公开(公告)号：US09915815B2

公开(公告)日：2018-03-13

申请号：US15030413

申请日：2014-10-20

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Koyo Watanabe ,  Naoya Matsumoto

IPC: G02B21/06 ,  G02B21/10 ,  G02B21/33 ,  G02B21/00 ,  G02B21/36 ,  G02B27/56 ,  G02B27/48

CPC classification number: G02B21/10 ,  G02B21/0092 ,  G02B21/06 ,  G02B21/33 ,  G02B21/365 ,  G02B27/48 ,  G02B27/56

Abstract: A total internal reflection light illumination apparatus includes a light source providing illumination light L1, a spatial light modulator inputting the illumination light L1 and converging and outputting the illumination light L1 by presenting a lens pattern, an objective lens illuminating an object substrate with illumination light L2 converged and output by the spatial light modulator, and a calculation unit providing, to the spatial light modulator, the lens pattern corresponding to at least one of a desired polarization state, desired penetration length, desired shape, and desired light intensity of the evanescent light L3. The lens pattern converges the illumination light L2 on a pupil plane of the objective lens.