公开(公告)号：US20070024528A1

公开(公告)日：2007-02-01

申请号：US11298590

申请日：2005-12-12

申请人： Atsushi Kobaru ,  Hidetoshi Morokuma ,  Hiroki Kawada ,  Sho Takami ,  Katsuhiro Sasada ,  Kouichi Yamamoto ,  Norio Satou ,  Kunio Nakanishi

发明人： Atsushi Kobaru ,  Hidetoshi Morokuma ,  Hiroki Kawada ,  Sho Takami ,  Katsuhiro Sasada ,  Kouichi Yamamoto ,  Norio Satou ,  Kunio Nakanishi

IPC分类号： G09G3/00

CPC分类号： H01J37/265 ,  H01J37/28 ,  H01J2237/1536 ,  H01J2237/31749

摘要： An image forming method and a charged particle beam apparatus suitable for suppressing the inclination of charging when scanning a two-dimensional area with a charged particle beam. A third scanning line located between a first scanning line and a second scanning line is scanned. After the first, second and third scanning lines have been scanned, a plurality of scanning lines are scanned between the first and third scanning lines and between the second and third scanning lines.

摘要翻译： 一种适于在用带电粒子束扫描二维区域时抑制充电倾斜的图像形成方法和带电粒子束装置。 扫描位于第一扫描线和第二扫描线之间的第三扫描线。 在扫描第一，第二和第三扫描线之后，在第一扫描线和第三扫描线之间以及第二和第三扫描线之间扫描多条扫描线。