translation: 通过在第一溅射室10中溅射靶11U，11D产生半导体或非导体蒸气，同时通过第二溅射室20中的溅射靶21U，21D产生金属蒸气。半导体或非导体蒸汽和金属蒸气聚集 在通过簇生长管32行进期间聚集并且作为簇束束注入到高真空沉积室30中，以便将复合簇沉积在基板35上。由于高性能，所产生的复合簇可用于各种领域 ，例如 高灵敏度传感器，高密度磁记录介质，药物输送用纳米磁性介质，催化剂，选择渗透膜，光磁传感器和低损耗软磁材料。
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60.发明申请ELECTRODE CARTRIDGE, HYDROGEN GENERATING APPARATUS AND FUEL CELL POWER GENERATION SYSTEM HAVING THE SAME 有权电极盒，氢发生装置和具有该电池的燃料电池发电系统公开(公告)号：US20090263692A1
公开(公告)日：2009-10-22
申请号：US12418195
申请日：2009-04-03
Applicant: Bo-Sung KU , Jae-Hyuk Jang , Kyoung-Soo Chae , Jae-Hyoung Gil , Chang-Ryul Jung
Inventor： Bo-Sung KU , Jae-Hyuk Jang , Kyoung-Soo Chae , Jae-Hyoung Gil , Chang-Ryul Jung
CPC classification number: C01B3/503 , C01B3/08 , C01B2203/066 , H01M8/04201 , H01M8/04776 , H01M8/0606 , Y02E60/36 , Y02P20/149
Abstract: An electrode cartridge, a hydrogen generating apparatus and a fuel cell power generation system equipped with the electrode cartridge and hydrogen generating apparatus are disclosed. The electrode cartridge can include an anode configured to generate electrons in an electrolyte solution, a cathode configured to generate hydrogen from the electrolyte solution by receiving the electrons at the anode, a liquid-gas separation membrane, which is disposed to surround the anode and the cathode, configured to separate the hydrogen from the electrolyte solution and discharge the hydrogen to the outside, and a support configured to support the liquid-gas separation membrane for preventing an expansion of the liquid-gas separation membrane. The electrode cartridge of the present invention can prevent an effect of electrolyte solution flowing backwards when generating hydrogen as well as an effect of electrolyte solution leak when moving.
Abstract translation: 公开了一种电极盒，氢生成装置和配备有电极盒和氢生成装置的燃料电池发电系统。 电极盒可以包括被配置为在电解质溶液中产生电子的阳极，被配置为通过在阳极处接收电子而从电解质溶液产生氢的阴极，设置成围绕阳极的液体 - 气体分离膜和 阴极，被配置为将氢与电解质溶液分离并将氢排出到外部;以及支撑件，其构造成支撑液体气体分离膜，以防止液体气体分离膜的膨胀。 本发明的电极盒可以防止当产生氢时电解液向后流动的效果以及移动时电解液泄漏的影响。
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