公开(公告)号：US20020036827A1

公开(公告)日：2002-03-28

申请号：US09960283

申请日：2001-09-24

发明人： Takehiko Nakai

IPC分类号： G02B027/44

CPC分类号： G02B5/1895 ,  G02B5/1814 ,  G02B5/1876 ,  G02B27/0037 ,  G02B27/4211 ,  G02B27/4272 ,  G02B27/4277

摘要： Disclosed is a diffractive optical element which is made of at least two materials of different dispersions and which includes at least two diffraction gratings being accumulated one upon another, wherein each diffraction grating is formed on a curved surface of a substrate, and wherein a diffraction grating, of the at least two diffraction gratings, in which a curvature radius of the curved surface and a curvature radius of a grating surface in a portion where a grating pitch is largest, have different signs, is one of the at least two diffraction gratings which has a smallest grating thickness.

摘要翻译： 公开了一种衍射光学元件，其由至少两种不同分散体的材料制成，并且包括至少两个彼此堆积的衍射光栅，其中每个衍射光栅形成在基板的弯曲表面上，并且其中衍射光栅 在所述至少两个衍射光栅中，所述至少两个衍射光栅是所述至少两个衍射光栅中的至少两个衍射光栅之一，其中所述曲面的曲率半径和光栅表面在光栅间距最大的部分中的曲率半径具有不同的符号， 具有最小的光栅厚度。

公开(公告)号：US06295156B1

公开(公告)日：2001-09-25

申请号：US09566818

申请日：2000-05-08

申请人： Michael R. Feldman ,  Alan D. Kathman ,  William Hudson Welch

发明人： Michael R. Feldman ,  Alan D. Kathman ,  William Hudson Welch

IPC分类号： G02F109

CPC分类号： B82Y10/00 ,  G02B6/12 ,  G02B6/4206 ,  G02B6/43 ,  G02B7/025 ,  G02B27/0037 ,  G02B27/4238 ,  G02B27/4277 ,  G02B2006/12104 ,  G11B7/08564 ,  G11B7/122 ,  G11B7/123 ,  G11B7/1353 ,  G11B7/1372 ,  G11B7/1374 ,  G11B7/1378 ,  G11B7/139 ,  G11B7/1392 ,  G11B7/13922 ,  G11B7/22 ,  G11B11/10532 ,  G11B11/10536 ,  G11B11/10543 ,  G11B11/10554 ,  G11B11/1058

摘要： An integrated micro-optical system includes at least two wafers with at least two optical elements provided on respective surfaces of the at least two wafers. An active element having a characteristic which changes in response to an applied field may be integrated on a bottom surface of the wafers. The resulting optical system may present a high numerical aperture. Preferably, one of the optical elements is a refractive element formed in a material having a high index of refraction.

摘要翻译： 集成的微光学系统包括至少两个晶片，其中至少两个光学元件设置在至少两个晶片的相应表面上。 具有响应于施加场的变化的特性的有源元件可以集成在晶片的底表面上。 所得到的光学系统可以呈现高数值孔径。 优选地，光学元件中的一个是在具有高折射率的材料中形成的折射元件。

公开(公告)号：US06285512B1

公开(公告)日：2001-09-04

申请号：US09296563

申请日：1999-04-22

申请人： Yuji Sudoh

发明人： Yuji Sudoh

IPC分类号： G02B702

CPC分类号： G03F7/70241 ,  G02B7/02 ,  G02B27/0043 ,  G02B27/4222 ,  G02B27/4277 ,  G03F7/70258 ,  G03F7/70825

摘要： A lens barrel includes an optical element having a light-transmissive surface which is deformed by own weight thereof and/or by being supported, and a plurality of protrusive parts which support the optical element. The plurality of protrusive parts are disposed in such a way as to enable the light-transmissive surface of the optical element to be deformed symmetrically with respect to a plane which includes an optical axis.

摘要翻译： 镜筒包括具有通过其自身重量和/或被支撑而变形的透光表面的光学元件和支撑光学元件的多个突出部分。 多个突出部分被布置成使得光学元件的透光表面相对于包括光轴的平面对称地变形。

公开(公告)号：US06266192B1

公开(公告)日：2001-07-24

申请号：US09031762

申请日：1998-02-27

申请人： Yoshiyuki Sekine ,  Ryusho Hirose

发明人： Yoshiyuki Sekine ,  Ryusho Hirose

IPC分类号： G02B518

CPC分类号： G03F7/70308 ,  G02B27/0043 ,  G02B27/4211 ,  G02B27/4222 ,  G02B27/4277 ,  G03F7/2002 ,  G03F7/70241

摘要： A projection exposure apparatus includes an illumination optical system for illuminating a mask with light from a light source and a projection optical system having at least one diffractive optical element, for projecting an image of a pattern of the mask, as illuminated, onto a substrate. The at least one diffractive optical element is adapted to produce first diffraction light of an order to be used for projection of the image and second diffraction light of an order different from that of the first diffraction light. A portion of the second diffraction light is projected onto the substrate to provide a substantially uniform intensity distribution.

摘要翻译： 投影曝光装置包括用于利用来自光源的光照射掩模的照明光学系统和具有至少一个衍射光学元件的投影光学系统，用于将被照射的掩模的图案的图像投影到基板上。 所述至少一个衍射光学元件适于产生用于图像投射的次序的第一衍射光和与第一衍射光不同的次序的第二衍射光。 第二衍射光的一部分投射到基板上以提供基本均匀的强度分布。

公开(公告)号：US5973827A

公开(公告)日：1999-10-26

申请号：US9323

申请日：1998-01-20

申请人： Robert B. Chipper

发明人： Robert B. Chipper

IPC分类号： G02B5/18 ,  G02B13/14 ,  G02B27/00 ,  G02B5/32 ,  G02B27/44

CPC分类号： G02B27/4211 ,  G02B13/14 ,  G02B27/0037 ,  G02B27/4216 ,  G02B27/4272 ,  G02B27/4277 ,  G02B5/1809

摘要： This patent teaches a low cost imager. The imager has an refractive objective lens 10 having a surface with a color correcting diffractive pattern 16 and an infrared transmitting polymeric field lens 18 having a substantially flat surface with a first field-correcting diffractive pattern. In this imager, the first field-correcting diffractive pattern operates to reduce aberrations of an image. In some embodiments, the imager further has a second field-correcting diffractive pattern on the field lens, where the first and second field-correcting diffractive pattern cooperating to reduce aberrations of the image. Additionally, this patent teaches a refractive/diffractive achromatic lens group 30. This achromat 30 can be used in the disclosed imager or in other optical devices. The achromatic group 30 has a refractive lens 10 and a lens 28 having a substantially flat surface with a surface diffractive pattern 16, the surface diffractive pattern cooperating with the refractive lens to reduce chromatic aberrations. Preferably, the second lens is formed from a polymeric sheet. These optics of the present invention can be used in infrared or visible optical devices.

摘要翻译： 该专利教导了低成本的成像器。 该成像器具有折射物镜10，该折射物镜具有具有彩色校正衍射图案16的表面和具有第一场校正衍射图案的具有基本平坦表面的红外透射聚合物场透镜18。 在该成像器中，第一场校正衍射图案用于减少图像的像差。 在一些实施例中，成像器还在场透镜上具有第二场校正衍射图案，其中第一和第二场校正衍射图案协作以减少图像的像差。 此外，该专利教导了折射/衍射消色差透镜组30.该消色差30可用于所公开的成像器或其它光学装置中。 消色差基团30具有折射透镜10和透镜28，透镜28具有具有表面衍射图案16的基本平坦的表面，该表面衍射图案与折射透镜配合以减少色差。 优选地，第二透镜由聚合物片形成。 本发明的这些光学元件可用于红外或可见光学器件。

公开(公告)号：US5387973A

公开(公告)日：1995-02-07

申请号：US699135

申请日：1984-12-18

申请人： Hillary G. Sillitto

发明人： Hillary G. Sillitto

IPC分类号： G01J1/42 ,  G01S7/48 ,  G02B27/44 ,  G01B9/02

CPC分类号： G02B27/60 ,  G01J1/4257 ,  G01S7/4804 ,  G02B27/4277

摘要： Detector apparatus includes a diffraction grating (11) having a period such that the incidence of coherent point-source radiation upon it produces a number of spaced self-images of the grating behind it. A Moire grating (12) is placed to coincide with one of these self-images and a detector array (13-16) is placed behind the Moire grating to detect the resulting interference fringes.

摘要翻译： 检测器装置包括具有周期的衍射光栅（11），使得其上的相干点源辐射的入射产生在其后面的光栅的多个间隔的自我图像。 放置一个莫尔光栅（12）与这些自我图像中的一个重合，并且将检测器阵列（13-16）放置在莫尔光栅后面以检测所得到的干涉条纹。

公开(公告)号：US5229880A

公开(公告)日：1993-07-20

申请号：US848632

申请日：1992-03-09

申请人： Harvey M. Spencer ,  Lacy G. Cook

发明人： Harvey M. Spencer ,  Lacy G. Cook

IPC分类号： G02B13/02 ,  G02B5/18 ,  G02B13/14 ,  G02B15/02 ,  G02B17/02 ,  G02B17/08 ,  G02B23/00 ,  G02B23/12 ,  G02B27/00

CPC分类号： G02B27/0037 ,  G02B15/02 ,  G02B17/02 ,  G02B23/12 ,  G02B27/4211 ,  G02B27/4277 ,  G02B5/1876 ,  G02B5/1895

摘要： An infrared refractive reimaging afocal telescope (10) has an objective lens group (12), an eyepiece lens group (14), and a switching lens group (16). The system (10) provides a plurality of magnification modes in a compact arrangement. The system (10) utilizes lenses (40, 42, 44, 46) with diffractive surfaces to provide for magnification changes and chromatic aberration correction. The system provides for excellent image quality in all modes using a minimum number of lens elements.

公开(公告)号：US5117306A

公开(公告)日：1992-05-26

申请号：US553336

申请日：1990-07-17

申请人： Allen L. Cohen

发明人： Allen L. Cohen

IPC分类号： G02B5/18 ,  G02B27/00

CPC分类号： G02B27/0037 ,  G02B27/4211 ,  G02B27/4272 ,  G02B27/4277 ,  G02B5/1876 ,  G02B5/1895

摘要： A diffraction bifocal lens or lens system, comprising two profiled surfaces or interfaces or a linear combination thereof, wherein one profile provides for the bifocality of the lens and the other profile compensates for chromatic aberration. These lenses or lens systems exhibit two focal points, one which exhibits positive chromatic aberration and the other which exhibits negative chromatic aberration.

摘要翻译： 衍射双焦透镜或透镜系统，包括两个成型表面或界面或其线性组合，其中一个轮廓提供透镜的双焦点，另一个轮廓补偿色差。 这些透镜或透镜系统呈现出两个焦点，一个呈现正色差，另一个呈现负色差。

公开(公告)号：US4878735A

公开(公告)日：1989-11-07

申请号：US144942

申请日：1988-01-15

申请人： Ivars J. Vilums

发明人： Ivars J. Vilums

IPC分类号： G02B27/44 ,  H04N13/00

CPC分类号： G02B5/1885 ,  G02B27/1066 ,  G02B27/1086 ,  G02B27/4205 ,  G02B27/4277 ,  H04N13/0406

摘要： An optical imaging system comprised of successive planes of massively parallel elements, wherein each element handles only a small component of the resulting image is described. The resulting image is a composite or integral image made up of typically several hundred thousand component points each individually generated by a separate serial optical processing stream.

摘要翻译： 描述了包括大量平行元件的连续平面的光学成像系统，其中每个元件仅处理所得图像的小部件。 所得到的图像是由单独的串行光学处理流单独产生的通常数十万个分量点组成的复合或整体图像。

公开(公告)号：US4786124A

公开(公告)日：1988-11-22

申请号：US43124

申请日：1987-04-27

申请人： Thomas W. Stone ,  Nicholas George

发明人： Thomas W. Stone ,  Nicholas George

IPC分类号： G01D5/38 ,  G02B26/00 ,  G02B26/06 ,  G02B27/44 ,  G02F1/11 ,  G02B5/32 ,  G01B9/02 ,  G02B5/18

CPC分类号： G02F1/11 ,  G01D5/38 ,  G02B26/00 ,  G02B26/06 ,  G02B27/4277 ,  G02B27/4288

摘要： Achromatic optical systems forming phase shifters and phase modulators are presented and shown to impart (temporal) phase-angle shifts in incoming waves which are independent of wavelength over extremely broad spectral ranges (achromatic or white light). Three major classes of achromatic phase shifters are described including the triangle, close cascade, and imaged grating configurations. When constructed utilizing volume holographic optical elements, very high diffraction efficiencies may be achieved over the large bandwidths used. These systems may similarly be utilized to impart achromatic frequency shifts and frequency modulations which are wavelength independent over extreme spectral ranges and usually do not disturb the spatial form of the input waves. These devices may be used in AC interferometers and allow such interferometers to be operated with white light. The devices are also useful in switching between spatial sine and cosine optical transforms in optical pattern recognition systems.

摘要翻译： 呈现并示出形成移相器和相位调制器的消色差光学系统以在非常宽的光谱范围（无彩色或白光）上独立于波长的入射波中赋予（时间）相位角移动。 描述了三个主要类别的消色差移相器，包括三角形，接近级联和成像光栅配置。 当使用体积全息光学元件构造时，可以在所使用的大带宽上实现非常高的衍射效率。 这些系统可以类似地用于赋予在极光谱范围上波长独立的消色差频移和频率调制，并且通常不干扰输入波的空间形式。 这些装置可用在AC干涉仪中，并允许这种干涉仪用白光操作。 这些器件还可用于在光学模式识别系统中切换空间正弦和余弦光学变换。