Silicon Photonics Device for LIDAR Sensor and Method for Fabrication

    公开(公告)号:US20240061178A1

    公开(公告)日:2024-02-22

    申请号:US18497717

    申请日:2023-10-30

    CPC classification number: G02B6/136 G01S7/4816 G02B2006/12107

    Abstract: A structure of a silicon photonics device for LIDAR includes a first insulating structure and a second insulating structure disposed above one or more etched silicon structures overlying a substrate member. A metal layer is disposed above the first insulating structure without a prior deposition of a diffusion barrier and adhesion layer. A thin insulating structure is disposed above the second insulating structure. A first configuration of the metal layer, the first insulating structure and the one or more etched silicon structures forms a free-space coupler. A second configuration of the thin insulating structure above the second insulating structure forms an edge coupler.

    Silicon photonics device for LIDAR sensor and method for fabrication

    公开(公告)号:US11835765B2

    公开(公告)日:2023-12-05

    申请号:US18051337

    申请日:2022-10-31

    Abstract: A structure of a silicon photonics device for LIDAR includes a first insulating structure and a second insulating structure disposed above one or more etched silicon structures overlying a substrate member. A metal layer is disposed above the first insulating structure without a prior deposition of a diffusion barrier and adhesion layer. A thin insulating structure is disposed above the second insulating structure. A first configuration of the metal layer, the first insulating structure and the one or more etched silicon structures forms a free-space coupler. A second configuration of the thin insulating structure above the second insulating structure forms an edge coupler.

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