公开(公告)号：US06550334B2

公开(公告)日：2003-04-22

申请号：US09933665

申请日：2001-08-22

申请人： Masaru Kodama ,  Kiyotaka Iwatsubo ,  Nobuhiko Nishimura ,  Toshihiko Imamoto ,  Masaaki Fujita

发明人： Masaru Kodama ,  Kiyotaka Iwatsubo ,  Nobuhiko Nishimura ,  Toshihiko Imamoto ,  Masaaki Fujita

IPC分类号： G01N2906

CPC分类号： F16L41/082 ,  B23K13/025 ,  B23K37/0533 ,  B23K2101/04 ,  G01N2291/0234 ,  G01N2291/044

摘要： An ultrasonic detecting apparatus includes a transmitting element for emitting an ultrasonic wave toward a surface to be probed inside a sample from a surface of the sample at a predetermined angle. The ultrasonic detecting apparatus also includes a receiving element for receiving the ultrasonic wave reflected from the surface of the sample. The transmitting element and the receiving element are separated from each other on a single pedestal and are movable on the surface of the sample in a direction perpendicular to the surface to be probed. A distance between the transmitting element and the receiving element is arbitrarily changeable.

摘要翻译： 超声波检测装置包括发射元件，用于以预定的角度从样品的表面向待探测的表面发射超声波。 超声波检测装置还包括用于接收从样品表面反射的超声波的接收元件。 发射元件和接收元件在单个基座上彼此分离，并且可以在垂直于待探测表面的方向上在样品的表面上移动。 发射元件和接收元件之间的距离是可任意改变的。

公开(公告)号：US06477898B1

公开(公告)日：2002-11-12

申请号：US09610501

申请日：2000-07-06

申请人： Sang-In Han ,  Pawitter Mangat

发明人： Sang-In Han ,  Pawitter Mangat

IPC分类号： G01N2906

CPC分类号： G03F1/20 ,  G01N29/12 ,  G01N29/2418 ,  G01N29/348 ,  G01N2291/0237 ,  G03F1/84

摘要： A method and apparatus for determining stress levels of membrane masks that may be used in membrane-based lithographic techniques is presented. A piezoelectric plate (30) is used to induce vibrations into the membrane mask (35), where the frequency and amplitude of the vibrations induced in the membrane layer (50) are optically sensed. By comparing the stimulus applied to the piezoelectric plate (30) with the response sensed optically in a gain phase analyzer (80), a frequency graph (110) associated with the membrane layer (50) is constructed such that resonant frequencies are easily determined. These resonant frequencies can then be used to calculate the stress associated with the membrane layer (50).

摘要翻译： 提出了一种用于确定可用于基于膜的光刻技术中的膜掩模的应力水平的方法和装置。 使用压电板（30）将振动引入膜掩模（35），其中在膜层（50）中感应的振动的频率和振幅被光学感测。 通过将施加到压电板（30）的刺激与在增益相位分析器（80）中光学感测的响应进行比较，构造与膜层（50）相关联的频率图（110），使得谐振频率容易确定。 然后可以使用这些谐振频率来计算与膜层（50）相关联的应力。

公开(公告)号：US06435031B1

公开(公告)日：2002-08-20

申请号：US09635114

申请日：2000-08-09

申请人： Katsumi Nagai

发明人： Katsumi Nagai

IPC分类号： G01N2906

CPC分类号： F15B15/2884 ,  G01D5/00

摘要： An anti-vibration member is provided on an inner wall of a cylinder tube of a lift cylinder. The anti-vibration member is formed into a cylindrical form, and an outer circumferential surface thereof is formed along an inner circumferential surface of the cylinder tube. The anti-vibration member is formed by coating resin high in ultrasonic wave attenuating effect (such as polyphenylene sulfide (PPS) resin). It is possible to attenuate or absorb a vibration of a surface wave transmitted from an ultrasonic wave sensor and indirectly transmitted through the inner wall of the cylinder tube.

摘要翻译： 在提升缸的缸筒的内壁上设有防振构件。 防振部件形成为圆筒状，其外周面沿着气缸筒的内周面形成。 防振部件是通过涂覆高超声波衰减效果的树脂（如聚苯硫醚（PPS）树脂）形成的）。 可以衰减或吸收从超声波传感器传递的表面波的振动，并且间接地通过气缸筒的内壁传递。

公开(公告)号：US06431002B1

公开(公告)日：2002-08-13

申请号：US09698275

申请日：2000-10-30

申请人： Masatoshi Aijima

发明人： Masatoshi Aijima

IPC分类号： G01N2906

CPC分类号： G01N29/27 ,  G01N2291/044 ,  G01N2291/045 ,  G01N2291/048 ,  G01N2291/106 ,  G01N2291/262

摘要： A tank 10 has an opening through which enters a molded material P1, which is the object of inspection, and water W1 is filled within the tank 10. One side wall of said tank 10 is equipped with the plurality of ultrasonic search units 40. On the other side wall of said tank 10 is mounted a reflector plate 100 opposing to said ultrasonic search units 40. The reflection surface 100a of said reflector plate 100 is positioned away from the surface of an object portion P10 by a predetermined distance D1. The ultrasonic waves generated from the search units are reflected, and the reflected waves are transduced into electric signals, and the signals are compared with the signals received from the solid portion, so as to detect flaw.

摘要翻译： 罐10具有开口，通过该开口进入作为检查对象的成型材料P1，并且水W1被填充在罐10内。所述罐10的一个侧壁配备有多个超声波搜索单元40.在 所述容器10的另一侧壁安装有与所述超声波搜索单元40相对的反射板100.所述反射板100的反射表面100a被定位成远离物体部分P10的表面预定距离D1。 从搜索单元产生的超声波被反射，并且将反射波转换成电信号，并且将信号与从实心部分接收的信号进行比较，以便检测缺陷。

公开(公告)号：US06360609B1

公开(公告)日：2002-03-26

申请号：US09736628

申请日：2000-12-15

申请人： Shi-Chang Wooh

发明人： Shi-Chang Wooh

IPC分类号： G01N2906

CPC分类号： G01N29/50 ,  G01N29/041 ,  G01N29/42 ,  G01N29/46 ,  G01N2291/011 ,  G01N2291/0423 ,  G01N2291/0427 ,  G01N2291/2632

摘要： A method and system of locating discontinuities, measuring distances, locating unknown sources, and measuring the thickness of multimode dispersive medium includes sensing a multimode dispersive acoustic guided wave and frequency decomposing that wave using spectral temporal analysis; selecting a frequency which identifies a group delay of the guided wave for each mode occurring at that frequency; selecting a mode from the group delays of the selected mode, determining the group velocity from the dispersion curves and computing the desired parameter.

摘要翻译： 定位不连续性，测量距离，定位未知来源以及测量多模色散介质厚度的方法和系统包括使用光谱时间分析来感测多模色散声导波和频率分解波; 选择识别针对在该频率发生的每个模式的导波的组延迟的频率; 从所选模式的组延迟中选择模式，从色散曲线确定组速度并计算所需参数。

公开(公告)号：US06253618B1

公开(公告)日：2001-07-03

申请号：US09644376

申请日：2000-08-23

申请人： Shi-Chang Wooh

发明人： Shi-Chang Wooh

IPC分类号： G01N2906

CPC分类号： G01N29/07 ,  G01N29/341 ,  G01N2291/012 ,  G01N2291/103 ,  G01N2291/106

摘要： A synthetic phase tuned multi-mode acoustic guided wave system and method activates at least one of a plurality of elements as a receiver or a transmitter and at least two of the elements as transmitters or receivers, respectively, and sequentially excites each of the transmitter elements for creating a train of acoustic guided waves which includes a selected mode, and shifts the acoustic guided waves of the selected mode sensed by the receivers by a period which is a function of the phase velocity of the selected mode and sums them to reinforce the selected mode.

摘要翻译： 合成相位调谐多模声波导波系统和方法分别激活作为接收机或发射机的多个元件中的至少一个元件和作为发射机或接收机的至少两个元件，并且顺序地激励每个发射机元件 用于产生包括选定模式的一系列声导波，并且将由接收机感测的所选择的模式的声导波移动一个作为所选模式的相速度的函数的周期，并将它们相加以加强所选择的 模式。