Method and apparatus for measuring deviation between patterns on a
semiconductor wafer
    41.
    发明授权
    Method and apparatus for measuring deviation between patterns on a semiconductor wafer 失效
    用于测量半导体晶片上的图案之间的偏差的方法和装置

    公开(公告)号:US5313272A

    公开(公告)日:1994-05-17

    申请号:US923500

    申请日:1992-08-03

    CPC分类号: G03F7/70633

    摘要: A method and apparatus for measuring the deviation between elements on an object includes the steps of and devices for performing the steps of forming at least a first physicooptical element on the object: forming at least a second physicooptical element on the object, the first and second physicooptical elements having lens functions; projecting light beams onto the first and second physicooptical elements on the object and detecting the incident positions of light beams travelling from the first and second physicooptical elements, having been subjected to the lens functions of the first and second physicooptical elements, on a predetermined surface; and detecting the deviation between the first and second physicooptical elements on the object from the relationship between the detected incident positions of the light beams.

    摘要翻译: 用于测量物体上的元件之间的偏差的方法和装置包括以下步骤和用于执行在物体上形成至少第一物理光学元件的步骤的装置:在物体上形成至少第二物理元件,第一和第二 具有透镜功能的物理光学元件; 将光束投影到物体上的第一和第二物理光学元件上,并且检测从已经经受第一和第二物理光学元件的透镜功能的第一和第二物理光学元件行进的光束的入射位置在预定表面上; 以及根据检测到的光束的入射位置之间的关系来检测物体上的第一和第二物理光学元件之间的偏差。

    Calibration apparatus, calibration method, and manufacturing method for an electronic device
    43.
    发明授权
    Calibration apparatus, calibration method, and manufacturing method for an electronic device 有权
    电子设备的校准装置,校准方法和制造方法

    公开(公告)号:US09476709B2

    公开(公告)日:2016-10-25

    申请号:US13291217

    申请日:2011-11-08

    CPC分类号: G01C19/00 G01C25/00 G01P21/00

    摘要: Provided is a calibration apparatus, including: a holder for fixing an electronic device; a first motor for rotating the holder with a first rotation axis as a center; a second motor for rotating the holder with a second rotation axis perpendicular to the first rotation axis as a center; and a stopper for restricting a rotational position of the holder about the second rotation axis to a range between a reference position and a perpendicular position reached by rotating the holder by 90 degrees from the reference position, in which the first motor rotates the holder to which the electronic device is fixed at a predetermined speed in each of states in which the rotational position of the holder about the second rotation axis falls in the reference position and in which the rotational position of the holder about the second rotation axis falls in the perpendicular position.

    摘要翻译: 提供了一种校准装置,包括:用于固定电子装置的保持器; 用于以第一旋转轴线为中心旋转所述保持器的第一电动机; 用于以与所述第一旋转轴线垂直的第二旋转轴线为中心转动所述保持器的第二电动机; 以及用于通过使所述保持器从所述基准位置旋转90度而将所述保持器围绕所述第二旋转轴线的旋转位置限制在参考位置与垂直位置之间的范围内的止动器,其中,所述第一电动机将保持器旋转到 在保持器围绕第二旋转轴线的旋转位置落在基准位置的状态下,电子设备以预定速度固定,并且保持器围绕第二旋转轴线的旋转位置落在垂直位置 。

    Gallium nitride based compound semiconductor light-emitting device and method for manufacturing same
    46.
    发明授权
    Gallium nitride based compound semiconductor light-emitting device and method for manufacturing same 有权
    氮化镓系化合物半导体发光元件及其制造方法

    公开(公告)号:US08026118B2

    公开(公告)日:2011-09-27

    申请号:US12096827

    申请日:2006-12-12

    IPC分类号: H01L21/3065

    摘要: The present invention provides a gallium nitride based compound semiconductor light-emitting device having high light emission efficiency and a method of manufacturing the same. The gallium nitride based compound semiconductor light-emitting device includes: a substrate 11; an n-type semiconductor layer 13, a light-emitting layer 14, and a p-type semiconductor layer 15 that are composed of gallium nitride based compound semiconductors and formed on the substrate 11 in this order; a transparent positive electrode 16 that is formed on the p-type semiconductor layer 15; a positive electrode bonding pad 17 that is formed on the transparent positive electrode 16; a negative electrode bonding pad 18 that is formed on the n-type semiconductor layer 13; and an uneven surface that has random convex portions formed thereon and is provided on at least a portion of the surface 16a of the transparent positive electrode 16.

    摘要翻译: 本发明提供一种发光效率高的氮化镓系化合物半导体发光元件及其制造方法。 氮化镓系化合物半导体发光元件具备:基板11; 由氮化镓系化合物半导体构成的n型半导体层13,发光层14,p型半导体层15,依次形成在基板11上。 在p型半导体层15上形成的透明正极16; 形成在透明正极16上的正极焊盘17; 形成在n型半导体层13上的负极焊盘18; 以及形成在其上的无规凸部并且设置在透明正极16的表面16a的至少一部分上的不平坦表面。

    Gallium nitride-based compound semiconductor light-emitting device and production method thereof
    47.
    发明授权
    Gallium nitride-based compound semiconductor light-emitting device and production method thereof 有权
    氮化镓系化合物半导体发光元件及其制造方法

    公开(公告)号:US07875474B2

    公开(公告)日:2011-01-25

    申请号:US12065564

    申请日:2006-09-05

    IPC分类号: H01L21/00

    摘要: The invention provides a gallium nitride based compound semiconductor light emitting device with excellent light extracting efficiency and its production method. A light emitting device, obtained from a gallium nitride based compound semiconductor, includes a substrate; a n-type semiconductor layer 13, a light emitting layer 14, and a p-type semiconductor layer 15, sequentially stacked on a substrate 11; a light-permeable positive electrode 16 stacked on the p-type semiconductor layer 15; a positive electrode bonding pad 17 provided on the light-permeable positive electrode 16; and a negative electrode bonding pad provided 18 on the n-type semiconductor layer 13, wherein a disordered uneven surface formed at least on a part of the surface 15a of the p-type semiconductor layer 15.

    摘要翻译: 本发明提供了一种具有优异的光提取效率的氮化镓基化合物半导体发光器件及其制造方法。 从氮化镓系化合物半导体获得的发光元件包括:基板; 依次层叠在基板11上的n型半导体层13,发光层14和p型半导体层15, 层叠在p型半导体层15上的透光性正极16; 设置在透光正极16上的正极焊盘17; 以及在n型半导体层13上设置的负极接合焊盘18,其中至少形成在p型半导体层15的表面15a的一部分上的无序的不平坦表面。

    Magnetic Recording Medium, Production Method Thereof, and Magnetic Recording and Reproducing Apparatus
    49.
    发明申请
    Magnetic Recording Medium, Production Method Thereof, and Magnetic Recording and Reproducing Apparatus 审中-公开
    磁记录介质,其制作方法及磁记录再生装置

    公开(公告)号:US20080193800A1

    公开(公告)日:2008-08-14

    申请号:US11884652

    申请日:2005-10-27

    IPC分类号: G11B5/66

    CPC分类号: G11B5/7325 G11B5/656 G11B5/66

    摘要: In a magnetic recording medium which is able to cope with a higher recording density, there is provided a magnetic recording medium which has a higher coercive force and a lower noise, a production method thereof, and a magnetic recording and reproducing apparatus. The magnetic recording medium is characterized in that at least a nonmagnetic undercoat layer, a nonmagnetic intermediate layer, a magnetic layer, and a protective layer are laminated in this order on a nonmagnetic substrate, and at least one of the layers of the nonmagnetic undercoat layer is constituted by a WV type multicomponent body-centered cubic crystal alloy.

    摘要翻译: 在能够应付较高记录密度的磁记录介质中,提供了具有较高矫顽力和较低噪声的磁记录介质,其制备方法和磁记录和再现装置。 磁记录介质的特征在于至少在非磁性基板上层叠至少非磁性底涂层,非磁性中间层,磁性层和保护层,并且至少一层非磁性底涂层 由WV型多组分体心立方晶体合金构成。

    MAGNETIC RECORDING MEDIUM, PRODUCTION PROCESS THEREFOR, AND MAGNETIC RECORDING AND REPRODUCING APPARATUS
    50.
    发明申请
    MAGNETIC RECORDING MEDIUM, PRODUCTION PROCESS THEREFOR, AND MAGNETIC RECORDING AND REPRODUCING APPARATUS 审中-公开
    磁记录介质,其生产过程及磁记录和再现设备

    公开(公告)号:US20060204792A1

    公开(公告)日:2006-09-14

    申请号:US10550273

    申请日:2004-04-06

    申请人: Hiroshi Osawa

    发明人: Hiroshi Osawa

    IPC分类号: G11B5/66

    CPC分类号: G11B5/66 G11B5/65 G11B5/7325

    摘要: An object of the present invention is to provide a magnetic recording medium which can reduce media noise. The present invention provides a magnetic recording medium comprising at least a non-magnetic undercoat layer, a first magnetic layer, a non-magnetic coupling layer, a second magnetic layer, and a protective layer, in this order, on a non-magnetic substrate, wherein the second magnetic layer is anti-ferromagnetically coupled with the first magnetic layer, and the first magnetic layer is made of a CoCrZr alloy.

    摘要翻译: 本发明的目的是提供一种可以降低媒体噪声的磁记录介质。 本发明提供一种在非磁性基板上依次包含至少非磁性底涂层,第一磁性层,非磁性耦合层,第二磁性层和保护层的磁记录介质 ,其中所述第二磁性层与所述第一磁性层反铁磁耦合,并且所述第一磁性层由CoCrZr合金制成。