公开(公告)号：US06510752B1

公开(公告)日：2003-01-28

申请号：US09426349

申请日：1999-10-25

申请人： Alexei H. Sacks ,  James H. McGlennen ,  Albert van der Schans

发明人： Alexei H. Sacks ,  James H. McGlennen ,  Albert van der Schans

IPC分类号： G01N1900

CPC分类号： G11B5/5552

摘要： A method and apparatus are provided for testing a microactuator that forms part of a suspension assembly in a disc drive. The method and apparatus test the microactuator before placing the suspension assembly in a disc drive. In the invention, the head is positioned over a track on a disc based in part on servo information read from the disc. At least one input signal is then applied to at last one microactuator on the suspension assembly. Servo information is then read from the disc to determine a change in the position of the head. By comparing the change in the position of the head to the input signal applied to the microactuator, a performance characteristic of a microactuator can be determined.

摘要翻译： 提供了一种用于测试形成盘驱动器中的悬挂组件的一部分的微致动器的方法和装置。 该方法和装置在将悬架组件放置在盘驱动器中之前测试微型致动器。 在本发明中，头部部分地基于从盘读取的伺服信息，将磁头定位在盘上的轨道上。 然后至少一个输入信号施加到悬架组件上的最后一个微致动器。 然后从盘读取伺服信息以确定头部位置的变化。 通过比较头部的位置与施加到微致动器的输入信号的变化，可以确定微致动器的性能特性。

公开(公告)号：US06450049B1

公开(公告)日：2002-09-17

申请号：US09821866

申请日：2001-03-30

申请人： Ismail Menguc

发明人： Ismail Menguc

IPC分类号： G01N1900

CPC分类号： G01M13/005 ,  G01N3/56

摘要： A window seal testing machine for seals of the type used in powered automotive windows, the testing machine comprising an adjustable frame simulating a portion of a powered automotive window, the frame being adapted to receive one or more sets of window seals and a piece of window glass therein to simulate the sealing relationship between the seals and window glass in an actual automotive window. The testing machine further includes a drive mechanism for repetitively cycling the window glass through the frame and seals to simulate actual window operation over hundreds or thousands of cycles. The entire machine is preferably self-contained and portable, and the frame is further adjustable to be adapted to test different sets of seals and types of window glass.

摘要翻译： 一种用于动力汽车窗用类型的密封件的密封盖测试机，所述试验机包括模拟动力汽车窗的一部分的可调节框架，所述框架适于容纳一组或多组窗口密封件和一片窗户 玻璃，以模拟实际的汽车窗口中的密封件和窗玻璃之间的密封关系。 测试机还包括驱动机构，用于通过框架重复地使窗玻璃循环并密封以模拟数百或数千个循环的实际窗口操作。 整个机器优选地是独立的和便携式的，并且框架进一步可调节以适于测试不同组的密封件和类型的窗玻璃。

公开(公告)号：US06401554B1

公开(公告)日：2002-06-11

申请号：US09869536

申请日：2001-06-29

申请人： Kunihiko Mori ,  Taizo Ishikura

发明人： Kunihiko Mori ,  Taizo Ishikura

IPC分类号： G01N1900

CPC分类号： H01L21/67288 ,  H01L21/68 ,  H01L21/681

摘要： An inspection apparatus for inspecting the soundness of a substrate transfer robot of a type horizontally transferring a substrate such as a semiconductor wafer mounted on a blade. The inspection apparatus is efficiently used in a multi-chamber type semiconductor manufacturing apparatus and has a noncontact type distance sensor capable of measuring a vertical distance. When the upper face of a cassette stage disposed within a load-lock chamber is assumed to be a reference surface, the distance sensor in the inspection apparatus measures the vertical distance between the horizontal reference surface and the blade of robot moving above the reference surface. From thus measured value, the warp of blade and its shaking upon movement can be detected.

摘要翻译： 一种用于检查水平传送诸如安装在刀片上的半导体晶片的衬底的类型的衬底传送机器人的良好性的检查装置。 检查装置有效地用于多室型半导体制造装置中，并具有能够测量垂直距离的非接触型距离传感器。 当设置在装载锁定室内的盒式台的上表面被认为是基准面时，检查装置中的距离传感器测量在基准面上方的水平参考面和机器人的叶片之间的垂直距离。 从这样测量的值，可以检测到叶片的翘曲及其在移动时的振动。

公开(公告)号：US06336371B1

公开(公告)日：2002-01-08

申请号：US09196093

申请日：1998-11-19

申请人： Michael E. O'Boyle

发明人： Michael E. O'Boyle

IPC分类号： G01N1900

CPC分类号： B60R21/015 ,  B60R21/01516 ,  B60R21/0155 ,  B60R21/01556 ,  B60R22/18 ,  B60R2021/01317 ,  G01G19/4142 ,  G01L1/125 ,  G01L5/103 ,  G01L5/108

摘要： A Villari effect seatbelt tension sensor 10 comprises a sensor housing 50 having a plunger chamber 52 and a tongue head flange chamber 54 therein. The two chambers 52 and 54 are separated by a radial flange 58 extending therebetween defining a passage connecting the chambers. A Villari effect sensor 12 is disposed axially within the sensor housing 50 and is secured on one end 16 to a plunger 40 disposed within the plunger chamber 52 and secured on the opposite end 14 to a tongue head flange 20 disposed within the tongue head flange chamber 54. A tongue 24 connected by a shaft 28 to the tongue head flange 20 has a slot 26 therein for securing a seatbelt 80 thereto.

摘要翻译： 维拉里效应安全带张力传感器10包括在其中具有柱塞室52和舌头凸缘室54的传感器壳体50。 两个腔室52和54由在其间延伸的径向凸缘58分开，限定连接腔室的通道。 维拉里效应传感器12轴向地设置在传感器壳体50内，并且被固定在一端16上，被安置在柱塞室52内的柱塞40上，并固定在相对的端部14上，并配置在舌头凸缘20内 通过轴28连接到舌头凸缘20的舌部24在其中具有狭槽26，用于将安全带80固定到其上。

公开(公告)号：US06298737B1

公开(公告)日：2001-10-09

申请号：US08654708

申请日：1996-05-29

申请人： Robert J. Nelson

发明人： Robert J. Nelson

IPC分类号： G01N1900

CPC分类号： H01L21/67242

摘要： The present invention concerns a testing object for use in the testing of a wafer clamp. Wafer clamps are used to hold wafers in position on etchers. If the wafer clamp is worn, the process yield drops due to the heating of the wafer and subsequent photoresist melting. The testing object passes wafer clamps having a sufficient wafer overlap distance, but fails wafer clamps without a sufficient wafer overlap distance.

摘要翻译： 本发明涉及用于测试晶片夹具的测试对象。 晶圆钳用于将晶圆固定在蚀刻器上。 如果晶片夹具磨损，由于晶片的加热和随后的光致抗蚀剂熔化，工艺产量下降。 测试对象通过具有足够的晶片重叠距离的晶片夹具，但是在没有足够的晶片重叠距离的情况下，晶片夹具失效。

公开(公告)号：US06253630B1

公开(公告)日：2001-07-03

申请号：US09291357

申请日：1999-04-14

申请人： Berthold Häcker

发明人： Berthold Häcker

IPC分类号： G01N1900

CPC分类号： B62D15/02 ,  G01B7/30 ,  G01D5/1655

摘要： A device is provided to detect the rotational position of a steering wheel. A rotating steering shaft connected to the steering wheel is coaxial with respect to a non-rotating steering column. On one surface of the steering column facing the steering shaft, there is an electrical resistance sheet that extends in the peripheral direction of the steering column. Fastened to the steering shaft are at least two wipers associated with the resistance sheet, such that at all times at least one wiper is in contact with the resistance sheet in a position defined by the rotational position of the steering shaft. Preferably, there are exactly three wipers that correspond to the same resistance sheet that are offset from one another by about 120 degrees.

摘要翻译： 设置有用于检测方向盘的旋转位置的装置。 连接到方向盘的旋转转向轴相对于不旋转的转向柱是同轴的。 在转向柱的面向转向轴的一个表面上，有一个沿转向柱周向延伸的电阻片。 固定在转向轴上的是至少两个与电阻板相关联的擦拭器，使得至少一个擦拭器在转向轴的旋转位置限定的位置中始终与电阻片接触。 优选地，恰好有三个擦拭器对应于相互抵消约120度的相同电阻纸。

公开(公告)号：US06752031B2

公开(公告)日：2004-06-22

申请号：US09870464

申请日：2001-06-01

申请人： Yoshiaki Akamatsu ,  Makoto Fujishima

发明人： Yoshiaki Akamatsu ,  Makoto Fujishima

IPC分类号： G01N1900

CPC分类号： B23Q17/22 ,  G05B19/4065 ,  G05B2219/37242 ,  G05B2219/37374 ,  G05B2219/49177

摘要： The present invention provides an NC machine tool which permits a check for the run-out of a spindle thereof at any time. The NC machine tool includes deflection detecting means (22) provided on a base within a machining area, and run-out diagnosing means (8) for conducting a diagnosis on the run-out of the spindle by calculating the amount of the run-out of the spindle on the basis of a deflection detected by the deflection detecting means (22) and comparing the calculated run-out amount with a predetermined tolerance. A test tool is attached to the spindle and rotated about an axis thereof, and the deflection of an outer circumferential surface of the test tool is detected by the deflection detecting means (22). On the basis of the deflection thus detected, the run-out diagnosing means (8) conducts a diagnosis on the run-out of the spindle. The diagnosis on the run-out of the spindle can be achieved through a simple and easy operation by moving the test tool into a detection area of the deflection detecting means (22).

摘要翻译： 本发明提供一种NC机床，其可以随时检查其主轴的跳动。 数控机床包括设置在加工区域内的基座上的偏转检测装置（22），以及用于通过计算出流出量来进行主轴停止的诊断的断路诊断装置（8） 基于由偏转检测装置（22）检测到的偏转，并将计算的流出量与预定公差进行比较。 测试工具附接到主轴并围绕其轴线旋转，并且由偏转检测装置（22）检测测试工具的外周表面的偏转。 根据检测到的挠曲，跳动诊断装置（8）对主轴的跳动进行诊断。 通过将测试工具移动到偏转检测装置（22）的检测区域中，可以通过简单且容易的操作来实现主轴跳动的诊断。

公开(公告)号：US06532825B1

公开(公告)日：2003-03-18

申请号：US09581323

申请日：2000-07-24

申请人： Makoto Abe

发明人： Makoto Abe

IPC分类号： G01N1900

CPC分类号： G01M5/0033 ,  G01M5/0075 ,  G01N2203/0073 ,  G01N2203/0664

摘要： Focusing on the application of a predetermined relationship between the length of a fatigue damage detection sensor having a width of a specified shape and a required sensitivity or sensing accuracy (crack propagation rate), the present invention provides a fatigue damage detection sensor for structural materials and mounting method thereof, wherein when the length between a pair of fixing portions for fixing to a surface of a structural material M, both ends of a sensor body (2) sandwiching a notched portion (5) is defined as 2H, the length of a crack C that can propagate from a tip (5A) of the notched portion (5) is defined as (a), the number of times that a working load acts on the material is defined as N, and the crack propagation rate is defined as da/dN, the length 2H between said fixing portions is set so as to obtain a required sensitivity with which da/dN is proportional to H0.5m (m is a constant determined by a material). According to this fatigue damage detection sensor for structural materials and mounting method thereof, the sensor can provide a high sensing performance to stably and reliably determine the level of fatigue damage caused to a structural material, based on the rate and amount of crack propagation.

摘要翻译： 针对具有规定形状的宽度的疲劳损伤检测传感器的长度与所需的灵敏度或感测精度（裂纹扩展率）之间的预定关系的应用，本发明提供了一种用于结构材料的疲劳损伤检测传感器， 其特征在于，在固定在结构材料M的表面上的一对固定部之间的长度的情况下，夹着切口部（5）的传感器体（2）的两端的长度定义为2H， 可以从切口部（5）的尖端（5A）传播的裂纹C定义为（a），工作载荷作用在材料上的次数定义为N，裂纹扩展速度定义为 da / dN，所述固定部分之间的长度2H被设定为获得所需的灵敏度，其中da / dN与H0.5m成比例（m是由材料确定的常数）。 根据该结构材料的疲劳损伤检测传感器及其安装方法，传感器可以提供高感测性能，以稳定可靠地确定对结构材料造成的疲劳损伤的程度，基于裂纹扩展的速率和量。

公开(公告)号：US06497159B1

公开(公告)日：2002-12-24

申请号：US09592115

申请日：2000-06-12

申请人： Eric Lavoie

发明人： Eric Lavoie

IPC分类号： G01N1900

CPC分类号： G01B17/02 ,  G01N29/223 ,  G01N29/225 ,  G01N29/28 ,  G01N2291/02854 ,  G01N2291/2634 ,  G10K11/004 ,  G21C17/017 ,  G21Y2002/203 ,  G21Y2002/204 ,  G21Y2002/40 ,  G21Y2004/30 ,  G21Y2004/501

摘要： A bracelet for moving sensors along a straight or elbow pipe. The bracelet has a number of side-by-side positionable supports for removably holding the sensors respectively. A flexible attachment is provided for holding the supports in a pliant side-by-side series arrangement. The attachment has opposite ends extending beyond the supports at opposite ends of the series arrangement. The bracelet further has a frame having an inner circular opened surface for installation around the pipe, and a longitudinal circular side receiving surface along which the series arrangement of the supports is mounted. The side receiving surface is provided with fastening members projecting at both ends of the series arrangement of the supports. The ends of the attachment is supported by the fastening members.

摘要翻译： 用于沿直管或弯管移动传感器的手镯。 手镯具有多个并排可定位的支撑件，用于可拆卸地固定传感器。 提供了柔性附件，用于将支撑件保持在一个平行的并排串联装置中。 附件具有在串联装置的相对端延伸超过支撑件的相对端。 手镯还具有框架，该框架具有用于安装在管周围的内圆形开口表面，以及安装有支撑件的串联装置的纵向圆形侧面接收表面。 侧接收表面设置有在支撑件的串联布置的两端突出的紧固构件。 附件的端部由紧固构件支撑。

公开(公告)号：US06490915B2

公开(公告)日：2002-12-10

申请号：US09759224

申请日：2001-01-16

申请人： Masamichi Yamada ,  Izumi Watanabe ,  Keiichi Nakada

发明人： Masamichi Yamada ,  Izumi Watanabe ,  Keiichi Nakada

IPC分类号： G01N1900

CPC分类号： G01F1/692 ,  G01F1/6845 ,  G01F1/698

摘要： A thermal type air flow rate sensor is formed with at least a heating resistor and a temperature measuring resistor on a semiconductor substrate via an electric insulation film, by forming the heating resistor and the temperature measuring resistor with an impurity doped silicon (Si) semiconductor thin film, and by performing high concentration doping process so that an electric resistivity (&rgr;) of the silicon (Si) semiconductor thin film is less than or equal to 8×10−4 &OHgr; cm, with simplified fabrication process for formation of the silicon (Si) semiconductor thin film at the same impurity concentration simultaneously in a lump at low cost.

摘要翻译： 热电式空气流量传感器通过电绝缘膜在半导体衬底上至少形成有加热电阻器和温度测量电阻器，通过用杂质掺杂硅（Si）半导体薄片形成加热电阻器和温度测量电阻器 并且通过进行高浓度掺杂工艺，使得硅（Si）半导体薄膜的电阻率（rho）小于或等于8×10 -4欧姆·厘米，通过制造硅（Si）的制造工艺简化， 半导体薄膜以相同的杂质浓度同时以一个小块成本。