公开(公告)号：US20140183162A1

公开(公告)日：2014-07-03

申请号：US13911984

申请日：2013-06-06

Applicant: Samsung Display Co., LTD.

Inventor： Ki-Hyun CHO ,  Hoon KANG ,  Jae-Sung KIM ,  Dong-Min KIM ,  Seung-Ki KIM ,  Eun JEAGAL

IPC: G03F7/40 ,  G03F7/038

CPC classification number: G03F7/0048 ,  G03F7/0163 ,  G03F7/022 ,  G03F7/0233 ,  G03F7/0236 ,  G03F7/038 ,  G03F7/039 ,  G03F7/09 ,  G03F7/092 ,  G03F7/16 ,  G03F7/168 ,  G03F7/30 ,  G03F7/36 ,  G03F7/38 ,  G03F7/40

Abstract: A method of forming a metal pattern is disclosed. In the method, a metal layer is formed on a base substrate. A photoresist composition is coated on the metal layer to form a coating layer. The photoresist composition includes a binder resin, a photo-sensitizer and a mixed solvent including a first solvent, a second solvent having a higher volatility than the first solvent, and a third solvent having a higher volatility than the second solvent. The coating layer is exposed to light. The coating layer is partially removed to form a photoresist pattern. The metal layer is patterned by using the photoresist pattern as a mask.

Abstract translation: 公开了一种形成金属图案的方法。 在该方法中，在基底基板上形成金属层。 将光致抗蚀剂组合物涂覆在金属层上以形成涂层。 光致抗蚀剂组合物包括粘合剂树脂，光敏剂和包含第一溶剂，挥发性高于第一溶剂的第二溶剂和比第二溶剂挥发性高的第三溶剂的混合溶剂。 将涂层曝光。 部分去除涂层以形成光致抗蚀剂图案。 通过使用光致抗蚀剂图案作为掩模来对金属层进行构图。

公开(公告)号：US20140131699A1

公开(公告)日：2014-05-15

申请号：US13858177

申请日：2013-04-08

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Joo Ae YOUN ,  Hoon KANG ,  Sung Hoon KIM ,  Hye Won YOO

IPC: H01L29/786 ,  H01L29/66

CPC classification number: H01L27/1259 ,  H01L29/42372 ,  H01L29/42384 ,  H01L29/4908 ,  H01L29/495 ,  H01L29/66742 ,  H01L29/66765 ,  H01L29/66969 ,  H01L29/78636

Abstract: A thin film transistor display panel includes a gate electrode on a substrate; a gate insulating layer on the substrate and the gate electrode; a planarization layer on the gate insulating layer and at opposing sides of the gate electrode, where the planarization layer exposes the gate insulating layer; a semiconductor layer on the gate insulating layer; and a source electrode and a drain electrode on the semiconductor layer and spaced apart from each other.

Abstract translation: 薄膜晶体管显示面板包括在基板上的栅电极; 基板上的栅极绝缘层和栅电极; 所述栅极绝缘层上和所述栅电极的相对侧的平坦化层，其中所述平坦化层暴露所述栅极绝缘层; 栅极绝缘层上的半导体层; 以及在半导体层上的源电极和漏电极，彼此间​​隔开。