公开(公告)号：US20130306838A1

公开(公告)日：2013-11-21

申请号：US13888615

申请日：2013-05-07

Applicant: SEIKO EPSON CORPORATION

Inventor： Tomonori MATSUSHITA

IPC: G02B26/00 ,  G01J1/44

CPC classification number: G02B26/001 ,  G01J1/44 ,  G01J3/027 ,  G01J3/26 ,  G01J3/2823 ,  G01J2003/1247 ,  G01N21/658

Abstract: A variable-wavelength interference filter includes: a first substrate; a second substrate facing the first substrate; a first reflection layer provided on a surface facing the second substrate, of the first substrate; a second reflection layer which is provided on a surface facing the first substrate, of the second substrate, and faces the first reflection layer via an inter-layer gap; and an electrostatic actuator which flexes the second substrate in a direction toward the first substrate and thus changes the inter-layer gap. The first reflection layer and the second reflection layer have a reflectance characteristic showing a higher reflectance to light with a second wavelength that is shorter than a first wavelength, than a reflectance to light with the first wavelength.

Abstract translation: 可变波长干涉滤光器包括：第一基板; 面对所述第一基板的第二基板; 设置在所述第一基板的面对所述第二基板的表面上的第一反射层; 第二反射层，设置在与第一基板相对的表面上的第二基板，并经由层间间隔面对第一反射层; 以及静电致动器，其朝向第一基板的方向弯曲第二基板，从而改变层间间隙。 第一反射层和第二反射层具有比具有第一波长的光的反射率更高的对具有比第一波长短的第二波长的光的反射率的反射特性。