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    Methods for producing low stress porous low-k dielectric materials using precursors with organic functional groups
    44.
    发明授权
    Methods for producing low stress porous low-k dielectric materials using precursors with organic functional groups 失效
    使用有机官能团前体制备低应力多孔低介电材料的方法

    公开(公告)号：US07241704B1

    公开(公告)日：2007-07-10

    申请号：US10927777

    申请日：2004-08-27

    Applicant: Qingguo Wu ,  Haiying Fu ,  David C. Smith ,  David Mordo

    Inventor： Qingguo Wu ,  Haiying Fu ,  David C. Smith ,  David Mordo

    IPC: H01L21/31 ,  H01L21/469 ,  C23C16/40 ,  C23C16/56

    CPC classification number: C23C16/402 ,  C23C16/56 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02216 ,  H01L21/02274 ,  H01L21/02348 ,  H01L21/31695

    Abstract: Methods of preparing a low stress porous low-k dielectric material on a substrate are provided. The methods involve the use of a structure former precursor and/or porogen precursor with one or more organic functional groups. In some cases, the structure former precursor has carbon-carbon double or triple bonds. In other cases, one or both of the structure former precursor and porogen precursor has one or more bulky organic groups. In other cases, the structure former precursor has carbon-carbon double or triple bonds and one or both of the structure former precursor and porogen precursor has one or more bulky organic groups. Once the precursor film is formed, the porogen is removed, leaving a porous low-k dielectric matrix with high mechanical strength. Different types of structure former precursors and porogen precursors are described. The resulting low stress low-k porous film may be used as a low-k dielectric film in integrated circuit manufacturing applications.

    Abstract translation: 提供了在基片上制备低应力多孔低k介电材料的方法。 所述方法涉及使用具有一个或多个有机官能团的结构前体前体和/或致孔剂前体。 在一些情况下，结构前体具有碳 - 碳双键或三键。 在其他情况下，结构前体前体和致孔剂前体中的一种或两种具有一个或多个大体积的有机基团。 在其他情况下，结构前体具有碳 - 碳双键或三键，结构形成前体和致孔剂前体中的一种或两种具有一个或多个大体积的有机基团。 一旦形成前体膜，去除致孔剂，留下具有高机械强度的多孔低k电介质基质。 描述了不同类型的结构前体前体和致孔剂前体。 所得到的低应力低k多孔膜可用作集成电路制造应用中的低k电介质膜。

    Seat gantry
    45.
    发明授权
    Seat gantry 有权
    座椅龙门架

    公开(公告)号：US07226264B2

    公开(公告)日：2007-06-05

    申请号：US10654141

    申请日：2003-09-03

    Applicant: N. Charles Eggleston ,  Karl J. Schaefer ,  David C. Smith

    Inventor： N. Charles Eggleston ,  Karl J. Schaefer ,  David C. Smith

    IPC: B65G67/02

    CPC classification number: B62B3/0637 ,  B62B3/002 ,  B62B3/02 ,  B62B3/12 ,  B62B5/0076 ,  B62B5/0093 ,  B62B5/02 ,  B62B2202/32 ,  B62B2205/006 ,  B64F5/50 ,  B66C19/02

    Abstract: A seat gantry system and method are provided for handling, installing, and removing heavy seat assemblies, and the components thereof prevent manual lifting of a heavy seat assembly during installation. A seat gantry system or method may include an outside seat gantry, a seat cart, an inside seat gantry, and an artificial lifting torso. An outside seat gantry is used for lifting a seat assembly off a shipping platform, moving and positioning a seat assembly over a seat cart, and lowering the seat assembly onto the seat cart. A seat cart is used for transporting a seat assembly. An inside seat gantry is used for lifting a seat assembly from a seat cart and positioning and lowering the seat assembly for installation. An artificial lifting torso is used to provide a common lifting point at a balanced fore-aft center of gravity of a seat assembly.

    Abstract translation: 提供了一种用于处理，安装和拆卸重型座椅组件的座椅台架系统和方法，并且其组件防止在安装期间手动提升重型座椅组件。 座椅台架系统或方法可以包括外座椅机架，座椅推车，内座椅架和人造举升躯干。 外部座椅台架用于将座椅组件从运输平台上提升，将座椅组件移动和定位在座椅推车上，并将座椅组件降低到座椅推车上。 座椅推车用于运输座椅组件。 内座椅龙门架用于从座椅推车提升座椅组件并定位和降低座椅组件以进行安装。 人造提升躯干用于在座椅组件的平衡的前后重心处提供共同的提升点。

    Construction of a film on a semiconductor wafer
    47.
    发明授权
    Construction of a film on a semiconductor wafer 失效
    在半导体晶片上构造膜

    公开(公告)号：US06251758B1

    公开(公告)日：2001-06-26

    申请号：US08810221

    申请日：1997-02-28

    Applicant: Chyi Chern ,  Michal Danek ,  Marvin Liao ,  Roderick C. Mosely ,  Karl Littau ,  Ivo Raaijmakers ,  David C. Smith

    Inventor： Chyi Chern ,  Michal Danek ,  Marvin Liao ,  Roderick C. Mosely ,  Karl Littau ,  Ivo Raaijmakers ,  David C. Smith

    IPC: H01L2128

    CPC classification number: H01L21/76864 ,  C23C16/34 ,  C23C16/45565 ,  C23C16/4581 ,  C23C16/4586 ,  C23C16/481 ,  C23C16/5096 ,  C23C16/56 ,  H01J37/32174 ,  H01J2237/2001 ,  H01J2237/336 ,  H01L21/28512 ,  H01L21/76843 ,  H01L21/76856 ,  H01L21/76862

    Abstract: The construction of a film on a wafer, which is placed in a processing chamber, may be carried out through the following steps. A layer of material is deposited on the wafer. Next, the layer of material is annealed. Once the annealing is completed, the material may be oxidized. Alternatively, the material may be exposed to a silicon gas once the annealing is completed. The deposition, annealing, and either oxidation or silicon gas exposure may all be carried out in the same chamber, without need for removing the wafer from the chamber until all three steps are completed. A semiconductor wafer processing chamber for carrying out such an in-situ construction may include a processing chamber, a showerhead, a wafer support and a rf signal means. The showerhead supplies gases into the processing chamber, while the wafer support supports a wafer in the processing chamber. The rf signal means is coupled to the showerhead and the wafer support for providing a first rf signal to the showerhead and a second rf signal to the wafer support.

    Abstract translation: 放置在处理室中的晶片上的膜的构造可以通过以下步骤进行。 在晶片上沉积一层材料。 接下来，将材料层退火。 一旦退火完成，材料可能被氧化。 或者，一旦退火完成，材料可能暴露于硅气体。 沉积，退火和氧化或硅气体暴露都可以在相同的室中进行，而不需要从腔室中移除晶片，直到完成所有三个步骤。 用于进行这种原位结构的半导体晶片处理室可以包括处理室，喷头，晶片支架和射频信号装置。 淋浴头将气体供应到处理室中，而晶片支撑件在处理室中支撑晶片。 rf信号装置耦合到喷头和晶片支架，用于向喷头提供第一rf信号，并将第二rf信号耦合到晶片支架。

    Multi-type subroutines for graphical rewrite rules
    48.
    发明授权
    Multi-type subroutines for graphical rewrite rules 失效
    用于图形重写规则的多类型子程序

    公开(公告)号：US5678013A

    公开(公告)日：1997-10-14

    申请号：US377914

    申请日：1995-01-25

    Applicant: David C. Smith ,  G. Allen Cypher

    Inventor： David C. Smith ,  G. Allen Cypher

    IPC: G06F9/44 ,  G06F3/00

    CPC classification number: G06F8/30 ,  G06F9/455

    Abstract: A method and apparatus for constructing subroutines to define the behavior of simulation objects is provided. The apparatus includes a display, a processor, and an input device. The processor generates on the display a GRR set region associated with a simulation object. A user operates the input device to place visual representations of rules and/or subroutines within the GRR set region. When a visual representation of a rule or subroutine is placed within a GRR set, computer step sequences that implement the behavior specified for the rule or subroutine are generated for the simulation object. A user may operate the input device to activate a control on a visual subroutine indicator to cause a subroutine region to appear. When a visual representation of a rule or subroutine is placed within a subroutine region, the behavior specified for the rule or subroutine is incorporated into the subroutine associated with the subroutine region. Different types of subroutines are provided, where the type of a subroutine determines how the rules within the subroutine are processed during a simulation. Pretests may be specified for subroutines so that the behavior represented by the rules within the subroutine will not be exhibited unless the current state of the simulation satisfies the conditions of the pretest. During the performance of a simulation, the processor displays images associated with simulation objects on the display. The processor causes the images to behave according to the generalized computer step sequences that have been generated based upon the rules and/or subroutines represented in the GRR set regions for the respective objects.

    Abstract translation: 提供了一种用于构建子程序来定义仿真对象的行为的方法和装置。 该装置包括显示器，处理器和输入装置。 处理器在显示器上生成与仿真对象相关联的GRR集合区域。 用户操作输入设备以将规则和/或子程序的视觉表示放置在GRR设置区域内。 当规则或子程序的视觉表示放置在GRR集合中时，为仿真对象生成实现为规则或子例程指定的行为的计算机步骤序列。 用户可以操作输入设备来激活视觉子程序指示器上的控制以使子程序区域出现。 当一个规则或子程序的视觉表示被放置在子程序区域内时，为规则或子程序指定的行为被并入与子程序区域关联的子程序中。 提供了不同类型的子程序，其中子程序的类型确定在仿真期间如何处理子程序中的规则。 可以为子程序指定预测，以便除非模拟的当前状态满足预测试的条件，否则子程序中由规则表示的行为将不会被显示。 在执行仿真期间，处理器显示与显示器上的仿真对象相关联的图像。 处理器使得图像根据基于在各个对象的GRR集合区域中表示的规则和/或子例程而生成的广义计算机步骤序列来表现。

    Extensible simulation system and graphical programming method
    49.
    发明授权
    Extensible simulation system and graphical programming method 失效
    可扩展模拟系统和图形编程方法

    公开(公告)号：US5566295A

    公开(公告)日：1996-10-15

    申请号：US187682

    申请日：1994-01-25

    Applicant: Allen Cypher ,  David C. Smith ,  James C. Spohrer

    Inventor： Allen Cypher ,  David C. Smith ,  James C. Spohrer

    IPC: G06F9/44 ,  G06F17/50 ,  G06F3/00

    CPC classification number: G06F8/34 ,  G06F17/5009

    Abstract: An extensible simulation system and graphical programming method enable a simulation user to program the behaviors of objects in a simulation while requiring no knowledge of computer programming concepts or languages. The simulation user defines each object's behaviors by creating Graphical Rewrite Rules through programming by demonstration. The user can selectively abstract a given Graphical Rewrite Rule (GRR) such that it applies to states within the simulation according to hierarchical object types and object property conditions. The extensible simulation system comprises a Central Processing Unit (CPU), an input device, an output device, an external storage device, predetermined amounts of Random Access Memory (RAM) and Read-Only Memory (ROM), and an extensible simulator. The extensible simulator comprises an object source, a simulation viewer, a GRR editor, an action recorder, an abstractor, a drawing editor, an object property editor, an object rule viewer, a subroutine editor, and a simulation execution controller. Each element of the system has an input and an output coupled to a common system bus. Preferably, each element of the extensible simulator is a computer program step sequence stored in RAM. The graphical programming method comprises the steps of: selecting an object for which a GRR is to be defined; establishing a simulation context corresponding to the GRR; defining for the GRR a set of actions to be performed by or upon one or more objects within the simulation context, each action defined through programming by demonstration; automatically recording a computer program step sequence for each action defined; and allowing the GRR to be abstracted.

    Abstract translation: 可扩展的仿真系统和图形编程方法使仿真用户可以在不需要计算机编程概念或语言知识的情况下对仿真中的对象行为进行编程。 模拟用户通过演示编程创建图形重写规则来定义每个对象的行为。 用户可以选择性地抽取给定的图形重写规则（GRR），使其适用于根据分层对象类型和对象属性条件的模拟中的状态。 可扩展模拟系统包括中央处理单元（CPU），输入设备，输出设备，外部存储设备，预定量的随机存取存储器（RAM）和只读存储器（ROM）以及可扩展模拟器。 可扩展模拟器包括对象源，模拟查看器，GRR编辑器，动作记录器，抽象器，绘图编辑器，对象属性编辑器，对象规则查看器，子程序编辑器和仿真执行控制器。 系统的每个元件都具有耦合到公共系统总线的输入和输出。 优选地，可扩展模拟器的每个元件是存储在RAM中的计算机程序步骤序列。 图形编程方法包括以下步骤：选择要定义GRR的对象; 建立与GRR相对应的模拟上下文; 为GRR定义要由模拟上下文中的一个或多个对象执行的一组动作，每个动作通过演示进行编程; 为定义的每个动作自动记录计算机程序步骤顺序; 并允许GRR被抽象出来。

    Telemetry power carrier pulse encoder
    50.
    发明授权
    Telemetry power carrier pulse encoder 失效
    遥测功率载波脉冲编码器

    公开(公告)号：US5144299A

    公开(公告)日：1992-09-01

    申请号：US530015

    申请日：1990-05-29

    Applicant: David C. Smith

    Inventor： David C. Smith

    IPC: G08C17/04 ,  G08C19/16

    CPC classification number: G08C17/04 ,  G08C19/16

    Abstract: A telemetry system for use in controlling the operation of sensors configured on a rotating blade of a gas turbine engine includes an oscillator for generating a power carrier signal. A mechanism is included for providing command signals that select a mode of operation of the sensors and a telemetry encoder apparatus is used to generate encoder signals for modulating the power carrier signal in accordance with the selected mode of sensor operation. Also included in the present telemetry system is a programmable switch receiving the power carrier signal for modulating the power carrier signal amplitude in accordance with the encoder signals. A resistor shunts the programmable switching mechanism, and a coil transmits the modulated power carrier signal to a transceiver positioned on the turbine blade providing control signals to the sensor and transmitting sensor information to a receiver coil off of the turbine blade.

    Abstract translation: 用于控制构造在燃气涡轮发动机的旋转叶片上的传感器的操作的遥测系统包括用于产生动力载体信号的振荡器。 包括用于提供选择传感器的操作模式的命令信号的机构，并且遥测编码器装置用于根据选择的传感器操作模式产生用于调制功率载波信号的编码器信号。 本遥测系统还包括一个可编程开关，接收载波信号，用于根据编码器信号调制功率载波信号幅度。 电阻分流可编程切换机构，线圈将调制的载波信号传输到位于涡轮机叶片上的收发器，向传感器提供控制信号，并将传感器信息传输到离开涡轮叶片的接收器线圈。

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